公开(公告)号：US20240165622A1

公开(公告)日：2024-05-23

申请号：US18509500

申请日：2023-11-15

Applicant: IMEC VZW

Inventor： Olivier HENRY ,  Tim STAKENBORG ,  Willem VAN ROY ,  Peter PEUMANS

IPC: B01L3/00 ,  G01N15/14

CPC classification number: B01L3/502761 ,  B01L3/502776 ,  B01L3/502792 ,  G01N15/1484 ,  B01L2200/0636 ,  B01L2200/0652 ,  B01L2200/10 ,  B01L2400/0403 ,  G01N2015/1445

Abstract: A method for monitoring a monitor material of a process, such as a manufacturing process, comprises: detecting a suspicious particle in a sample of the monitor material using an imaging system configured to image the sample using illumination light from a light source and to detect an interference pattern based on object light having interacted with the sample and reference light of the illumination light; selectively diverting the suspicious particle rom a flow of the sample to an analysis flow; activating a nucleic acid test (NAT) device, wherein said activating is triggered based on detecting of the suspicious particle in the sample; receiving by the NAT device the analysis flow comprising the suspicious particle; and subjecting the suspicious particle to a NAT analysis.
Also, an apparatus for monitoring a monitor material is provided.

公开(公告)号：US20220199112A1

公开(公告)日：2022-06-23

申请号：US17645663

申请日：2021-12-22

Applicant: IMEC vzw

Inventor： Maarten ROSMEULEN ,  Arnaud FURNEMONT ,  Devin VERRECK ,  Antonio ARREGHINI ,  Willem VAN ROY ,  Kherim WILLEMS

IPC: G11B3/00

Abstract: A memory device including at least one channel and a fluid including particles is provided. In one aspect, the channel includes a least some of the fluid. The memory device may further include an actuator configured to induce a movement of the particles in the channel; and a writing element configured to arrange the particles in a sequence, thereby yielding a sequence of particles in the channel. The particles may include first particles and second particles. The particles may be in a first state or a second state in the channel. In certain aspects, the channel is configured to preserve the sequence of the particles. The memory device may further include a reading element for detecting the sequence of the particles in the channel.

公开(公告)号：US20240207761A1

公开(公告)日：2024-06-27

申请号：US18390262

申请日：2023-12-20

Applicant: IMEC VZW ,  Stichting IMEC Nederland

Inventor： Cian CUMMINS ,  Sandeep SEEMA SASEENDRAN ,  Willem VAN ROY ,  Aurelie HUMBERT ,  Fokko WIERINGA ,  Geert LANGEREIS

IPC: B01D29/01 ,  B01D29/05 ,  B01D39/16 ,  B01D39/20

CPC classification number: B01D29/012 ,  B01D29/05 ,  B01D39/1692 ,  B01D39/2068 ,  B01D2325/04 ,  B01D2325/34 ,  H01L21/0337

Abstract: A method for producing a filter, the method comprising



providing a first layer above a substrate;
providing a block copolymer layer above the first layer;
converting the block copolymer layer to a mask by selectively removing domains of the block copolymer layer;
etching pores through the first layer in regions exposed by the mask; and
forming a channel through the substrate, the channel being configured to provide fluid communication between a first and a second end of the channel, the first end of the channel being directly below the etched pores of the first layer,
whereby fluid passing through the channel and the pores is filtered by the pores, when the filter is in use.

公开(公告)号：US20190201890A1

公开(公告)日：2019-07-04

申请号：US16234443

申请日：2018-12-27

Applicant: IMEC VZW

Inventor： Willem VAN ROY ,  Jan GENOE

IPC: B01L3/00

CPC classification number: F04B17/00 ,  B01L2300/088 ,  B01L2300/161 ,  B01L2300/165 ,  B01L2400/0427 ,  B01L2400/0478 ,  B01L2400/0487 ,  B01L2400/0605 ,  B01L2400/0616 ,  F04B17/03 ,  F04B19/006 ,  F16K2099/0094

Abstract: A microfluidic pumping system for providing continuous or pulsed pumping action of a sample fluid along a microfluidic channel of a microfluidic device is described. The pumping system comprises at least one actuator comprising an actuator channel and at least one polarizer for generating pumping fluid motion, and at least one microfluidic rectification system for facilitating the flow of a sample fluid in a predetermined direction, the at least one microfluidic rectification system being laid out in or along the microfluidic channel, and the at least one actuator being adapted for creating a pressure in the microfluidic channel, the system thus being adapted for providing continuous or pulsed fluid movement of the sample fluid along the microfluidic channel when actuation of the pumping fluid in the actuator channel takes place and further providing sample fluid immobilization when no actuation takes place.