公开(公告)号：US08973439B1

公开(公告)日：2015-03-10

申请号：US14188173

申请日：2014-02-24

Applicant: InvenSense, Inc.

Inventor： Leonardo Baldasarre ,  Matthew J. Thompson

IPC: G01C19/00 ,  G01P3/44 ,  G01C19/56

CPC classification number: G01P15/125 ,  G01P2015/0837 ,  G01P2015/086

Abstract: A sensor is disclosed. The sensor includes a substrate and at least two proof masses. The sensor also includes a flexible coupling between the at least two proof masses and the substrate. The at least two coupling proof masses move in an anti-phase direction normal to a plane of the substrate in response to acceleration.

Abstract translation: 公开了一种传感器。 该传感器包括一个基底和至少两个防弹块。 所述传感器还包括在所述至少两个防爆质量块和所述衬底之间的挠性联接件。 响应于加速度，至少两个耦合证明质量沿垂直于衬底的平面的反相方向移动。

公开(公告)号：US09903718B2

公开(公告)日：2018-02-27

申请号：US14723676

申请日：2015-05-28

Applicant: InvenSense, Inc.

Inventor： Matthew J. Thompson ,  Ilya Gurin

IPC: G01C19/5762 ,  G01C19/5755 ,  B81B3/00

CPC classification number: G01C19/5755 ,  B81B3/0018 ,  B81B2201/02

Abstract: A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.

公开(公告)号：US20160349056A1

公开(公告)日：2016-12-01

申请号：US14723676

申请日：2015-05-28

Applicant: InvenSense, Inc.

Inventor： Matthew J. Thompson ,  Ilya Gurin

IPC: G01C19/5762

CPC classification number: G01C19/5755 ,  B81B3/0018 ,  B81B2201/02

Abstract: A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.

Abstract translation: 用于利用机械运动限制器来控制MEMS装置（例如，具有共振MEMS结构的MEMS装置，例如陀螺仪，磁力计，加速度计等的各种实现方式）中的质量幅度的系统和/或方法。 作为非限制性示例，可以在利用各种设计的冲击停止（例如，止动停止）的正常（例如，稳态）陀螺仪操作期间完成用于MEMS陀螺仪检测质量块的幅度控制。 作为另一个非限制性示例，可以使用各种设计的非冲击限制器（例如，弹簧）来实现用于MEMS陀螺仪检测质量块的幅度控制，例如通过其正常范围的至少一部分呈现非线性刚度特性的弹簧 的操作。