摘要:
A flow sensor includes a main flow body, a laminar flow element, a first main flow body sensor tap, a second main flow body sensor tap, and a bypass flow body. The bypass flow body is coupled to the main flow body and has a first bypass flow port, a second bypass flow port, and a bypass flow channel between the first and second bypass flow ports. The flow restrictor is disposed within the bypass flow channel.
摘要:
A flow sensor includes a main flow body, a laminar flow element, a first main flow body sensor tap, a second main flow body sensor tap, and a bypass flow body. The bypass flow body is coupled to the main flow body and has a first bypass flow port, a second bypass flow port, and a bypass flow channel between the first and second bypass flow ports. The flow restrictor is disposed within the bypass flow channel.
摘要:
A flow sensor includes a main flow body, a laminar flow element, and first and second bypass channels. The first bypass channel is formed in, and extends at least partially around, the outer surface of the laminar flow element, and is in fluid communication with the main flow channel and defines a first bypass flow passage between the laminar flow element and the main flow body. The second bypass channel is formed in, and extends at least partially around, the outer surface of the laminar flow element, and is in fluid communication with the main flow channel and defines a second bypass flow passage between the laminar flow element and the main flow body.
摘要:
A flow sensor includes a main flow body, a laminar flow element, and first and second bypass channels. The first bypass channel is formed in, and extends at least partially around, the outer surface of the laminar flow element, and is in fluid communication with the main flow channel and defines a first bypass flow passage between the laminar flow element and the main flow body. The second bypass channel is formed in, and extends at least partially around, the outer surface of the laminar flow element, and is in fluid communication with the main flow channel and defines a second bypass flow passage between the laminar flow element and the main flow body.
摘要:
A flow sensor includes a main flow body, a laminar flow element, a first bypass tap, and a second flow element sensor tap. The main flow body has a first main flow port, a second main flow port, a main flow channel, a first bypass tap, a second bypass tap, and a bypass flow channel. The laminar flow element is disposed within the main flow channel. The bypass flow channel has a cross sectional area, and the first bypass tap and the second bypass tap each have a cross sectional area that is greater than the maximum cross sectional area of the bypass flow channel.
摘要:
The present disclosure relates generally to flow sensors, and more particularly, to devices and methods for providing a pressure drop through a flow sensor at a given flow rate. In one illustrative embodiment, a sensor assembly includes a housing with a first flow port and a second flow port. The housing may define a fluid channel extending between the first flow port and the second flow port, with a sensor positioned in the housing and exposed to the fluid channel. The illustrative sensor may be configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A flow restrictor may be situated in and integrally molded with at least one of the first flow port and the second flow port. The flow restrictor may be configured to accurately provide a pressure drop through the flow sensor at a given flow rate.
摘要:
A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要:
A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
摘要:
The present disclosure relates generally to flow sensors, and more particularly, to methods and devices for reducing variations in fluid flow across the flow sensor for increased accuracy and/or reliability. In one illustrative embodiment, a flow sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a flow sensor positioned in the housing and exposed to the fluid channel. The flow sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A porous insert is situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, and during operation of the flow sensor assembly, a fluid may pass through the inlet flow port, through the porous insert, across the flow sensor, and through the outlet flow port. The porous insert may include pores that are configured to reduce the turbulence in the fluid passing the flow sensor.
摘要:
The present disclosure relates generally to sensors, and more particularly, to methods and devices for reducing moisture, dust, particulate matter, and/or other contaminates entering a sensor. In one illustrative embodiment, a sensor assembly includes a housing with an inlet flow port and an outlet flow port. The housing defines a fluid channel extending between the inlet flow port and the outlet flow port, with a sensor positioned in the housing and exposed to the fluid channel. The illustrative sensor is configured to sense a measure related to the flow rate of a fluid flowing through the fluid channel. A hydrophobic filter may be situated in the fluid channel, sometimes upstream of the sensor. When so configured, and during operation of the sensor assembly, a fluid may pass through the inlet flow port, through the hydrophobic filter, across the sensor, and through the outlet flow port. The hydrophobic filter may be configured to reduce the moisture entering the fluid channel of the sensor.