摘要:
The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal and form a ruthenium metal pattern on a semiconductor substrate without the need for high temperature processing or a complex series of wet processes. A gas stream including ozone (O3) is brought into contact with a ruthenium source in one or more reaction vessels to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where the gaseous ruthenium tetraoxide is reduced to form a ruthenium dioxide (RuO2) layer on a semiconductor substrate. The deposited ruthenium dioxide is then reduced, preferably with hydrogen, to produce highly pure ruthenium metal that may be, in turn, patterned and dry etched using ozone as an etchant gas.
摘要翻译:本发明提供一种用于纯化钌源以获得高纯度钌金属并在半导体衬底上形成钌金属图案的方法,而不需要高温处理或复杂的一系列湿法。 使包含臭氧(O 3 3 N)的气流与一个或多个反应容器中的钌源接触以形成四氧化钌(RuO 4 S 4),其为化合物 反应条件下的气体。 然后将四氧化钌,以及未反应的臭氧和气流的其余部分进料到收集容器中,在该收集容器中,气态钌四氧化物被还原以在半导体衬底上形成二氧化钌(RuO 2 N 2)层 。 然后沉积的二氧化钌优选用氢气还原,以产生高纯度的钌金属,其可以使用臭氧作为蚀刻剂气体进行图案化和干蚀刻。
摘要:
The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal without the need for high temperature processing, expensive reagents, complex series of wet processes, or expensive equipment. According to the present invention, a gas stream including ozone (O3) is brought into contact with a ruthenium source, such as a commercial ruthenium metal sponge, in one or more reaction vessels. The ozone reacts with the ruthenium present in the ruthenium source to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where a major portion of the gaseous ruthenium tetraoxide is thermally reduced to form ruthenium dioxide (RuO2) deposits within the collection vessel. The deposited ruthenium dioxide is then reduced, preferably with hydrogen, to produce highly pure ruthenium metal that is, in turn removed from the collection vessel.
摘要:
An apparatus including an execution logic that includes circuitry to execute instructions, and an instruction execution scheduler logic coupled with the execution logic. The instruction execution scheduler logic is to receive an execute at commit state update instruction. The instruction execution scheduler logic includes at commit state update logic that is to wait to schedule the execute at commit state update instruction for execution until the execute at commit state update instruction is a next instruction to commit. Other apparatus, methods, and systems are also disclosed.
摘要:
A multi-function ALU (arithmetic/logic unit) for use in digital data processing facilitates the execution of instructions in parallel, thereby enhancing processor performance. The proposed apparatus reduces the instruction execution latency that results from data dependency hazards in a pipelined machine. This latency reduction is accomplished by collapsing the interlocks due to these hazards. The proposed apparatus achieves performance improvement while maintaining compatibility with previous implementations designed using an identical architecture.
摘要:
In a digital computer system both rotation of bits in a data byte and rotation in combination with additional manipulation, a multifunction permutation switch, in a cyclic mode of operation, connects the input bit lines to the output bit lines so that the sequence of input bits are maintained on the output bit lines when the bits on the input lines are considered as arranged in a circle, and in a non-cyclic mode of operation, connects the input bit lines to the output bit lines in a manner to execute gather operations and spread operations.
摘要:
Apparatus is disclosed for attaching a flexible annular member to a rigid member using an annular tongue on an annular bead on one of the members that is engageable in an annular groove in an annular bead on the other member, and further using a preformed resilient lock ring that is split so as to have oppositely facing ends and has a C-shaped cross-section with a radially outwardly facing peripheral side so as to be mountable over and then clamp together and hold the beads on the members with their tongue and groove engaged.
摘要:
In an embodiment, a processor includes a plurality of cores. Each core includes conversion power logic to receive an instruction including an untranslated memory address, determine whether a code segment (CS) base address is equal to zero, and in response to a determination that the CS base address is equal to zero, execute the instruction using the untranslated memory address. Other embodiments are described and claimed.
摘要:
Generation of functional status followed by the use of the status to control the sequencing of microinstructions is a well known critical path in processor designs. The delay associated with the path is exacerbated in superscalar machines by the additional statuses that are produced by multiple functional units from which the appropriate status must be selected for controlling the sequencing of microinstructions. This is especially true in horizontally microcoded machines. The adverse affects on the delay can be reduced by using a staged multiplexor design. For the staged multiplexor to be useful, all functional unit status should be produced as early as possible. In this invention, a status predictor is described that allows the status associated with the shifter to be generated directly from the inputs to the shifter. As a result, the status is available early in the pipeline cycle in which the shift is actually performed and made available to the multiplexor producing the controls for microinstruction sequencing. In addition, the invention allows the early generation of all shifter status used to set condition codes. The predictor has been implemented in an ESA/390 processor implementation where it was instrumental in achieving the desired cycle time.
摘要:
A digital signal decoder system for receiving compressed encoded digitized video signals and transmitting decompressed decoded digital video signals includes a FIFO Data Buffer, a RAM having (1) a compressed, encoded Data Buffer and (2) a data portion for storing decompressed digital video buffer data. A Memory Management Unit is provided for managing the RAM. The decoder has a decoder processor that includes a Variable Length Code Decoder for receiving encoded data, a (2,3,3) parallel counter based Inverse Quantizer for dequantizing the decoded data, an Inverse Discrete Cosine Transform Decoder for transforming the dequantized, decoded data into Intrapictures, Predicted Pictures, and Bidirectional predicted Pictures, a Motion Compensator for receiving Intrapictures and other information from the RAM, and error functions, and forming motion compensated predicted pictures therefrom for return to the RAM, a Display Unit to output motion compensated pictures from the RAM, and a reduced instruction set Controller to control the Memory Management Unit, the Variable Length Code Decoder, the Inverse Quantizer, the Inverse Discrete Cosine Transform Decoder, the Motion Compensator, and the Display Unit.
摘要:
A mechanism is presented for detecting overflow in an interlock collapsing hardware apparatus that simultaneously executes two instructions. The overflow is determined as if the second instruction executes by itself using results from execution of the first instruction. Overflow detection is accomplished by using only values input into, and generated within, the interlock collapsing apparatus.