公开(公告)号：US20150135831A1

公开(公告)日：2015-05-21

申请号：US14606858

申请日：2015-01-27

Applicant: InvenSense, Inc.

Inventor： Steven S. NASIRI ,  Goksen G. YARALIOGLU ,  Joseph SEEGER ,  Babak TAHERI

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

Abstract translation: 公开了一种用于测量旋转加速度的旋转传感器。 旋转传感器包括感测衬底; 至少两个检测质量和一组两个换能器。 所述至少两个检验质量块中的每一个经由至少一个弯曲部并且彼此电隔离地锚固到所述感测基板; 并且所述至少两个检测质量能够相对于所述感测基板围绕Z轴在平面内旋转，其中所述Z轴垂直于所述基板。 每个换能器可以响应于旋转传感器的旋转而感测相对于感测衬底的每个校准质量块的旋转。

公开(公告)号：US20150192416A1

公开(公告)日：2015-07-09

申请号：US14662711

申请日：2015-03-19

Applicant: InvenSense, Inc.

Inventor： Steven S. NASIRI ,  David SACHS ,  Babak TAHERI

IPC: G01C19/5776

CPC classification number: G01C19/5776 ,  G01C19/5769 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0845 ,  G01P2015/0865 ,  G01P2015/088

Abstract: A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.

Abstract translation: 一种可操作以安装在电路板表面上的模块。 该模块包括线性加速度计，以提供对应于至少一个轴线性加速度的测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。 加速度计和第一旋转传感器形成在第一基板上。 该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。 第一衬底垂直地结合到第二衬底。