公开(公告)号：US20170154828A1

公开(公告)日：2017-06-01

申请号：US14953779

申请日：2015-11-30

Applicant: INTEL CORPORATION

Inventor： Timothy A. GOSSELIN ,  Patrick NARDI ,  Kartik SRINIVASAN ,  Amram EITAN ,  Ji Yong PARK ,  Christopher L. RUMER ,  George S. KOSTIEW

IPC: H01L21/66 ,  B23K20/02 ,  B23K20/00 ,  H01L23/00

CPC classification number: H01L22/12 ,  B23K1/0016 ,  B23K20/002 ,  B23K20/026 ,  B23K20/16 ,  B23K20/233 ,  B23K20/24 ,  B23K20/26 ,  B23K31/12 ,  B23K2101/42 ,  H01L22/20 ,  H01L24/14 ,  H01L24/75 ,  H01L2224/81192 ,  H01L2924/351

Abstract: A method and machine-readable medium including non-transitory program instructions that when executed by a processor cause the processor to perform a method including measuring at least one parameter of a substrate or a die; and establishing or modifying a thermal compression bonding recipe based on the at least one parameter, wherein the thermal compression bonding recipe is operable for thermal compression bonding of the die and the substrate. A thermal compression bonding tool including a pedestal operable to hold a substrate during a thermal compression bonding process and a bond head operable to engage a die, the tool including a controller machine readable instructions to process a substrate and a die combination, the instructions including an algorithm to implement or modify a thermal compression bonding process based on a parameter of a substrate or die.