Laser mask and crystallization method using the same
    1.
    发明授权
    Laser mask and crystallization method using the same 有权
    激光掩模和结晶法使用相同

    公开(公告)号:US07569307B2

    公开(公告)日:2009-08-04

    申请号:US11016782

    申请日:2004-12-21

    IPC分类号: H01L21/84

    摘要: A laser mask includes a mask pattern with edges having inverted shapes to alleviate the effects of diffraction of laser beams to reduce overlap regions such that crystallization characteristics are improved. The laser mask includes a mask pattern that includes transmitting regions and a blocking region. The edges of the mask have shapes inverted to the shapes of the edges of a silicon thin film crystallized by the pattern.

    摘要翻译: 激光掩模包括具有倒置形状的边缘的掩模图案,以减轻激光束的衍射的影响,以减少重叠区域,从而提高结晶特性。 激光掩模包括包括透射区域和阻挡区域的掩模图案。 掩模的边缘具有与通过图案结晶的硅薄膜的边缘的形状相反的形状。

    Laser mask and crystallization method using the same
    2.
    发明授权
    Laser mask and crystallization method using the same 有权
    激光掩模和结晶法使用相同

    公开(公告)号:US07816196B2

    公开(公告)日:2010-10-19

    申请号:US12495377

    申请日:2009-06-30

    IPC分类号: H01L21/84

    摘要: An embodiment of a laser crystallization method includes providing a substrate on which an amorphous silicon thin film is deposited, positioning a laser mask over the substrate, the laser mask including a mask pattern that contains transmitting regions and a blocking region, irradiating a first laser beam onto a surface of the substrate through the pattern of the laser mask to first crystallize a predetermined region of the silicon thin film, moving the laser mask or a stage on which the substrate is loaded in an X-axis direction to perform second crystallization using the laser mask, repeatedly performing the crystallization to an end of the substrate in the X-axis direction, moving the laser mask or the stage in a Y-axis direction, and repeatedly performing the crystallization in the Y-axis direction to complete crystallization.

    摘要翻译: 激光结晶方法的一个实施例包括提供沉积非晶硅薄膜的衬底,将激光掩模定位在衬底上,激光掩模包括含有透射区域和阻挡区域的掩模图案,照射第一激光束 通过激光掩模的图案在基板的表面上,首先使硅薄膜的预定区域结晶,使激光掩模或其上载置基板的载台沿X轴方向移动,以使用第二结晶 激光掩模,在X轴方向上重复地向基板的端部进行结晶,使激光掩模或载物台沿Y轴方向移动,并且在Y轴方向上反复进行结晶以完成结晶。

    Method of deciding focal plane and method of crystallization using thereof
    3.
    发明授权
    Method of deciding focal plane and method of crystallization using thereof 有权
    决定焦平面的方法及其结晶方法

    公开(公告)号:US07253010B2

    公开(公告)日:2007-08-07

    申请号:US11017826

    申请日:2004-12-22

    IPC分类号: H01L21/428

    摘要: A crystallization method is provided which improves a crystallization process by deciding a best-fit focal plane for a laser beam using a test mask and then applying the decided best-fit focal plane to the crystallization process. The crystallization method includes loading a test mask on a mask stage; deciding a best-fit focal plane by performing a crystallization test using the test mask, checking the test result and deciding conditions of a best-fit focal plane from the test result; moving the mask stage to a position corresponding to the best-fit focal plane; loading a mask for crystallization process onto the moved mask stage; and performing the crystallization process using the mask for crystallization process.

    摘要翻译: 提供一种结晶方法,其通过使用测试掩模确定用于激光束的最佳拟合焦平面,然后将所确定的最佳拟合焦平面应用于结晶过程来改善结晶过程。 结晶方法包括在掩模台上装载测试掩模; 通过使用测试掩模进行结晶测试来确定最佳拟合焦平面,从测试结果检查测试结果并确定最佳拟合焦平面的条件; 将掩模台移动到对应于最佳拟合焦平面的位置; 将用于结晶过程的掩模加载到移动的掩模台上; 并使用该结晶处理用掩模进行结晶处理。

    Method of deciding focal plane and method of crystallization using thereof
    4.
    发明授权
    Method of deciding focal plane and method of crystallization using thereof 有权
    决定焦平面的方法及其结晶方法

    公开(公告)号:US07759605B2

    公开(公告)日:2010-07-20

    申请号:US11826160

    申请日:2007-07-12

    IPC分类号: B23K26/04 H01L21/428

    摘要: A crystallization method and system are provided which improve a crystallization process by deciding a best-fit focal plane for a laser beam using a test mask and then applying the decided best-fit focal plane to the crystallization process. The crystallization method includes loading a test mask on a mask stage; deciding a best-fit focal plane by performing a crystallization test using the test mask, checking the test result and deciding conditions of a best-fit focal plane from the test result; moving the mask stage to a position corresponding to the best-fit focal plane; loading a mask for crystallization process onto the moved mask stage; and performing the crystallization process using the mask for crystallization process.

    摘要翻译: 提供了一种结晶方法和系统,其通过使用测试掩模确定用于激光束的最佳拟合焦平面,然后将决定的最佳拟合焦平面应用于结晶过程来改善结晶过程。 结晶方法包括在掩模台上装载测试掩模; 通过使用测试掩模进行结晶测试来确定最佳拟合焦平面,从测试结果检查测试结果并确定最佳拟合焦平面的条件; 将掩模台移动到对应于最佳拟合焦平面的位置; 将用于结晶过程的掩模加载到移动的掩模台上; 并使用该结晶处理用掩模进行结晶处理。

    Fabricating method of flexible display
    5.
    发明授权
    Fabricating method of flexible display 有权
    灵活显示的制作方法

    公开(公告)号:US08623162B2

    公开(公告)日:2014-01-07

    申请号:US13363272

    申请日:2012-01-31

    IPC分类号: B29C65/52

    摘要: A fabricating method of a flexible display device includes forming first and second jig substrates that have a first groove and a second groove formed in a lower part of an edge of the first groove; spreading an adhesive over the second groove; fixing first and second flexible substrates to the first groove and the adhesive; fabricating an upper array substrate on the first flexible substrate and a lower array substrate on the second flexible substrate; bonding the upper array substrate to the lower array substrate and injecting a liquid crystal; and peeling the first and second flexible substrates from the first and second jig substrates.

    摘要翻译: 柔性显示装置的制造方法包括:形成具有形成在第一凹槽的边缘的下部中的第一凹槽和第二凹槽的第一和第二夹具基板; 在第二凹槽上铺展粘合剂; 将第一和第二柔性基板固定到第一凹槽和粘合剂; 在所述第一柔性基板上制造上阵列基板,在所述第二柔性基板上制造下阵列基板; 将上阵列基板接合到下阵列基板并注入液晶; 以及从第一和第二夹具基板剥离第一和第二柔性基板。

    Fabricating method of flexible display
    6.
    发明授权
    Fabricating method of flexible display 有权
    灵活显示的制作方法

    公开(公告)号:US08147640B2

    公开(公告)日:2012-04-03

    申请号:US11311377

    申请日:2005-12-20

    IPC分类号: B29C65/50 B29C65/76

    摘要: A fabricating method of a flexible display device includes the steps of providing an adhesive layer including a first adhesive material on a first surface of a support film, a second adhesive material on a second surface of the support film such that an adhesive strength of the second adhesive material is lower than an adhesive strength of the first adhesive material, and a third adhesive material encompassing an edge of the second adhesive material such that an adhesive strength of the third adhesive material is higher than the adhesive strength of the second adhesive material; a first passivation film adhered to the first surface of the support film with the first adhesive material therebetween; and a second passivation film adhered to the second surface of the support film with the second adhesive material and the third adhesive material therebetween; peeling the first passivation film from the adhesive layer; adhering a rigid substrate to the first adhesive material; peeling the second passivation film from the adhesive layer; and adhering a flexible substrate onto the second and third adhesive materials.

    摘要翻译: 柔性显示装置的制造方法包括以下步骤:在支撑膜的第一表面上提供包括第一粘合材料的粘合剂层,在支撑膜的第二表面上提供第二粘合材料,使得第二粘合剂的粘合强度 粘合剂材料低于第一粘合剂材料的粘合强度,以及包围第二粘合材料的边缘的第三粘合剂材料,使得第三粘合剂材料的粘合强度高于第二粘合材料的粘合强度; 第一钝化膜,其粘附到所述支撑膜的第一表面上,其间具有第一粘合剂材料; 以及第二钝化膜,其中所述第二粘合剂材料和所述第三粘合剂材料粘附到所述支撑膜的所述第二表面; 从粘合剂层剥离第一钝化膜; 将刚性基材粘附到第一粘合剂材料上; 从粘合剂层剥离第二钝化膜; 并将柔性基板粘附到第二和第三粘合材料上。

    METHOD AND APPARATUS OF FORMING ALIGNMENT LAYER FOR LIQUID CRYSTAL DISPLAY DEVICE
    7.
    发明申请
    METHOD AND APPARATUS OF FORMING ALIGNMENT LAYER FOR LIQUID CRYSTAL DISPLAY DEVICE 有权
    用于液晶显示装置的形成对准层的方法和装置

    公开(公告)号:US20100203793A1

    公开(公告)日:2010-08-12

    申请号:US12766632

    申请日:2010-04-23

    IPC分类号: H01J9/00

    摘要: A method for forming an alignment layer is disclosed, to prevent light leakage generated by a physical contact between a rubbing roll and a substrate, which includes preparing a substrate; coating an alignment material on the substrate, for initial alignment of liquid crystal; applying an electric field or a magnetic field to the alignment material, for determination of alignment direction in the alignment material; and curing the alignment material.

    摘要翻译: 公开了一种用于形成取向层的方法,以防止摩擦辊与基板之间的物理接触产生的漏光,包括制备基板; 在衬底上涂覆取向材料,用于液晶的初始取向; 对取向材料施加电场或磁场,以确定取向材料中的取向方向; 并固化对准材料。

    Liquid crystal display panel and method of fabricating thereof
    8.
    发明授权
    Liquid crystal display panel and method of fabricating thereof 有权
    液晶显示面板及其制造方法

    公开(公告)号:US07407841B2

    公开(公告)日:2008-08-05

    申请号:US11527549

    申请日:2006-09-27

    IPC分类号: H01L21/00 H01L21/84

    摘要: The present invention relates to a liquid crystal display panel and a fabricating method thereof that is capable of enhancing crystallization efficiency of an active layer and simplifying the fabricating process. A fabricating method of a liquid crystal display panel includes forming a gate electrode on a substrate; forming a gate insulating film on the gate electrode formed thereon; forming an amorphous silicon film on the gate insulating film; forming an insulating pattern on the amorphous silicon film; crystallizing the amorphous silicon film into a polycrystalline silicon film using a derivative metal, the polycrystalline silicon film having source, drain and channel areas, wherein the insulating pattern overlaps the channel area of the polycrystalline silicon film; and forming source and drain electrodes on the polycrystalline silicon film, wherein the source and the drain electrodes contacting the source and drain areas of the polycrystalline silicon film, respectively.

    摘要翻译: 液晶显示面板及其制造方法技术领域本发明涉及能够提高有源层的结晶效率并简化制造工艺的液晶显示面板及其制造方法。 液晶显示面板的制造方法包括在基板上形成栅极电极; 在其上形成的栅电极上形成栅极绝缘膜; 在栅极绝缘膜上形成非晶硅膜; 在非晶硅膜上形成绝缘图案; 使用衍生金属将非晶硅膜结晶成多晶硅膜,所述多晶硅膜具有源极,漏极和沟道区域,其中绝缘图案与多晶硅膜的沟道区域重叠; 以及在所述多晶硅膜上形成源极和漏极,其中所述源极和漏极分别与所述多晶硅膜的所述源极和漏极区域接触。

    Structure of a liquid crystal display device and a method of
manufacturing same
    9.
    发明授权
    Structure of a liquid crystal display device and a method of manufacturing same 失效
    液晶显示装置的结构及其制造方法

    公开(公告)号:US5825437A

    公开(公告)日:1998-10-20

    申请号:US600529

    申请日:1996-02-13

    摘要: A liquid crystal display device comprising a substrate; a first metal layer including an aluminum alloy having a first refractory metal with a first melting temperature over the substrate; and a second metal layer including a pure aluminum or an aluminum alloy having a second refractory metal with a second melting temperature lower than the first melting temperature over the first metal layer. The above liquid crystal display device of the present invention prevents the occurrence of hillocks on the aluminum gate metal. A method of manufacturing a liquid crystal display device is disclosed including the steps of forming a first metal layer of an aluminum alloy including a refractory metal having a first melting temperature on a substrate; and forming a second metal layer of a pure aluminum or an aluminum alloy including a refractory metal having a second melting temperature lower than the first melting temperature on the first metal layer.

    摘要翻译: 一种液晶显示装置,包括:基板; 第一金属层,包括具有在所述基板上具有第一熔融温度的第一难熔金属的铝合金; 以及第二金属层,其包括纯铝或铝合金,其具有第二熔融温度低于第一金属层上的第一熔融温度的第二难熔金属。 本发明的上述液晶显示装置防止在铝栅极金属上发生小丘。 公开了一种制造液晶显示装置的方法,包括以下步骤:在基板上形成包括具有第一熔融温度的难熔金属的铝合金的第一金属层; 以及在所述第一金属层上形成包含具有低于所述第一熔融温度的第二熔融温度的难熔金属的纯铝或铝合金的第二金属层。

    Method and apparatus of forming alignment layer for liquid crystal display device
    10.
    发明授权
    Method and apparatus of forming alignment layer for liquid crystal display device 有权
    一种形成液晶显示装置取向层的方法和装置

    公开(公告)号:US08692965B2

    公开(公告)日:2014-04-08

    申请号:US12766632

    申请日:2010-04-23

    IPC分类号: G02F1/1337

    摘要: A method for forming an alignment layer is disclosed, to prevent light leakage generated by a physical contact between a rubbing roll and a substrate, which includes preparing a substrate; coating an alignment material on the substrate, for initial alignment of liquid crystal; applying an electric field or a magnetic field to the alignment material, for determination of alignment direction in the alignment material; and curing the alignment material.

    摘要翻译: 公开了一种用于形成取向层的方法,以防止摩擦辊与基板之间的物理接触产生的漏光,包括制备基板; 在衬底上涂覆取向材料,用于液晶的初始取向; 对取向材料施加电场或磁场,以确定取向材料中的取向方向; 并固化对准材料。