METHODS AND SYSTEMS FOR IMPROVING ACTUATOR PERFORMANCE BY REDUCING TENSILE STRESSES IN PIEZOELECTRIC THIN FILMS
    7.
    发明申请
    METHODS AND SYSTEMS FOR IMPROVING ACTUATOR PERFORMANCE BY REDUCING TENSILE STRESSES IN PIEZOELECTRIC THIN FILMS 审中-公开
    通过减少压电薄膜中的拉伸应力来提高执行机构性能的方法和系统

    公开(公告)号:US20120245408A1

    公开(公告)日:2012-09-27

    申请号:US13427727

    申请日:2012-03-22

    IPC分类号: A61F11/04 H04R25/00 H02N2/06

    摘要: Disclosed are methods and systems for improving actuator performance by reducing tensile stresses in piezoelectric thin films. In one embodiment, a piezoelectric actuator includes a substrate, a first electrode positioned on the substrate, a piezoelectric thin film positioned on the first electrode, and a second electrode positioned on the piezoelectric thin film. The displacement capability of the actuator is enhanced by reducing the tensile stresses of the piezoelectric thin film. In some embodiments, a constant DC voltage applied to the piezoelectric actuator generates compressive in-plane stresses, which counteract the tensile in-plane stresses. As a result, the overall tensile stresses in the actuator are reduced, and the actuator displacement is improved.

    摘要翻译: 公开了通过降低压电薄膜中的拉伸应力来改善致动器性能的方法和系统。 在一个实施例中,压电致动器包括基板,位于基板上的第一电极,位于第一电极上的压电薄膜和位于压电薄膜上的第二电极。 通过减小压电薄膜的拉伸应力来增强致动器的位移能力。 在一些实施例中,施加到压电致动器的恒定DC电压产生压缩面内应力,其抵消拉伸面内应力。 结果,致动器中的总拉伸应力减小,致动器位移得到改善。

    DETECTION OF TRACE CHEMICALS AND METHOD THEREFOR
    10.
    发明申请
    DETECTION OF TRACE CHEMICALS AND METHOD THEREFOR 失效
    检测化学物质及其方法

    公开(公告)号:US20110151574A1

    公开(公告)日:2011-06-23

    申请号:US12960341

    申请日:2010-12-03

    IPC分类号: G01N27/04 H01L29/66 B82Y25/00

    摘要: The invention provides devices, systems, and methods for detecting an analyte vapor. Particularly, electronegative analyte vapors, such as those vapors evolving from explosive compounds, are typical analytes detected the devices. The devices operate using a resistivity change mechanism wherein a nanostructured chemiresistive material undergoes a resistivity change in the presence of an analyte vapor. A resistivity change indicates the presence of an analyte.

    摘要翻译: 本发明提供用于检测分析物蒸汽的装置,系统和方法。 特别地,电负性分析物蒸气(例如从爆炸性化合物演化的那些蒸气)是检测到装置的典型分析物。 这些装置使用电阻率变化机制来操作,其中纳米结构的化学材料在分析物蒸汽的存在下经历电阻率变化。 电阻率变化表示分析物的存在。