公开(公告)号：US20210384700A1

公开(公告)日：2021-12-09

申请号：US17340351

申请日：2021-06-07

Applicant: IMEC VZW

Inventor： Charles Caer ,  Philippe Soussan ,  Deniz Sabuncuoglu Tezcan ,  Gauri Karve ,  Yunlong Li

IPC: H01S5/026 ,  H01S5/30 ,  H01S5/042

Abstract: The disclosure relates to a method for processing a laser device, for example a III-V on silicon laser, including: providing a carrier substrate; forming a grating structure on the carrier substrate, wherein the grating structure delimits a cavity on a surface of the carrier substrate; placing a die in the cavity and bonding the die to the carrier substrate, wherein the die comprises an active region including a III-V semiconductor material; transferring the die from the carrier substrate to a silicon substrate by bonding an exposed side of the die to the silicon substrate and subsequently debonding the carrier substrate from the die; and forming a photonic structure, for example a silicon waveguide, coupled to the die.

公开(公告)号：US20220057581A1

公开(公告)日：2022-02-24

申请号：US17404173

申请日：2021-08-17

Applicant: IMEC vzw

Inventor： Charles Caer ,  Sarvagya Paavan DWIVEDI

IPC: G02B6/34 ,  G01S7/481 ,  G02F1/01

Abstract: An optical device including a waveguide grating is disclosed. The optical device may be used as an optical cavity for a laser device, for instance, of an integrated laser device for light detection and ranging (Lidar) applications. In one aspect, the optical device includes a waveguide grating for guiding light, a heating layer provided beneath or above the waveguide grating, and two or more contacts for passing a current through the heating layer, to generate heat in the heating layer. The heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating.

公开(公告)号：US11619785B2

公开(公告)日：2023-04-04

申请号：US17404173

申请日：2021-08-17

Applicant: IMEC vzw

Inventor： Charles Caer ,  Sarvagya Paavan Dwivedi

IPC: G02B6/34 ,  G01S7/481 ,  G02F1/01

Abstract: An optical device including a waveguide grating is disclosed. The optical device may be used as an optical cavity for a laser device, for instance, of an integrated laser device for light detection and ranging (Lidar) applications. In one aspect, the optical device includes a waveguide grating for guiding light, a heating layer provided beneath or above the waveguide grating, and two or more contacts for passing a current through the heating layer, to generate heat in the heating layer. The heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating.