专利检索 ap:("JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED") AND inv:"Jiro Matsuo" 第 1 页

1.

发明授权
Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus 有权

公开(公告)号：US09663862B2

公开(公告)日：2017-05-30

申请号：US14932038

申请日：2015-11-04

申请人： JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED

发明人： Akinobu Sato , Akiko Suzuki , Emmanuel Bourelle , Jiro Matsuo , Toshio Seki

IPC分类号： H01J27/00 , C23F4/00 , H01J27/02 , H01J37/20 , H01J37/305 , H01J37/317 , H01L21/3065

CPC分类号： C23F4/00 , H01J27/026 , H01J37/20 , H01J37/3053 , H01J37/317 , H01J2237/20207 , H01J2237/20214 , H01L21/3065

摘要： A method of smoothing a solid surface with a gas cluster ion beam includes irradiating the solid surface with the gas cluster ion beam. The irradiating includes, when scratches which can be likened to a line-and-space pattern structure with widths and heights on the order of a submicrometer to micrometer are present on the solid surface, a process of emitting the gas cluster ion beam so as to expose substances, which remain on side-walls of the scratches due to lateral transferal caused by collisions with gas clusters, to other gas clusters, and the gas cluster ion beam diverges non-concentrically and/or non-uniformly.