Observation method, image processing device, and electron microscope

    公开(公告)号:US10950412B2

    公开(公告)日:2021-03-16

    申请号:US16788752

    申请日:2020-02-12

    Applicant: JEOL Ltd.

    Abstract: An observation method includes: preparing a specimen including, as a mark a plurality of metal particles in which localized surface plasmon resonance is excited by irradiation with light; acquiring an optical microscope image by photographing the specimen with an optical microscope; acquiring an electron microscope image by photographing the specimen with an electron microscope; acquiring information of the positions and the colors of the plurality of metal particles in the optical microscope image; acquiring information of the positions and the particle diameters of the plurality of metal particles in the electron microscope image; and determining information for associating the optical microscope image and the electron microscope image based on the information of the positions and the colors of the plurality of metal particles acquired from the optical microscope image, and the information of the positions and the particle diameters of the plurality of metal particles acquired from the electron microscope image.

    Image Processing Method and Transmission Electron Microscope

    公开(公告)号:US20200371331A1

    公开(公告)日:2020-11-26

    申请号:US16879904

    申请日:2020-05-21

    Applicant: JEOL Ltd.

    Abstract: An image processing method includes: acquiring an optical microscope image of a specimen; acquiring a transmission electron microscope image of the specimen having been thinned; and superimposing the optical microscope image on the transmission electron microscope image and causing a display section to display the superimposed images, and in superimposing the optical microscope image on the transmission electron microscope image and causing the display section to display the superimposed images, the optical microscope image is distorted to match a field of view of the optical microscope image with a field of view of the transmission electron microscope image.

    Actuator, Sample Positioning Device, and Charged Particle Beam System

    公开(公告)号:US20210156457A1

    公开(公告)日:2021-05-27

    申请号:US17101110

    申请日:2020-11-23

    Applicant: JEOL Ltd.

    Abstract: An actuator has: a motor section; a ball spline having a finite stroke and equipped with a shaft capable of moving along its axis; an external screw thread formed on the shaft; a nut section having an internal screw thread engaging the external screw thread and operating to transmit the rotary force of the motor section to the shaft; and a case housing the motor section and the ball spline. The shaft has a contact section at its front end, the contact section being designed to make contact with the driven object. The contact section is lower than the shaft in thermal conductivity. Due to heat generated by the motor section, the shaft elongates along the axis of the shaft in a first direction, and the case elongates along the axis of the shaft in a second direction opposite to the first direction.

    Specimen Pretreatment Method
    7.
    发明申请

    公开(公告)号:US20220214250A1

    公开(公告)日:2022-07-07

    申请号:US17550002

    申请日:2021-12-14

    Applicant: JEOL Ltd.

    Abstract: A specimen pretreatment method for transferring a specimen supported by a first specimen supporting tool to a second specimen supporting tool, the specimen pretreatment method including: transferring a specimen supported by the first specimen supporting tool to a film; immersing the film and the specimen on the film in a liquid to dissolve the film; and recovering the specimen from the liquid and supporting the specimen with the second specimen supporting tool.

    Observation method, specimen support, and transmission electron microscope

    公开(公告)号:US11037755B2

    公开(公告)日:2021-06-15

    申请号:US16410243

    申请日:2019-05-13

    Applicant: JEOL Ltd.

    Abstract: An observation method includes placing a specimen on a specimen supporting film of a specimen support, attaching the specimen support to a retainer, attaching the retainer to an optical microscope retainer holding base, attaching the optical microscope retainer holding base to a specimen stage of an optical microscope and observing the specimen under the optical microscope, attaching the retainer to a transmission electron microscope retainer holding base, and loading the transmission electron microscope retainer holding base into a transmission electron microscope and observing the specimen under the transmission electron microscope.

    Observation Method, Image Processing Device, and Electron Microscope

    公开(公告)号:US20200266026A1

    公开(公告)日:2020-08-20

    申请号:US16788752

    申请日:2020-02-12

    Applicant: JEOL Ltd.

    Abstract: An observation method includes: preparing a specimen including, as a mark a plurality of metal particles in which localized surface plasmon resonance is excited by irradiation with light; acquiring an optical microscope image by photographing the specimen with an optical microscope; acquiring an electron microscope image by photographing the specimen with an electron microscope; acquiring information of the positions and the colors of the plurality of metal particles in the optical microscope image; acquiring information of the positions and the particle diameters of the plurality of metal particles in the electron microscope image; and determining information for associating the optical microscope image and the electron microscope image based on the information of the positions and the colors of the plurality of metal particles acquired from the optical microscope image, and the information of the positions and the particle diameters of the plurality of metal particles acquired from the electron microscope image.

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