公开(公告)号：US20160322419A1

公开(公告)日：2016-11-03

申请号：US14699015

申请日：2015-04-29

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： John J. ELLIS-MONAGHAN ,  John C.S. HALL ,  Marwan H. KHATER ,  Edward W. KIEWRA ,  Steven M. SHANK

IPC: H01L27/146

CPC classification number: H01L31/202 ,  H01L21/02667 ,  H01L27/14643 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14689 ,  H01L27/14692 ,  H01L27/14694 ,  H01L27/14698 ,  H01L31/0203 ,  H01L31/028 ,  H01L31/208

Abstract: Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps.

Abstract translation: 提供光电检测器结构和制造方法。 该方法包括形成底物上形成的检测器材料的底切。 该方法还包括将检测器封装以形成来自底切的气隙。 该方法还包括退火检测器材料，导致检测器材料膨胀到气隙中。