公开(公告)号：US20160272486A1

公开(公告)日：2016-09-22

申请号：US15071499

申请日：2016-03-16

申请人： InvenSense, Inc.

发明人： Jong II Shin ,  Peter Smeys ,  Daesung Lee

IPC分类号： B81B7/02 ,  B81C1/00

CPC分类号： B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/012 ,  B81C1/00214 ,  B81C1/00293 ,  B81C2203/0118 ,  B81C2203/035 ,  G01P15/0802

摘要： Provided herein is a method including forming a trench in a handle substrate, and a trench lining is formed in the trench. A first cavity and a second cavity are formed in the handle substrate, wherein the first cavity is connected to the trench. A first MEMS structure and the handle substrate are sealed for maintaining a first pressure within the trench and the first cavity. A second MEMS structure and the handle substrate are sealed for maintaining the first pressure within the second cavity. A portion of the trench lining is exposed, and the first pressure is changed to a second pressure within the first cavity. The first cavity and the trench are sealed to maintain the second pressure within the trench and the first cavity.

摘要翻译： 这里提供了一种方法，包括在手柄基板中形成沟槽，并且沟槽衬里形成在沟槽中。 第一腔和第二腔形成在手柄衬底中，其中第一腔连接到沟槽。 第一MEMS结构和手柄基板被密封以保持沟槽和第一腔内的第一压力。 第二MEMS结构和手柄基板被密封以将第一压力保持在第二腔内。 沟槽衬里的一部分被暴露，并且第一压力被改变到第一腔内的第二压力。 第一腔体和沟槽被密封以将第二压力保持在沟槽和第一腔体内。