公开(公告)号：US20140151869A1

公开(公告)日：2014-06-05

申请号：US14176964

申请日：2014-02-10

Applicant: INVENSENSE, INC.

Inventor： Goksen G. YARALIOGLU ,  Martin LIM

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0087 ,  B81B2207/012 ,  B81C1/0069 ,  H01L23/345 ,  H01L24/48 ,  H01L2224/48091 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A system and method for controlling temperature of a MEMS sensor are disclosed. In a first aspect, the system comprises a MEMS cap encapsulating the MEMS sensor and a CMOS die vertically arranged to the MEMS cap. The system includes a heater integrated into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor. In a second aspect, the method comprises encapsulating the MEMS sensor with a MEMS cap and coupling a CMOS die to the MEMS cap. The method includes integrating a heater into the MEMS cap. The integrated heater is activated to control the temperature of the MEMS sensor.

Abstract translation: 公开了一种用于控制MEMS传感器的温度的系统和方法。 在第一方面，该系统包括封装MEMS传感器的MEMS盖和垂直地布置到MEMS盖的CMOS模头。 该系统包括集成到MEMS盖中的加热器。 集成加热器被激活以控制MEMS传感器的温度。 在第二方面，该方法包括用MEMS盖封装MEMS传感器并将CMOS管芯耦合到MEMS盖。 该方法包括将加热器集成到MEMS盖中。 集成加热器被激活以控制MEMS传感器的温度。

公开(公告)号：US20150135831A1

公开(公告)日：2015-05-21

申请号：US14606858

申请日：2015-01-27

Applicant: InvenSense, Inc.

Inventor： Steven S. NASIRI ,  Goksen G. YARALIOGLU ,  Joseph SEEGER ,  Babak TAHERI

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

Abstract translation: 公开了一种用于测量旋转加速度的旋转传感器。 旋转传感器包括感测衬底; 至少两个检测质量和一组两个换能器。 所述至少两个检验质量块中的每一个经由至少一个弯曲部并且彼此电隔离地锚固到所述感测基板; 并且所述至少两个检测质量能够相对于所述感测基板围绕Z轴在平面内旋转，其中所述Z轴垂直于所述基板。 每个换能器可以响应于旋转传感器的旋转而感测相对于感测衬底的每个校准质量块的旋转。