公开(公告)号：US20230393469A1

公开(公告)日：2023-12-07

申请号：US18235420

申请日：2023-08-18

申请人： JSR CORPORATION

发明人： Nozomi SAKANO ,  Ryuichi NEMOTO

IPC分类号： G03F7/038 ,  C08F212/14 ,  C08F220/18 ,  C07D317/72 ,  C07D493/10 ,  C07D317/24 ,  C08F220/30 ,  C08F220/28 ,  G03F7/039

CPC分类号： G03F7/038 ,  C08F212/22 ,  C08F220/1807 ,  C07D317/72 ,  G03F7/039 ,  C07D317/24 ,  C08F220/303 ,  C08F220/283 ,  C07D493/10

摘要： A radiation-sensitive resin composition includes a resin including a structural unit represented by formula (1), a radiation-sensitive acid generator, and a solvent. R1 is a hydrogen atom, a fluorine atom, or the like. R2 and R3 each independently represent a monovalent hydrocarbon group having 1 to 10 carbon atoms, or the like. R4 is a hydrogen atom, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or the like. R5 and R6 each independently represent a hydrogen atom, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or the like. R7 and R8 each independently represent a hydrogen atom, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or the like. R9 and R10 each independently represent a monovalent organic group having 1 to 10 carbon atoms, or the like.

公开(公告)号：US20230400765A1

公开(公告)日：2023-12-14

申请号：US18198971

申请日：2023-05-18

申请人： JSR CORPORATION

发明人： Ryuichi NEMOTO ,  Nozomi SAKANO

IPC分类号： G03F7/004 ,  C08F220/28 ,  C08F220/36 ,  C08F220/38 ,  C08F220/18 ,  C07C381/12 ,  C07D211/62 ,  C07D211/60 ,  C07D207/16 ,  C07D327/06 ,  C07C309/12 ,  C07D405/12 ,  C07D493/10

CPC分类号： G03F7/0045 ,  C08F220/283 ,  C08F220/365 ,  C08F220/382 ,  C08F220/1807 ,  C07C381/12 ,  C07D493/10 ,  C07D211/60 ,  C07D207/16 ,  C07D327/06 ,  C07C309/12 ,  C07D405/12 ,  C07D211/62

摘要： A radiation-sensitive resin composition includes: an onium salt compound represented by formula (1). R1 is a monovalent hydrocarbon group having 1 to 20 carbon atoms; R2 and R3 are each independently a monovalent hydrocarbon group having 1 to 20 carbon atoms, or R2 and R3 taken together represent a cyclic structure having 3 to 20 ring atoms; R4 is a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms and L1 is a divalent linking group having 1 to 40 carbon atoms, or R4 and L1 taken together represent a group including a heterocyclic structure having 3 to 20 ring atoms; Rf1 and Rf2 are each independently a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms.