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公开(公告)号：US06067976A
公开(公告)日：2000-05-30
申请号：US854701
申请日：1997-05-12
CPC分类号： B28D5/045
摘要： The moving direction of the wire line 15A at the cut portion 44 for cutting the columnar semiconductor ingot 18 corresponds to the vertical-downward direction. And, the semiconductor ingot 18 supported with the cut-feed means 20 is fed horizontally so as to be pushed in perpendicular to said wire line 15A, and the processing liquid 42 is supplied to the wire line 15A from the grind liquid supply nozzle 40 placed at the upper side of the cut portion 44. Therefore, the processing liquid 42 supplied to the wire line 15A flows along the wire line 15A, so that the processing liquid 42 can be surely supplied to the cut portion 44.
摘要翻译： 在用于切割柱状半导体锭18的切割部分44处的导线15A的移动方向对应于垂直向下的方向。 并且，用切割进给装置20支撑的半导体锭18被水平地供给，以便被垂直于所述线线15A推动，并且处理液体42从放置的研磨液供给喷嘴40供给到线路15A 因此，提供给线路15A的处理液体42沿着线路线15A流动，从而可以将处理液体42可靠地供给至切断部44。
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公开(公告)号：US6145422A
公开(公告)日：2000-11-14
申请号：US196154
申请日：1998-11-20
申请人： Shozo Katamachi , Shinji Shibaoka
发明人： Shozo Katamachi , Shinji Shibaoka
CPC分类号： B23Q16/001 , B28D5/0058 , B28D5/0088 , B28D5/045
摘要： A work piece such as a semiconductor ingot is positioned and bonded to a work piece bonding block by a bonding jig which is provided separately from a wire saw in such a manner that the central axis of the work piece and respective horizontal and vertical surfaces of the work piece bonding block come into parallel to each other. Then, the work piece bonding block is positioned and mounted at a mounting jig which is provided on a cutting-feeding table of the wire saw and which has horizontal and vertical reference surfaces perpendicularly intersecting a cutting plane, so that the central axis of the work piece automatically and perpendicularly intersects the cutting plane. Then, the mounting jig is tilted to tilt the work piece by a tilting mechanism in such a manner that the central axis is inclined against the cutting plane at a predetermined angle on the basis of shift value data of the crystal orientation with the central axis of the work piece a reference, which has previously been measured outside the wire saw.
摘要翻译： 通过与线锯分开设置的接合夹具将诸如半导体锭的工件定位并结合到工件接合块，使得工件的中心轴线和工件的相应的水平和垂直表面 工件粘结块彼此平行。 然后，将工件接合块定位并安装在安装夹具上，该安装夹具设置在线锯的切割进给台上，并且具有与切割平面垂直相交的水平和垂直参考表面，使得工件的中心轴线 片自动垂直于切割平面相交。 然后，通过倾斜机构使安装夹具倾斜以使工件倾斜，使得中心轴基于具有中心轴的晶体取向的偏移值数据以预定角度倾斜于切割平面 工件参考，其以前已经在线锯外测量。
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公开(公告)号：US5893308A
公开(公告)日：1999-04-13
申请号：US852605
申请日：1997-05-07
申请人： Shozo Katamachi , Shinji Shibaoka
发明人： Shozo Katamachi , Shinji Shibaoka
CPC分类号： B23Q16/001 , B28D5/0058 , B28D5/0088 , B28D5/045 , Y10T83/04 , Y10T83/148 , Y10T83/6577 , Y10T83/6612 , Y10T83/9292
摘要： A work piece such as a semiconductor ingot is positioned and bonded to a work piece bonding block by means of a bonding jig which is provided separately from a wire saw in such a manner that the central axis of the work piece and respective horizontal and vertical surfaces of the work piece bonding block come into parallel to each other. Then, the work piece bonding block is positioned and mounted at a mounting jig which is provided on a cutting-feeding table of the wire saw and which has horizontal and vertical reference surfaces perpendicularly intersecting a cutting plane, so that the central axis of the work piece automatically and perpendicularly intersects the cutting plane. Then, the mounting jig is tilted to tilt the work piece by a tilting mechanism in such a manner that the central axis is inclined against the cutting plane at a predetermined angle on the basis of shift value data of the crystal orientation with the central axis of the work piece a reference, which has previously been measured outside the wire saw.
摘要翻译： 通过与线锯分开设置的接合夹具将诸如半导体锭的工件定位并结合到工件接合块，使得工件的中心轴线和相应的水平和垂直表面 的工件接合块彼此平行。 然后，将工件接合块定位并安装在安装夹具上，该安装夹具设置在线锯的切割进给台上，并且具有与切割平面垂直相交的水平和垂直参考表面，使得工件的中心轴线 片自动垂直于切割平面相交。 然后，通过倾斜机构使安装夹具倾斜以使工件倾斜，使得中心轴基于具有中心轴的晶体取向的偏移值数据以预定角度倾斜于切割平面 工件参考，其以前已经在线锯外测量。
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公开(公告)号：US5896851A
公开(公告)日：1999-04-27
申请号：US633645
申请日：1996-04-17
申请人： Shozo Katamachi , Shigeru Okubo
发明人： Shozo Katamachi , Shigeru Okubo
CPC分类号： B23D57/0053 , B28D5/045
摘要： A turn table is connected to a rotary shaft of a driving motor for driving a wire reel coaxially therewith. The wire reel is connected onto this turn table. With this arrangement, the wire reel is directly driven by the driving motor. Accordingly, the period of time needed for acceleration or deceleration for the driving motor can be shortened, so that through-put can be improved. Furthermore, for the driving motor, a motor being low in inertia, i.e., a small-sized motor can be used, so that a driving section can be made compact in size. Further, a space for a belt transmission mechanism, which has heretofore been necessary, can be saved, so that the driving section can be made compact in size.
摘要翻译： 转盘与驱动电动机的旋转轴连接，用于与其同轴地驱动线盘。 线盘连接到这个转台上。 通过这种布置，线盘由驱动电机直接驱动。 因此，可以缩短驱动电动机的加速或减速所需的时间，从而可以提高通过率。 此外，对于驱动电动机，可以使用低惯量的电动机，即可以使用小型电动机，使得可以使驱动部分的尺寸紧凑。 此外，可以节省迄今为止需要的带传动机构的空间，从而可以使驱动部分的尺寸更小。
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公开(公告)号：US5628301A
公开(公告)日：1997-05-13
申请号：US680235
申请日：1996-07-11
申请人： Shozo Katamachi
发明人： Shozo Katamachi
CPC分类号： B65H49/18 , B23D57/0053 , B65H54/2833 , B65H59/38 , B65H59/40 , B65H2513/10 , Y10T83/9292
摘要： A wire is put on a guide roller, which guides the wire in a direction of a wire reel's axis. A wire load, which changes according to the displacement of the supply angle of the wire on the guide roller, is detected sequentially. Then, the guiding speed of the guide roller is sequentially controlled to adjust the wire displacement. Therefore, when the displacement of the wire supply angle changes, the guiding speed of the wire can quickly respond to the change.
摘要翻译： 导线被放置在引导辊上，该引导辊沿着线卷轴的轴线方向引导导线。 依次检测根据导辊上导线的供给角位移而变化的导线负载。 然后，顺序地控制导向辊的引导速度，以调整线位移。 因此，当供电角度的位移变化时，导线的引导速度可以快速响应变化。
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公开(公告)号：US20060085995A1
公开(公告)日：2006-04-27
申请号：US11229132
申请日：2005-09-15
申请人： Shozo Katamachi
发明人： Shozo Katamachi
IPC分类号： G01B5/004
CPC分类号： G01B21/045 , G01B5/0016 , G01B5/201
摘要： The invention provides a circularity and cylindrical shape measuring device that can decrease the measurement errors generated due to the weight of a measured workpiece. A circularity and cylindrical shape measuring device (10) is configured such that a rotation axis of a rotary table (30) is positioned on a leg (21) that supports a base table (20) or is positioned on a straight line that connects adjacent legs (21A and 21B).
摘要翻译： 本发明提供一种圆形和圆柱形形状测量装置，其可以减少由测量的工件的重量产生的测量误差。 圆形和圆柱形测量装置（10）被构造成使得旋转台（30）的旋转轴线位于支撑基台（20）的腿部（21）上，或者位于连接相邻 腿（21 A和21 B）。
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7.发明授权
公开(公告)号：US6135103A
公开(公告)日：2000-10-24
申请号：US205278
申请日：1998-12-04
申请人： Shozo Katamachi
发明人： Shozo Katamachi
CPC分类号： B23D57/0046
摘要： An opening for loading and unloading ingots is formed at the top of a cover, which covers a processing chamber wherein grooved rollers of a wire saw are disposed. The ingots are exchanged from above the cover through the opening. Even if a plurality of wire saws are arranged at short intervals, the adjacent wire saws can exchange the ingots at the same time, Thus, the ingots can be exchanged efficiently.
摘要翻译： 在盖的顶部形成有用于装载和卸载锭的开口，盖的顶部设置有线锯的带槽辊的处理室。 锭子通过开口从盖上方更换。 即使多个线锯以短的间隔布置，相邻的线锯也可以同时更换锭，因此可以有效地更换锭。
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公开(公告)号：US5809986A
公开(公告)日：1998-09-22
申请号：US705685
申请日：1996-08-29
申请人： Shozo Katamachi
发明人： Shozo Katamachi
CPC分类号： B23D59/002 , B23D57/0053 , H01L2924/0002
摘要： A microswitch is provided near each end of each grooved roller. The microswitch has a rod-shaped contact shoe, and is operated if a wire derailed from the grooved roller contacts the contact shoe. An operational signal is sent from the microswitch to a control apparatus, and the control apparatus receives the operational signal so as to detect that the wire is derailed.
摘要翻译： 在每个带槽辊的每个端部附近提供微动开关。 微动开关具有杆形接触靴，并且如果从凹槽滚子脱轨的线接触接触靴，则操作该触点。 操作信号从微动开关发送到控制装置，并且控制装置接收操作信号，以便检测出导线脱轨。
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公开(公告)号：US07290348B2
公开(公告)日：2007-11-06
申请号：US11229132
申请日：2005-09-15
申请人： Shozo Katamachi
发明人： Shozo Katamachi
IPC分类号： G01B1/00
CPC分类号： G01B21/045 , G01B5/0016 , G01B5/201
摘要： The invention provides a circularity and cylindrical shape measuring device that can decrease the measurement errors generated due to the weight of a measured workpiece. A circularity and cylindrical shape measuring device (10) is configured such that a rotation axis of a rotary table (30) is positioned on a leg (21) that supports a base table (20) or is positioned on a straight line that connects adjacent legs (21A and 21B)
摘要翻译： 本发明提供一种圆形和圆柱形形状测量装置，其可以减少由测量的工件的重量产生的测量误差。 圆形和圆柱形测量装置（10）被构造成使得旋转台（30）的旋转轴线位于支撑基台（20）的腿部（21）上，或者位于连接相邻 腿（21 A和21 B）
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公开(公告)号：US5908025A
公开(公告)日：1999-06-01
申请号：US877898
申请日：1997-06-18
申请人： Shozo Katamachi
发明人： Shozo Katamachi
CPC分类号： B23D59/002 , B23D57/0053 , H01L2924/0002
摘要： A microswitch is provided near each end of each grooved roller. The microswitch has a rod-shaped contact shoe, and is operated if a wire derailed from the grooved roller contacts the contact shoe. An operational signal is sent from the microswitch to a control apparatus, and the control apparatus receives the operational signal so as to detect that the wire is derailed.
摘要翻译： 在每个带槽辊的每个端部附近提供微动开关。 微动开关具有杆形接触靴，并且如果从凹槽滚子脱轨的线接触接触靴，则操作该触点。 操作信号从微动开关发送到控制装置，并且控制装置接收操作信号，以便检测出导线脱轨。
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