Array substrate and method of fabricating the same
    1.
    发明授权
    Array substrate and method of fabricating the same 有权
    阵列基板及其制造方法

    公开(公告)号:US09024323B2

    公开(公告)日:2015-05-05

    申请号:US13599945

    申请日:2012-08-30

    CPC分类号: H01L29/66757 H01L29/78633

    摘要: Provided is an array substrate including a base substrate, a thin film transistor having a semiconductor layer disposed on a first part of the base substrate. The semiconductor layer includes a source electrode and a drain electrode, a gate electrode disposed on the semiconductor layer and insulated from the semiconductor layer. A light-blocking layer disposed between the base substrate and the thin film transistor. The light-blocking layer comprises a first layer continuously disposed on and around the first part of the base substrate, and a second layer formed on the first part of the base substrate without extending outside of the first part, the second layer being disposed on the first layer.

    摘要翻译: 提供了一种阵列基板,包括基底基板,薄膜晶体管,其具有设置在基底基板的第一部分上的半导体层。 半导体层包括源电极和漏电极,设置在半导体层上并与半导体层绝缘的栅电极。 设置在基底基板和薄膜晶体管之间的遮光层。 遮光层包括连续地设置在基底基板的第一部分上和周围的第一层,以及形成在基底基板的第一部分上而不延伸到第一部分外侧的第二层,第二层设置在第一层上 第一层

    Method for manufacturing thin film transistor array panel
    2.
    发明授权
    Method for manufacturing thin film transistor array panel 有权
    制造薄膜晶体管阵列面板的方法

    公开(公告)号:US08557621B2

    公开(公告)日:2013-10-15

    申请号:US13157806

    申请日:2011-06-10

    IPC分类号: H01L21/00

    摘要: A method for manufacturing a thin film transistor array panel, including: sequentially forming a first silicon layer, a second silicon layer, a lower metal layer, and an upper metal layer on a gate insulating layer and a gate line; forming a first film pattern on the upper metal layer; forming a first lower metal pattern and a first upper metal pattern that includes a protrusion, by etching the upper metal layer and the lower metal layer; forming first and second silicon patterns by etching the first and second silicon layers; forming a second film pattern by ashing the first film pattern; forming a second upper metal pattern by etching the first upper metal pattern; forming a data line and a thin film transistor by etching the first lower metal pattern and the first and second silicon patterns; and forming a passivation layer and a pixel electrode on the resultant.

    摘要翻译: 一种制造薄膜晶体管阵列面板的方法,包括:在栅绝缘层和栅极线上依次形成第一硅层,第二硅层,下金属层和上金属层; 在上金属层上形成第一膜图案; 通过蚀刻上金属层和下金属层,形成第一下金属图案和包括突起的第一上金属图案; 通过蚀刻第一和第二硅层形成第一和第二硅图案; 通过灰化第一膜图案形成第二膜图案; 通过蚀刻第一上金属图案形成第二上金属图案; 通过蚀刻第一下金属图案和第一和第二硅图案来形成数据线和薄膜晶体管; 并在所得物上形成钝化层和像素电极。