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    Processing method for object to be processed including a pre-coating step to seal fluorine
    1.
    发明授权
    Processing method for object to be processed including a pre-coating step to seal fluorine 失效
    加工对象物的处理方法包括预涂步骤密封氟

    公开(公告)号：US06479410B2

    公开(公告)日：2002-11-12

    申请号：US09055910

    申请日：1998-04-07

    申请人： Iku Shiota ,  Shoichi Abe

    发明人： Iku Shiota ,  Shoichi Abe

    IPC分类号： H01L2144

    CPC分类号： H01L21/02131 ,  C23C16/401 ,  C23C16/4404 ,  C23C16/4405 ,  H01L21/02274 ,  H01L21/31629

    摘要： A wafer is mounted on a mounting stand 3 that is provided with an electrostatic chuck. Then an SiOF film is formed by creating a plasma of a processing gas and heating the wafer W to approximately 350° C. while the surface of the mounting stand 3 is heated to 200° C. After ten wafers W have been processed, cleaning is performed to remove a film S that has adhered to the interior of the film-formation chamber, and then a pre-coat is formed. A protective plate 5 made of aluminum nitride is placed on the mounting stand 3 during the cleaning and pre-coating steps. The protective plate 5 protects the surface of the electrostatic chuck during the cleaning and prevents the formation of a film on the mounting stand 3 during the pre-coating. In addition, since the protective plate 5 is electrostatically attracted to the mounting stand 3 and it is also strong with respect to thermal shocks, there is no need to lower the temperature of the mounting stand 3 during the cleaning, which improves throughput.

    摘要翻译： 将晶片安装在设置有静电卡盘的安装台3上。 然后在安装台3的表面被加热到200℃的同时，通过产生处理气体的等离子体并将晶片W加热到大约350℃来形成SiOF膜。在处理了10个晶片W之后，清洗是 进行以去除附着在成膜室内部的膜S，然后形成预涂层。 在清洁和预涂步骤期间，在安装台3上放置由氮化铝制成的保护板5。 保护板5在清洁期间保护静电卡盘的表面，并且在预涂覆期间防止在安装支架3上形成膜。 此外，由于保护板5被静电吸引到安装台3，并且对于热冲击也是坚固的，因此在清洁期间不需要降低安装台3的温度，这提高了生产量。

    Manufacturing method for metal member with through hole
    2.
    发明授权
    Manufacturing method for metal member with through hole 有权
    具有通孔的金属构件的制造方法

    公开(公告)号：US08459077B2

    公开(公告)日：2013-06-11

    申请号：US11791848

    申请日：2006-02-14

    申请人： Shoichi Abe ,  Yasushi Watanabe ,  Kazumi Shimoii ,  Atsushi Tomizawa ,  Mitsutoshi Uchida

    发明人： Shoichi Abe ,  Yasushi Watanabe ,  Kazumi Shimoii ,  Atsushi Tomizawa ,  Mitsutoshi Uchida

    IPC分类号： B21D26/00

    CPC分类号： B62D1/184 ,  B21D26/023 ,  B21D26/035 ,  B21D28/28 ,  B62D1/16 ,  Y10T83/0596

    摘要： To form a through hole at one portion of a side wall, of an expanded portion made by plastically deforming one part of a metal tube radially outward, in a portion where the plate thickness gradually changes, a slide tool is withdrawn from inside a punch hole while applying hydraulic pressure to the inside of the side wall. At the instant of commencing withdrawal of the slide tool, the degree of progress in the shearing for the portions of the side wall matching with the two side edges of the punch hole is made different. Then, the timing for moving from shearing to rupture is made to coincide, so that of the side wall, the portions matching with the punch hole, are made reliably into a blank, and are extracted from the side wall.

    摘要翻译： 为了在侧壁的一部分形成通孔，其通过使金属管的一部分径向向外塑性变形而制成的扩大部分，在板厚度逐渐变化的部分中，滑动工具从冲孔内部 同时向侧壁的内侧施加液压。 在滑动工具的开始瞬间，与冲孔的两个侧边缘匹配的侧壁的部分的剪切的进行程度不同。 然后，使从剪切到破裂的移动的时刻一致，使得侧壁与冲孔匹配的部分可靠地制成坯料，并从侧壁抽出。

    Sheet metal rocker arm, manufacturing method thereof, cam follower with said rocker arm, and assembling method thereof
    3.
    发明授权
    Sheet metal rocker arm, manufacturing method thereof, cam follower with said rocker arm, and assembling method thereof 失效
    钣金摇臂，其制造方法，具有所述摇臂的凸轮从动件及其组装方法

    公开(公告)号：US06672266B2

    公开(公告)日：2004-01-06

    申请号：US10342235

    申请日：2003-01-15

    申请人： Kiyoshi Okubo ,  Shoichi Abe ,  Satoshi Kadokawa ,  Hiroshi Iwasa

    发明人： Kiyoshi Okubo ,  Shoichi Abe ,  Satoshi Kadokawa ,  Hiroshi Iwasa

    IPC分类号： F01L118

    CPC分类号： B21K1/205 ,  F01L1/185 ,  Y10T29/49295 ,  Y10T29/49995 ,  Y10T74/20882

    摘要： A sheet metal rocker arm manufactured by the steps of punching one metal plate to form a blank having a predetermined contour and through holes, and subjecting this blank to a bending work based on a press work to form a pair of side walls parallel to each other and a connecting portion for connecting the both ends of the side walls in the width direction thereof. This rocker arm is also provided with at least a pair of though holes formed at positions which are aligned with each other on the both side walls and at least one engagement portion provided in a part of the connecting portion. The thickness of at least one engagement portion, is formed to be greater than the thickness of the both side walls.

    摘要翻译： 一种钣金摇臂，通过冲压一个金属板以形成具有预定轮廓和通孔的坯料的步骤制造，并且对该坯料进行基于冲压加工的弯曲加工以形成彼此平行的一对侧壁 以及用于连接侧壁的宽度方向的两端的连接部。 该摇臂还具有形成在两侧壁上彼此对准的位置的至少一对通孔和设置在连接部的一部分中的至少一个接合部。 至少一个接合部分的厚度被形成为大于两个侧壁的厚度。

    Multi-chamber system
    4.
    发明授权
    Multi-chamber system 失效
    多室系统

    公开(公告)号：US5558482A

    公开(公告)日：1996-09-24

    申请号：US202100

    申请日：1994-02-25

    申请人： Tutomu Hiroki ,  Shoichi Abe ,  Kiyotaka Akiyama

    发明人： Tutomu Hiroki ,  Shoichi Abe ,  Kiyotaka Akiyama

    IPC分类号： B65H9/00 ,  B65H9/10 ,  H01L21/00 ,  H01L21/677 ,  H01L21/683 ,  B65G65/00 ,  B65G49/07

    CPC分类号： H01L21/67167 ,  B65H9/00 ,  B65H9/101 ,  H01L21/67236 ,  H01L21/67748 ,  H01L21/67766 ,  H01L21/6838 ,  B65H2511/51 ,  B65H2553/41 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/141

    摘要： A vacuum-process system comprising plural vacuum-process chambers in which substrates are processed in decompressed atmosphere, a first load lock chamber communicated with each of the vacuum-process chambers and exhausted to substantially same decompressed atmosphere as in the vacuum-process chambers, a second load lock chamber communicated with the first one and exhausted to substantially same atmosphere as in the first load lock chamber, a first carrier arranged in the first load lock chamber to carry the substrate between the first and the second load lock chamber, a first buffer assembly arranged in the first load lock chamber to temporarily hold plural substrates thereon, a second buffer assembly arranged in the second load lock chamber to temporarily hold plural substrates thereon, an assembly in the second load lock chamber to position single or plural substrates relative to their passage, and a second carrier arranged in normal atmosphere to carry plural substrates into and out of the second load lock chamber.

    摘要翻译： 一种真空处理系统，包括多个真空处理室，其中基板在减压气氛中进行处理;第一加载锁定室，与每个真空处理室连通并排放到与真空处理室相同的减压气氛中; 第二负载锁定室与第一负载锁定室连通并排放到与第一负载锁定室大致相同的大气;第一载体，布置在第一负载锁定室中，以将衬底运送在第一和第二负载锁定室之间;第一缓冲器 组件布置在第一加载锁定室中以暂时保持多个基板;第二缓冲组件，布置在第二加载锁定室中以暂时保持多个基板;第二加载锁定室中的组件相对于它们定位单个或多个基板 通道和布置在正常气氛中的第二载体以携带多个基板进出 的第二加载锁定室。

    Sheet metal rocker arm, manufacturing method thereof, cam follower with said rocker arm, and assembling method thereof
    5.
    发明授权
    Sheet metal rocker arm, manufacturing method thereof, cam follower with said rocker arm, and assembling method thereof 失效
    钣金摇臂，其制造方法，具有所述摇臂的凸轮从动件及其组装方法

    公开(公告)号：US06959676B2

    公开(公告)日：2005-11-01

    申请号：US10702047

    申请日：2003-11-06

    申请人： Kiyoshi Okubo ,  Shoichi Abe ,  Satoshi Kadokawa ,  Hiroshi Iwasa

    发明人： Kiyoshi Okubo ,  Shoichi Abe ,  Satoshi Kadokawa ,  Hiroshi Iwasa

    IPC分类号： F01L1/18

    CPC分类号： B21K1/205 ,  F01L1/185 ,  Y10T29/49295 ,  Y10T29/49995 ,  Y10T74/20882

    摘要： A sheet metal rocker arm manufactured by the steps of punching one metal plate to form a blank having a predetermined contour and through holes, and subjecting this blank to a bending work based on a press work to form a pair of side walls parallel to each other and a connecting portion for connecting the both ends of the side walls in the width direction thereof. This rocker arm is also provided with at least a pair of though holes formed at positions which are aligned with each other on the both side walls and at least one engagement portion provided in a part of the connecting portion. The thickness of at least one engagement portion, is formed to be greater than the thickness of the both side walls.

    摘要翻译： 一种钣金摇臂，通过冲压一个金属板以形成具有预定轮廓和通孔的坯料的步骤制造，并且对该坯料进行基于冲压加工的弯曲加工以形成彼此平行的一对侧壁 以及用于连接侧壁的宽度方向的两端的连接部。 该摇臂还具有形成在两侧壁上彼此对准的位置的至少一对通孔和设置在连接部的一部分中的至少一个接合部。 至少一个接合部分的厚度被形成为大于两个侧壁的厚度。

    Metal Member With Through Hole And Manufacturing Method Therefor
    9.
    发明申请
    Metal Member With Through Hole And Manufacturing Method Therefor 有权
    金属构件通孔及其制造方法

    公开(公告)号：US20090038428A1

    公开(公告)日：2009-02-12

    申请号：US11791848

    申请日：2006-02-14

    申请人： Shoichi Abe ,  Yasushi Watanabe ,  Kazumi Shimoii ,  Atsushi Tomizawa ,  Mitsutoshi Uchida

    发明人： Shoichi Abe ,  Yasushi Watanabe ,  Kazumi Shimoii ,  Atsushi Tomizawa ,  Mitsutoshi Uchida

    IPC分类号： B21D26/02 ,  B62D1/16 ,  B21D28/24 ,  B21D53/88

    CPC分类号： B62D1/184 ,  B21D26/023 ,  B21D26/035 ,  B21D28/28 ,  B62D1/16 ,  Y10T83/0596

    摘要： A structure and method are provided for forming a through hole at one portion of a side wall of an expanded portion made by plastically deforming one part of a metal tube radially outward, in a portion where the plate thickness gradually changes. A slide tool is withdrawn from inside a punch hole while applying hydraulic pressure to the inside of the side wall. Regarding a tip end face of the slide tool, a portion facing the portion of the side wall where the plate thickness is relatively thick is recessed. At the instant of commencing withdrawal of the slide tool, the degree of progress in the shearing for the portions of the side wall matching with the two side edges of the punch hole is made different. Then, the timing for moving from shearing to rupture is made to coincide, so that of the side wall, the portions matching with the punch hole, are made reliably into a blank, and are extracted from the side wall.

    摘要翻译： 提供了一种结构和方法，用于在板厚度逐渐变化的部分中在径向向外使塑料变形金属管的一部分的膨胀部分的侧壁的一部分处形成通孔。 在将压力施加到侧壁的内部的同时，将滑动工具从冲孔内部取出。 关于滑动工具的前端面，面对板厚较厚的侧壁部分的部分凹陷。 在滑动工具的开始瞬间，与冲孔的两个侧边缘匹配的侧壁的部分的剪切的进行程度不同。 然后，使从剪切到破裂的移动的时刻一致，使得侧壁与冲孔匹配的部分可靠地制成坯料，并从侧壁抽出。