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公开(公告)号：US20120279837A1
公开(公告)日：2012-11-08
申请号：US12415937
申请日：2009-03-31
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
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公开(公告)号：US08294976B1
公开(公告)日：2012-10-23
申请号：US12415937
申请日：2009-03-31
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
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公开(公告)号：US08723061B2
公开(公告)日：2014-05-13
申请号：US13265970
申请日：2010-08-26
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0072
摘要： A MEMS switch in which contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in an “on” state. The MEMS switch includes a first electrode, a second electrode opposed to and separated from the first electrode, a third and a fourth electrodes, wherein electrical contact is made between the electrodes by electrostatic force generated between the electrodes, and a bump which can form the contact between the electrodes is provided on an electrode, and a gap is formed between the electrodes when the electrical contact is made between the electrodes.
摘要翻译： 在接触形成之后，保持接触力足以形成具有低接触电阻的接触力的MEMS开关，以保持信号在“接通”状态下的接触处的低接触电阻。 MEMS开关包括第一电极，与第一电极相对并分离的第二电极，第三和第四电极，其中通过在电极之间产生的静电力在电极之间形成电接触，以及可形成 电极之间的接触设置在电极上，并且当在电极之间形成电接触时，在电极之间形成间隙。
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公开(公告)号：US07002439B2
公开(公告)日：2006-02-21
申请号：US10663340
申请日：2003-09-15
IPC分类号： H01G23/00
CPC分类号： H01H59/0009 , B81B3/001 , B81B2201/016 , B81C2201/115 , H01G5/16 , H01G5/18
摘要： A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
摘要翻译： 公开了一种微机电可切换电容器，包括衬底，底电极，沉积在所述底电极的至少一部分上的电介质层，沉积在所述介电层的至少一部分上的导电浮动电极，位于浮动 电极和第一致动区域，以便稳定电枢的向下状态位置。 该装置还可以包括第二致动区域。 本发明提供了分流开关和串联开关，其在附接到浮动电极区域的区域中具有致动，或者具有继电器致动。
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公开(公告)号：US20080055815A1
公开(公告)日：2008-03-06
申请号：US11893990
申请日：2007-08-17
申请人： Xavier Rottenberg
发明人： Xavier Rottenberg
摘要： One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.
摘要翻译： 一个发明方面涉及一种包括第一和第二导电电极的可变电容器，其布置在支撑结构上方并彼此间隔开并限定电容器的电容。 至少一个电极包括至少一个可弯曲部分。 可弯曲部分由施加在电极上以改变电容的直流电压差致动。 在优选实施例中，支撑结构包括比围绕电极的气氛更高介电常数的层，并且电极在致动时构成为交错结构。 还公开了用于制造这种电容器的2掩模工艺。
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6.发明授权Diffractive optical nano-electro-mechanical device with reduced driving voltage 有权具有降低驱动电压的衍射光学纳米机电器件公开(公告)号：US08643937B2
公开(公告)日：2014-02-04
申请号：US13297170
申请日：2011-11-15
CPC分类号： G02B26/0841 , G02B26/06
摘要： A DND device is disclosed. In one aspect, the device includes a nano-mirror (21), and an actuating module configured to move the nano-mirror in an upward and/or downward position. The actuating module has a cantilever mounted to a fixed structure, and at least one first electrode for moving the cantilever in an upward and/or downward position. Such DND devices may be arranged in a 2D array.
摘要翻译： 公开了DND设备。 在一个方面，该装置包括纳米镜（21）和致动模块，该致动模块被配置为使纳米镜在向上和/或向下的位置移动。 致动模块具有安装到固定结构的悬臂和用于在向上和/或向下的位置移动悬臂的至少一个第一电极。 这样的DND设备可以被布置成2D阵列。
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公开(公告)号：US20120188023A1
公开(公告)日：2012-07-26
申请号：US13150442
申请日：2011-06-01
IPC分类号： H03B5/30
CPC分类号： H03H9/02338 , H03H2009/0244 , H03H2009/02496
摘要： A microelectromechanical (MEMS) resonator is disclosed that comprises a substrate and a resonator body suspended above the substrate by means of clamped-clamped beams, where each beam comprises two support legs with a common connection to the resonator body, and the resonator body is configured to resonate at an operating frequency. The MEMS resonator further comprises an excitation component configured to excite the resonator body to resonate at the operating frequency, where each beam is further configured to oscillate in a flexural mode at a flexural wavelength as a result of resonating at the operating frequency, and each leg is acoustically long with respect to the flexural wavelength.
摘要翻译： 公开了一种微机电（MEMS）谐振器，其包括基板和谐振器体，该谐振器主体借助于夹紧的夹持梁悬挂在基板之上，其中每个梁包括两个与谐振器主体共同连接的支撑腿，并且谐振器本体被配置 以工作频率共鸣。 MEMS谐振器还包括激励部件，其被配置为激励谐振器主体以工作频率谐振，其中每个光束进一步配置为在弯曲波长下以弯曲波长振荡，作为在工作频率下谐振的结果，并且每个支腿 相对于弯曲波长在声学上长。
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公开(公告)号：US20120031744A1
公开(公告)日：2012-02-09
申请号：US13262666
申请日：2010-08-26
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A MEMS switch is provided wherein contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the signal transmission contact in “on” state. Provided is a MEMS switch 100 including a first electrode 101, a second electrode 104 opposed to and separated from the first electrode, a third and a fourth electrodes 1021 and 1022, wherein electrical contact is made between the electrodes 101 and 104 by electrostatic force generated between the electrode 101 and the electrodes 1021, 1022, and a bump which can form the contact between the electrode 101 and the electrode 1021 and/or 1022 is provided on the electrode 101, and a gap is formed between the electrode 101 and the electrode 1021 and/or 1022 when the electrical contact is made, and control signals are input to the electrodes 1021 and 1022 independently.
摘要翻译： 提供一种MEMS开关，其中在接触形成之后保持足以使接触电阻低的接触力保持在“接通”状态下的信号传输接触处的低接触电阻。 提供了一种MEMS开关100，其包括第一电极101，与第一电极相对并分离的第二电极104，第三和第四电极1021和1022，其中通过产生静电力在电极101和104之间形成电接触 在电极101和电极1021,1022之间，并且在电极101上设置可形成电极101与电极1021和/或1022之间的接触的突起，并且在电极101和电极之间形成间隙 1021和/或1022，并且控制信号被独立地输入到电极1021和1022。
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公开(公告)号：US08067810B2
公开(公告)日：2011-11-29
申请号：US12413432
申请日：2009-03-27
申请人： Xavier Rottenberg , Stefan Pauwen
发明人： Xavier Rottenberg , Stefan Pauwen
IPC分类号： H01L29/82
摘要： Systems and methods for controlling a micro electromechanical device using power actuation are disclosed. The disclosed micro electromechanical systems comprise at least one electrostatically actuatable micro electromechanical device and an actuation device. The micro electromechanical device comprises a first conductor and a second conductor having a moveable portion which in use may be attracted by the first conductor as a result of a predetermined actuation power. The actuation device comprises a high frequency signal generator for generating at least part of the actuation power by means of a predetermined high frequency signal with a frequency higher than the mechanical resonance frequency of the moveable portion of the micro electromechanical device.
摘要翻译： 公开了使用动力驱动来控制微机电装置的系统和方法。 所公开的微机电系统包括至少一个静电致动微机电装置和致动装置。 微机电装置包括第一导体和具有可移动部分的第二导体，该可移动部分在预定的致动能量的作用下可被第一导体吸引。 致动装置包括高频信号发生器，用于通过具有高于微机电装置的可移动部分的机械共振频率的预定高频信号产生至少一部分致动功率。
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公开(公告)号：US20120305542A1
公开(公告)日：2012-12-06
申请号：US13150499
申请日：2011-06-01
申请人： Stephane Donnay , Xavier Rottenberg , Jonathan Borremans , Hendrikus Tilmans , Geert van der Plas , Michiel Pertijs
发明人： Stephane Donnay , Xavier Rottenberg , Jonathan Borremans , Hendrikus Tilmans , Geert van der Plas , Michiel Pertijs
IPC分类号： A21B1/02
摘要： A system is disclosed that includes an oven and a micromechanical oscillator inside the oven configured to oscillate at a predetermined frequency at a predetermined temperature, where the predetermined frequency is based on a temperature dependency and at least one predetermined property. The system further includes an excitation mechanism configured to excite the micromechanical oscillator to oscillate at the predetermined frequency and a temperature control loop configured to detect a temperature of the micromechanical oscillator using resistive sensing, determine whether the temperature of the micromechanical oscillator is within a predetermined range of the predetermined temperature based on the temperature dependency and the at least one predetermined property in order to minimize frequency drift, and adapt the temperature of the micromechanical oscillator to remain within the predetermined range. The system further includes a frequency output configured to output the predetermined frequency of the micromechanical oscillator.
摘要翻译： 公开了一种系统，其包括烘箱内部的微机械振荡器，其配置成在预定频率以预定温度振荡，其中预定频率基于温度依赖性和至少一个预定特性。 该系统还包括激励机构，其被配置为激励微机械振荡器以预定频率振荡;以及温度控制回路，其被配置为使用电阻感测来检测微机械振荡器的温度，确定微机械振荡器的温度是否在预定范围内 基于温度依赖性和至少一个预定特性，以便使频率漂移最小化，并使微机械振荡器的温度保持在预定范围内。 该系统还包括被配置为输出微机械振荡器的预定频率的频率输出。
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