公开(公告)号：US6057926A

公开(公告)日：2000-05-02

申请号：US102559

申请日：1998-06-23

申请人： Izuo Horai

发明人： Izuo Horai

IPC分类号： G01N21/95 ,  G11B5/012 ,  G11B5/82 ,  G11B5/84 ,  G11B20/18 ,  G11B27/36 ,  G11B33/10 ,  G01N21/32 ,  G01N21/86

CPC分类号： G01N21/95 ,  G11B27/36 ,  G11B5/012 ,  G11B5/82 ,  G11B5/84 ,  G11B20/1816 ,  G11B20/1883 ,  G11B20/1889 ,  G11B2220/20 ,  G11B33/10

摘要： A magnetic disk testing method is provided, which comprises a surface defect test step of detecting, as defect data, the size of surface defect of a magnetic disk, the continuity thereof, the number thereof and the position thereof by testing magnetic disks optically and a classification step of classifying the magnetic disks to first magnetic disks, second magnetic disk and third magnetic disks on the basis of the defect data obtained in the surface defect test step. The first magnetic disks have surface defects which do not provide any problem on electric characteristics and are to be qualified through a subsequent certification test, the second magnetic disks require a further certification test for determining whether or not the surface defects thereof provide a problem on electric characteristics and the third magnetic disks have electric characteristics which are to be clearly disqualified without necessity of a further certification test, wherein the first magnetic disks are decided as qualified and the second magnetic disks are objects for the certifying test.

摘要翻译： 提供了一种磁盘测试方法，其包括：通过光学测试磁盘和/或磁盘的检测作为缺陷数据来检测磁盘的表面缺陷的大小，连续性，数量及其位置的表面缺陷测试步骤 基于在表面缺陷测试步骤中获得的缺陷数据将磁盘分类到第一磁盘，第二磁盘和第三磁盘的分级步骤。 第一磁盘具有不具有电特性的任何问题的表面缺陷，并且通过随后的认证测试进行认证，第二磁盘需要进一步的认证测试，以确定其表面缺陷是否提供电 特性和第三磁盘具有明显取消资格的电气特性，而不需要进一步的认证测试，其中第一磁盘被确定为合格，第二磁盘是认证测试的对象。

公开(公告)号：US09007581B2

公开(公告)日：2015-04-14

申请号：US13621121

申请日：2012-09-15

申请人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

发明人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

IPC分类号： G01J3/00 ,  G01N21/00 ,  G01N21/95 ,  G01N21/65 ,  G01N21/47 ,  G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/65 ,  G01N21/9505 ,  G01N2021/4711 ,  G01N2021/473 ,  G01N2021/8861 ,  G01N2021/8864

摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

摘要翻译： 检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检​​查对象的表面上的缺陷进行组成分析 及其内在组成。 一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置 在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

公开(公告)号：US07777876B2

公开(公告)日：2010-08-17

申请号：US12167570

申请日：2008-07-03

申请人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

发明人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/65 ,  G01N21/9505 ,  G01N2021/4711 ,  G01N2021/473 ,  G01N2021/8861 ,  G01N2021/8864

摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

摘要翻译： 检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检​​查对象的表面上的缺陷进行组成分析 及其内在组成。 一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置 在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

公开(公告)号：US06888918B2

公开(公告)日：2005-05-03

申请号：US10715767

申请日：2003-11-18

申请人： Izuo Horai ,  Kenji Aikou ,  Kyoichi Mori

发明人： Izuo Horai ,  Kenji Aikou ,  Kyoichi Mori

IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/95 ,  G01N23/223 ,  G01B15/06

CPC分类号： G01N23/223 ,  G01B11/30 ,  G01N21/88 ,  G01N2021/8861 ,  G01N2223/076

摘要： An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Alternatively, the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.

摘要翻译： 光学检查单元在光学上检查被检查物体的表面。 处理单元根据来自光学检查单元的检查结果来检测被检查物体的表面上的缺陷及其特征，检测检测对象表面上检测到的缺陷的位置，并根据其特征对检测到的缺陷进行分类 。 处理单元根据关于缺陷的特征或分类结果的预定条件选择应执行X射线分析的缺陷。 或者，处理单元显示缺陷的位置和分类结果，并且操作者选择应执行X射线分析的缺陷。 X射线检查单元对所选或选择的缺陷进行X射线分析。

公开(公告)号：US20130010281A1

公开(公告)日：2013-01-10

申请号：US13621121

申请日：2012-09-15

申请人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

发明人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

IPC分类号： G01N21/956

CPC分类号： G01N21/9501 ,  G01N21/65 ,  G01N21/9505 ,  G01N2021/4711 ,  G01N2021/473 ,  G01N2021/8861 ,  G01N2021/8864

摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

公开(公告)号：US5245403A

公开(公告)日：1993-09-14

申请号：US813837

申请日：1991-12-27

申请人： Noboru Kato ,  Izuo Horai ,  Toshihiro Kimura ,  Mitsuyoshi Koizumi

发明人： Noboru Kato ,  Izuo Horai ,  Toshihiro Kimura ,  Mitsuyoshi Koizumi

IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/896 ,  G01N21/94 ,  G01N21/95 ,  G01N21/958

CPC分类号： G01N21/94 ,  G01N2021/4792 ,  G01N2021/887 ,  G01N2021/9513 ,  G01N21/9501

摘要： An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.

公开(公告)号：US20120176493A1

公开(公告)日：2012-07-12

申请号：US13391323

申请日：2010-09-06

申请人： Nobuaki Hirose ,  Izuo Horai

发明人： Nobuaki Hirose ,  Izuo Horai

IPC分类号： H04N7/18

CPC分类号： G01N21/956

摘要： Disclosed are an inspection apparatus and an inspection method capable of stably acquiring image data of a wafer having a high contrast at alignment marks and the peripheral portions even when a film is formed on a surface of the wafer. Specifically disclosed is a flaw inspecting apparatus which comprises an alignment measuring device including a light source serving as an illuminating light, an imaging optical system that emits light beams from the light source to an object and that collects and focuses the reflected light beams, a camera that is disposed on a converging point in the imaging optical system and that captures images of the object, and an image processing function that processes the captured images. The images are captured using the reflected light beams in at least two different spectral bands, and image information of the object corresponding to the reflected light beams is appropriately computed so that the contrast of alignment marks is increased.

摘要翻译： 公开了即使当在晶片的表面上形成膜时，也能够稳定地获取对准标记和周边部分具有高对比度的晶片的图像数据的检查装置和检查方法。 具体公开了一种缺陷检查装置，其包括：对准测量装置，其包括用作照明光的光源;成像光学系统，其将从光源发射的光束发射到物体，并收集并聚焦反射光束;相机 其设置在成像光学系统中的会聚点上并且捕获对象的图像，以及处理捕获的图像的图像处理功能。 使用至少两个不同光谱带中的反射光束捕获图像，并且适当地计算与反射光束相对应的对象的图像信息，使得对准标记的对比度增加。

公开(公告)号：US20090009753A1

公开(公告)日：2009-01-08

申请号：US12167570

申请日：2008-07-03

申请人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

发明人： Izuo Horai ,  Hirokazu Koyabu ,  Yuta Urano ,  Takahiro Jingu

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/65 ,  G01N21/9505 ,  G01N2021/4711 ,  G01N2021/473 ,  G01N2021/8861 ,  G01N2021/8864

摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

摘要翻译： 检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检​​查对象的表面上的缺陷进行组成分析 及其内在组成。 一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置 在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

公开(公告)号：US5898491A

公开(公告)日：1999-04-27

申请号：US49015

申请日：1998-03-27

申请人： Takayuki Ishiguro ,  Izuo Horai ,  Kazuya Tsukada

发明人： Takayuki Ishiguro ,  Izuo Horai ,  Kazuya Tsukada

IPC分类号： G01N21/93 ,  G01N21/95 ,  H01L21/66 ,  H01L23/544 ,  G01N21/88

CPC分类号： H01L22/34 ,  G01N21/93 ,  G01N21/9501 ,  H01L22/12

摘要： The surface defect test method and tester according to the invention comprises a sensitivity calibration disk formed with n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows, regulating the detection sensitivity according to a result of the test, producing, from a result of a test of the calibration disk with the regulated detection sensitivity, data relating a level of a detection signal to a size of the false defect as a reference data for determination of the size and obtaining the size of the defect from the level of the detection signal when the disk to be tested on defect on the basis of the reference data for determination of the size.

摘要翻译： 根据本发明的表面缺陷测试方法和测试仪包括形成有n（n是等于或大于2的整数）的灵敏度校准盘，每个包含3个或更多个假的缺陷行，每个虚假缺陷各自形成在径向或周向上提供 在校准盘的圆周方向上以预定的角度间距。 每个假缺陷行的假缺陷采取具有基本相同尺寸的突起或凹槽的形式，相邻的假缺陷在物理上分开大于激光斑的宽度的预定距离，并且一定的假缺陷 假缺陷行中的一个与其他错误缺陷行的假缺陷大小不同，根据测试结果调节检测灵敏度，从具有调节检测灵敏度的校准盘的测试结果， 将检测信号的电平与虚假缺陷的大小相关联的数据作为参考数据，用于确定尺寸并根据检测信号的电平获得缺陷的大小，当基于 用于确定尺寸的参考数据。

公开(公告)号：US5875027A

公开(公告)日：1999-02-23

申请号：US048993

申请日：1998-03-27

申请人： Takayuki Ishiguro ,  Izuo Horai ,  Kazuya Tsukada

发明人： Takayuki Ishiguro ,  Izuo Horai ,  Kazuya Tsukada

IPC分类号： G01N21/88 ,  G11B5/84 ,  G01J1/02

CPC分类号： G11B5/84 ,  G01N21/88

摘要： A calibration disk for calibrating a sensitivity of a surface defect tester, according to the present invention, comprises n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows.

摘要翻译： 根据本发明的用于校准表面缺陷测试器的灵敏度的校准盘包括n（n是等于或大于2的整数）的假缺陷行，每个包括3个或更多个在径向或周边形成的假缺陷 方向以预定的角度间距设置在校准盘的圆周方向上。 每个假缺陷行的假缺陷采取具有基本相同尺寸的突起或凹槽的形式，相邻的假缺陷在物理上分开大于激光斑的宽度的预定距离，并且一定的假缺陷 其中一个虚假缺陷行的大小与其他虚假缺陷行的虚假缺陷不同。