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公开(公告)号:US3398032A
公开(公告)日:1968-08-20
申请号:US41419564
申请日:1964-11-27
Applicant: IBM
Inventor: REINHARD GLANG , LESSOR JR ARTHUR E
CPC classification number: H01C17/08 , C23F1/02 , H01B1/00 , H01C7/00 , H01C17/075 , Y10S148/051 , Y10S148/106 , Y10T29/49099 , Y10T29/49124
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2.Method of manufacturing multilayer microcircuitry including electropolishing to smooth film conductors 失效
Title translation: 制造多层微电路的方法,包括电镀抛光到光滑膜导体公开(公告)号:US3314869A
公开(公告)日:1967-04-18
申请号:US25262863
申请日:1963-01-21
Applicant: IBM
Inventor: DOBBIN WILLIAM J , LESSOR JR ARTHUR E , MADDOCKS FRED S
IPC: C23F1/02 , C23F1/26 , H01B3/00 , H01L49/02 , H05K1/03 , H05K3/06 , H05K3/07 , H05K3/10 , H05K3/22 , H05K3/38
CPC classification number: H05K3/22 , C23F1/02 , C23F1/26 , H01B3/004 , H01L49/02 , H05K1/0306 , H05K3/067 , H05K3/07 , H05K3/108 , H05K3/388 , H05K2201/0338 , H05K2203/0346 , Y10T29/49126
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