公开(公告)号：US20220216085A1

公开(公告)日：2022-07-07

申请号：US17383679

申请日：2021-07-23

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yung-Hsiang HUANG ,  Wei-Cheng TANG ,  Yi-Che SU ,  Wen-Pin CHUANG ,  Su-Mei CHEN WEI ,  Ya-Tin YU ,  Yun-Shan HUANG

IPC: H01L21/683 ,  C04B41/45 ,  C01G23/04 ,  C04B35/10 ,  C04B35/581

Abstract: An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al2O3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

公开(公告)号：US20170145243A1

公开(公告)日：2017-05-25

申请号：US14984493

申请日：2015-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Wei-Cheng TANG ,  Yi-Che SU ,  Yun-Shan HUANG

IPC: C09D133/02 ,  B05D3/00

CPC classification number: C09D133/02 ,  B05D3/007 ,  B05D5/08 ,  B05D2601/22 ,  C08L2201/54 ,  C08L67/00

Abstract: A method of manufacturing a hydrophobic material is provided, which includes: (a) mixing a sol-gel precursor, water, and catalyst to perform a sol-gel reaction for forming a solution having particles therein, (b) modifying the particles with a hydrophobic agent to form surface-modified particles, (c) adding a small-molecular surfactant to the solution containing the surface-modified particles to form a first dispersion, (d) mixing a resin, a water soluble polymer, and water to form a second dispersion, and (e) mixing the first dispersion and the second dispersion to obtain a hydrophobic material.

公开(公告)号：US20140170403A1

公开(公告)日：2014-06-19

申请号：US13890993

申请日：2013-05-09

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Wei-Cheng TANG ,  Yuung-Ching SHEEN ,  Yuan-Chang HUANG ,  Yi-Che SU ,  Yun-Shan HUANG ,  Yih-Her CHANG ,  Jen-Lien LIN

IPC: C09D183/02

CPC classification number: C08L83/04 ,  C08G77/02 ,  C08G77/14 ,  C08G77/20 ,  C08G77/24 ,  C08L83/06 ,  C09D183/04 ,  C09D183/06 ,  C08L83/00

Abstract: The present disclosure provides a method for forming an inorganic polymer material, including mixing 10 to 80 parts by weight of tetraalkoxysilane and 10 to 80 parts by weight of trialkoxysilane to form a mixture; and performing a reaction at pH of 0 to 4 by adding 5 to 30 parts by weight of a catalyst to the mixture to form an inorganic polymer material.

Abstract translation: 本公开内容提供了形成无机聚合物材料的方法，包括混合10至80重量份的四烷氧基硅烷和10至80重量份的三烷氧基硅烷以形成混合物; 并通过向混合物中加入5〜30重量份的催化剂，在0〜4的pH下进行反应，形成无机聚合物材料。

公开(公告)号：US20210198522A1

公开(公告)日：2021-07-01

申请号：US16731596

申请日：2019-12-31

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Kai-Wei LIAO ,  Wei-Cheng TANG ,  Ya-Tin YU ,  Yun-Shan HUANG ,  Yeu-Kuen WEI ,  Cheng-Yang TSAI ,  Yi-Che SU

IPC: C09D183/00 ,  C09D5/08

Abstract: A method for manufacturing a water-based coating material is provided, including: (a) reacting tetraalkoxysilane, acidic aqueous solution of vanadium salt, and trialkoxyalkylsilane to form an oligomer; (b) reacting the oligomer with colloidal silica particles to form a modified oligomer; and (c) reacting the modified oligomer with trialkoxyepoxysilane to obtain a water-based coating material.

公开(公告)号：US20150183999A1

公开(公告)日：2015-07-02

申请号：US14142319

申请日：2013-12-27

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE ,  Behr Process Corporation

Inventor： Yi-Che SU ,  Wei-Cheng TANG ,  Yuung-Ching SHEEN ,  Yun-Shan HUANG ,  Ming-Ren Tarng ,  Chenchen Xue

IPC: C09D5/16

CPC classification number: C09D5/1675 ,  C08G77/24 ,  C09D5/1625 ,  C09D5/1687 ,  C09D183/08

Abstract: A method of manufacturing a hydrophobic antifouling coating material, including: (a) mixing a sol-gel precursor, water, an aqueous colloidal silica suspension, and a catalyst to perform a sol-gel reaction to form a solution having particles therein, wherein the sol-gel reaction is performed without addition of any organic solvent; (b) chemically modifying the particles with a hydrophobic agent to form surface-modified particles; and (c) adding a surfactant to the solution containing the surface-modified particles to form a hydrophobic antifouling coating material. The hydrophobic antifouling coating material can be dispersed in an aqueous solution, and has properties such as low VOC (Volatile organic compound) value, high solid content, and high stability.

Abstract translation: 一种制造疏水性防污涂料的方法，包括：（a）将溶胶 - 凝胶前体，水，胶体二氧化硅水溶液悬浮液和催化剂混合以进行溶胶 - 凝胶反应以形成其中具有颗粒的溶液，其中 不加任何有机溶剂进行溶胶 - 凝胶反应; （b）用疏水剂化学改性颗粒以形成表面改性的颗粒; 和（c）在含有表面改性粒子的溶液中加入表面活性剂，形成疏水性防污涂料。 疏水性防污涂料可以分散在水溶液中，具有低VOC（挥发性有机化合物）值，固体含量高，稳定性高的特性。

公开(公告)号：US20150183936A1

公开(公告)日：2015-07-02

申请号：US14305354

申请日：2014-06-16

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Wei-Cheng TANG ,  Yun-Shan HUANG ,  Ya-Tin YU ,  Yi-Che SU ,  Yuung-Ching SHEEN ,  Yuan-Chang HUANG

IPC: C08G77/395 ,  C09D183/04

CPC classification number: C08G77/395 ,  C08G77/30 ,  C09D183/04 ,  C09D183/06 ,  C09D183/08 ,  C08K5/5406

Abstract: A method for forming an inorganic passivation material is provided. The method includes mixing about 5 to 80 parts by weight of trialkoxysilane, about 10 to 80 parts by weight of tetraalkoxysilane, and about 1 to 30 parts by weight of catalyst to perform a reaction at pH of about 0.05 to 4 to form an inorganic resin material. The inorganic resin material is modified by phosphate ester to form an inorganic passivation material, wherein phosphate ester is about 0.1-10 parts by weight based on 100 parts by weight of the inorganic resin material. An inorganic passivation material and a passivation protective film produced therefrom are also provided.

Abstract translation: 提供了一种形成无机钝化材料的方法。 该方法包括混合约5至80重量份的三烷氧基硅烷，约10至80重量份的四烷氧基硅烷和约1至30重量份的催化剂，以在约0.05至4的pH下进行反应以形成无机树脂 材料。 无机树脂材料被磷酸酯改性以形成无机钝化材料，其中基于100重量份的无机树脂材料，磷酸酯为约0.1-10重量份。 还提供无机钝化材料和由其制备的钝化保护膜。