摘要:
A breath pacing apparatus and a method for pacing a respiration of a person include a haptic output unit with a variable haptically perceivable feature. The haptic output unit is configured to change the haptically perceivable feature periodically according to a sequence of desired respiration cycles, where a characteristic of the change of the haptically perceivable feature is related to a length of the respiration cycles in the sequence of desired respiration cycles.
摘要:
In the production of semiconductors it is necessary to inspect circuit patterns on wafers. In circuits having very small details (for example, 40 nm), inspection can be carried out by means of electron beam columns, a plurality of wafers then being inspected at the same time and the signals being compared on-line. In an inspection apparatus in accordance with the invention more beam columns 1 to 7 are provided for every wafer A, B, C in order to obtain a high feed-through rate. The inspection is carried out by way of an x-y scan and the wafers are fed through according to a rectilinear movement, thus providing the possibility of scanning only the Care Area Fraction of the wafers, resulting in a high feed-through rate for the wafers in the inspection apparatus.
摘要:
Multi-beam lithography apparatus is used for writing patterns on a substrate 14 such as a wafer for ICs. The patterns may have details of various dimensions. In order to enhance the production rate, it is attractive to write fine details with a small spot 16 and large details with a large spot. It is known to vary the spot size by varying the emissive surface of the electron source. In accordance with the invention the spot size is varied by varying the size 22 of the beam limiting aperture 20, thus enabling optimization of the beam current in dependence on the spot size. A preferred embodiment is provided with an additional (condenser) lens 24 such that the object distance remains constant when the magnification of the lens system 18, 24 is varied.
摘要:
To provide a breath pacing system and a corresponding method for pacing the respiratory activity of a subject that provide the possibility to adapt the output signal to the respiration characteristics of the subject automatically and effectively a breath pacing system (10) for pacing the respiratory activity of a subject and a respective method is proposed, comprising: an input unit (14) for generating or determining an input signal related to a respiration characteristic of a subject, a signal analyzing unit (16) provided to recognize a signal pattern within the input signal, and an output unit (12) for outputting output signals corresponding to a desired breathing sequence, wherein said output unit (12) is provided to be activated, upon a starting signal, to output a sequence of output signals comprising a signal pattern related to a previously recognized signal pattern.
摘要:
To provide a breath pacing system and a corresponding method for pacing the respiratory activity of a subject that provide the possibility to adapt the output signal to the respiration characteristics of the subject automatically and effectively a breath pacing system (10) for pacing the respiratory activity of a subject and a respective method is proposed, comprising: an input unit (14) for generating or determining an input signal related to a respiration characteristic of a subject, a signal analyzing unit (16) provided to recognize a signal pattern within the input signal, and an output unit (12) for outputting output signals corresponding to a desired breathing sequence, wherein said output unit (12) is provided to be activated, upon a starting signal, to output a sequence of output signals comprising a signal pattern related to a previously recognized signal pattern.
摘要:
The invention relates to a breath pacing apparatus, comprising a haptic output unit with a variable haptically perceivable feature, said haptic output unit being provided to change said haptically perceivable feature periodically according to a sequence of desired respiration cycles, wherein a characteristic of the change of said haptically perceivable feature is related to the length of the respiration cycles. The invention is further related to a corresponding method for pacing the respiration of a person.
摘要:
The invention relates to wafer inspection by means of a scanning electron microscope (SEM) column in which the secondary electron detector 22, 24 is positioned centrally above the objective lens of the column. Secondary electrons that leave the central part of the specimen in a direction substantially perpendicular to its surface are inevitably collected in the central part of the detector surface where the bore 36 for the primary beam 6 is situated. Consequently, such electrons do not contribute to the detector signal. In order to avoid such a detrimental loss of signal contribution, it is proposed to provide a central electrode 35 in the central bore 36 such that secondary electrons that approach the bore are driven aside towards the electron-sensitive detector region 48.