公开(公告)号：US20240210388A1

公开(公告)日：2024-06-27

申请号：US18392118

申请日：2023-12-21

Applicant: IMEC VZW

Inventor： Liesbet LAGAE ,  Olivier HENRY ,  Nick VAN HELLEPUTTE

IPC: G01N33/543

CPC classification number: G01N33/5438 ,  G01N33/54306

Abstract: According to an aspect there is provided a sensing device for detection of at least one characteristic of a substance. The sensing device comprises:



a plurality of cavities, each comprising an opening;
a plurality of sensors for detecting the at least one characteristic, the plurality of sensors being arranged into a plurality of sets of sensors, each set being arranged in a mutually unique cavity;
a plurality of protective membranes, each being arranged to cover the opening of the mutually unique cavity, preventing the substance from entering the cavity, thereby protecting the set of sensors from being exposed to the substance.




The sensing device is configured for providing a different activation timing for different protective membranes, whereby different sets of sensors are exposed to the substance at different points in time, for providing detection of the at least one characteristic at multiple time points.

公开(公告)号：US20240165622A1

公开(公告)日：2024-05-23

申请号：US18509500

申请日：2023-11-15

Applicant: IMEC VZW

Inventor： Olivier HENRY ,  Tim STAKENBORG ,  Willem VAN ROY ,  Peter PEUMANS

IPC: B01L3/00 ,  G01N15/14

CPC classification number: B01L3/502761 ,  B01L3/502776 ,  B01L3/502792 ,  G01N15/1484 ,  B01L2200/0636 ,  B01L2200/0652 ,  B01L2200/10 ,  B01L2400/0403 ,  G01N2015/1445

Abstract: A method for monitoring a monitor material of a process, such as a manufacturing process, comprises: detecting a suspicious particle in a sample of the monitor material using an imaging system configured to image the sample using illumination light from a light source and to detect an interference pattern based on object light having interacted with the sample and reference light of the illumination light; selectively diverting the suspicious particle rom a flow of the sample to an analysis flow; activating a nucleic acid test (NAT) device, wherein said activating is triggered based on detecting of the suspicious particle in the sample; receiving by the NAT device the analysis flow comprising the suspicious particle; and subjecting the suspicious particle to a NAT analysis.
Also, an apparatus for monitoring a monitor material is provided.