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公开(公告)号：US3436259A
公开(公告)日：1969-04-01
申请号：US3436259D
申请日：1966-05-12
Applicant: IBM
Inventor： REGH JOSEPH , SILVEY GENE A , GARDINER JAMES R
IPC: B24B37/04 , H01L21/20 , H01L21/288 , H01L21/306 , C23C17/02 , B44D5/10 , B44D5/12
CPC classification number: B24B37/102 , B24B37/042 , H01L21/02381 , H01L21/02532 , H01L21/02658 , H01L21/288 , H01L21/30625
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