Method of making magnetoresistive read/ inductive write magnetic head assembly fabricated with silicon on hard insulator for improved durability and electrostatic discharge protection
    1.
    发明授权
    Method of making magnetoresistive read/ inductive write magnetic head assembly fabricated with silicon on hard insulator for improved durability and electrostatic discharge protection 失效
    在硬绝缘体上制造具有硅的磁阻读/磁性写磁头组件的方法,以改善耐久性和静电放电保护

    公开(公告)号:US06607923B2

    公开(公告)日:2003-08-19

    申请号:US09034457

    申请日:1998-03-04

    IPC分类号: H01L2100

    摘要: A magnetoresistive read/inductive write magnetic head assembly formed on a hard electrically insulating substrate and having electrostatic discharge protection comprises: a hard electrically insulating substrate, preferably formed of sapphire or alumina-TiC; multiple alumina layers formed over the substrate; a magnetoresistive read/inductive write head positioned between the alumina layers; a silicon layer supported by the substrate; and a semiconducting circuit integrated into the silicon layer and interconnected with said magnetoresistive read/write inductive write head to provide electrostatic discharge protection to the head. The silicon layer may be epitaxially grown on the substrate when implemented as sapphire, or bonded to the substrate when implemented as alumina-TiC. The hard electrically insulating substrate and alumina layers provide the assembly with a hard air bearing surface having generally uniform lapping and etching characteristics, and excellent durability.

    摘要翻译: 形成在硬电绝缘基板上并具有静电放电保护的磁阻读/磁写磁头组件包括:硬电绝缘基板,优选由蓝宝石或氧化铝-TiC形成; 多个氧化铝层形成在衬底上; 定位在氧化铝层之间的磁阻读/写写头; 由所述基板支撑的硅层; 以及集成到硅层中并与所述磁阻读/写感应写头互连的半导体电路,以向头提供静电放电保护。 当作为蓝宝石实施时,硅层可以在衬底上外延生长,或者当被实施为氧化铝-TiC时,结合到衬底上。 硬电绝缘基板和氧化铝层为组装提供了具有大致均匀研磨和蚀刻特性以及优异的耐久性的硬质空气轴承表面。

    Magnetoresistive read/inductive write magnetic head assembly fabricated
with silicon on hard insulator for improved durability and
electrostatic discharge protection and method for manufacturing same
    2.
    发明授权
    Magnetoresistive read/inductive write magnetic head assembly fabricated with silicon on hard insulator for improved durability and electrostatic discharge protection and method for manufacturing same 失效
    在硬绝缘体上用硅制造的磁阻读/磁性写磁头组件,用于改善耐久性和静电放电保护及其制造方法

    公开(公告)号:US5757591A

    公开(公告)日:1998-05-26

    申请号:US756294

    申请日:1996-11-25

    摘要: A magnetoresistive read/inductive write magnetic head assembly formed on a hard electrically insulating substrate and having electrostatic discharge protection comprises: a hard electrically insulating substrate, preferably formed of sapphire or alumina-TiC; multiple alumina layers formed over the substrate; a magnetoresistive read/inductive write head positioned between the alumina layers; a silicon layer supported by the substrate; and a semiconducting circuit integrated into the silicon layer and interconnected with said magnetoresistive read/write inductive write head to provide electrostatic discharge protection to the head. The silicon layer may be epitaxially grown on the substrate when implemented as sapphire, or bonded to the substrate when implemented as alumina-TiC. The hard electrically insulating substrate and alumina layers provide the assembly with a hard air bearing surface having generally uniform lapping and etching characteristics, and excellent durability.

    摘要翻译: 形成在硬电绝缘基板上并具有静电放电保护的磁阻读/磁写磁头组件包括:硬电绝缘基板,优选由蓝宝石或氧化铝-TiC形成; 多个氧化铝层形成在衬底上; 定位在氧化铝层之间的磁阻读/写写头; 由所述基板支撑的硅层; 以及集成到硅层中并与所述磁阻读/写感应写头互连的半导体电路,以向头提供静电放电保护。 当作为蓝宝石实施时,硅层可以在衬底上外延生长,或者当被实施为氧化铝-TiC时,结合到衬底上。 硬电绝缘基板和氧化铝层为组装提供了具有大致均匀研磨和蚀刻特性以及优异的耐久性的硬质空气轴承表面。

    Method of making stabilized MR sensor and flux guide joined by
contiguous junction
    3.
    发明授权
    Method of making stabilized MR sensor and flux guide joined by contiguous junction 失效
    制造稳定的MR传感器和通过连接接头连接的助焊剂的方法

    公开(公告)号:US5893981A

    公开(公告)日:1999-04-13

    申请号:US44358

    申请日:1998-03-19

    摘要: The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

    摘要翻译: MR传感器和磁通引导件的后端通过连续的自对准结连接,从而可以实现MR传感器后端的磁通引导件的可预测重叠,以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件,用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模,MR传感器和引导/纵向偏置层可以被图案化,然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

    Stabilized MR sensor and heat guide joined by contiguous junction
    4.
    发明授权
    Stabilized MR sensor and heat guide joined by contiguous junction 有权
    稳定的MR传感器和导热板连接在一起

    公开(公告)号:US06239955B1

    公开(公告)日:2001-05-29

    申请号:US09280497

    申请日:1999-03-30

    IPC分类号: G11B539

    摘要: The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous selfaligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

    摘要翻译: MR传感器和磁通引导件的后端通过连续的自对准结连接,从而可以实现MR传感器后端的磁通引导件的可预测重叠,以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过邻接的自对准结连接到通量引导件,用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模,MR传感器和引导/纵向偏置层可以被图案化,然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

    Stabilized MR sensor and flux/heat guide joined by contiguous junction
    5.
    发明授权
    Stabilized MR sensor and flux/heat guide joined by contiguous junction 失效
    稳定的MR传感器和通过连接接头连接的通量/热导

    公开(公告)号:US06181532B2

    公开(公告)日:2001-01-30

    申请号:US09280489

    申请日:1999-03-30

    IPC分类号: G11B539

    摘要: The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

    摘要翻译: MR传感器和磁通引导件的后端通过连续的自对准结连接,从而可以实现MR传感器后端的磁通引导件的可预测重叠,以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件,用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模,MR传感器和引导/纵向偏置层可以被图案化,然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

    Stabilized MR sensor and flux guide joined by contiguous junction
    6.
    发明授权
    Stabilized MR sensor and flux guide joined by contiguous junction 失效
    稳定的MR传感器和通量引导通过连续的连接点连接

    公开(公告)号:US5930084A

    公开(公告)日:1999-07-27

    申请号:US672516

    申请日:1996-06-17

    摘要: The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

    摘要翻译: MR传感器和磁通引导件的后端通过连续的自对准结连接,从而可以实现MR传感器后端的磁通引导件的可预测重叠,以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件,用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模,MR传感器和引导/纵向偏置层可以被图案化,然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

    Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization
    7.
    发明授权
    Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization 失效
    形成具有图案交换底层稳定性的连续自由层自旋阀传感器的方法

    公开(公告)号:US06606782B2

    公开(公告)日:2003-08-19

    申请号:US10104778

    申请日:2002-03-22

    IPC分类号: G11B539

    摘要: To form a spin valve device, start by forming a gap layer. Form a buffer layer with a layer of refractory material on the buffer layer. Form patterned underlayers including a magnetic material for providing trackwidth and longitudinal bias on the buffer layer comprising either a lower antiferromagnetic layer stacked with a ferromagnetic layer or a Cr layer stacked with a permanent magnetic layer. Form an inwardly tapered depression in the patterned underlayers down to the buffer layer by either ion milling through a mask or a stencil lift off technique. Form layers covering the patterned underlayers that cover the inwardly tapered depression. Form free, pinned, spacer and antiferromagnetic layers. Form conductors either on a surface of the antiferromagnetic layer aside from the depression or between the buffer layer and the patterned underlayers.

    摘要翻译: 为了形成自旋阀装置,通过形成间隙层开始。 在缓冲层上形成具有耐火材料层的缓冲层。 包括用于在缓冲层上提供轨道宽度和纵向偏压的磁性材料的形式图案化底层包括堆叠有铁磁层的下反铁磁层或者与永久磁性层堆叠的Cr层。 通过离子铣削通过掩模或模板剥离技术,在图案化的底层中形成向下渐变的凹陷,直到缓冲层。 覆盖图案化底层的覆盖向内倾斜的凹陷的成形层。 无形,固定,间隔和反铁磁层。 在反铁磁层的表面上,在凹陷之外或缓冲层和图案化的底层之间形成导体。

    Continuous free layer spin valve sensor with patterned exchange underlayer stabilization
    9.
    发明授权
    Continuous free layer spin valve sensor with patterned exchange underlayer stabilization 失效
    连续自由层旋转阀传感器,具有图案交换底层稳定性

    公开(公告)号:US06943995B2

    公开(公告)日:2005-09-13

    申请号:US10616724

    申请日:2003-07-10

    IPC分类号: G01R33/09 G11B5/39 G11B5/127

    摘要: To form a spin valve device, start by forming a gap layer. Form a buffer layer with a layer of refractory material on the buffer layer. Form patterned underlayers including a magnetic material for providing trackwidth and longitudinal bias on the buffer layer comprising either a lower antiferromagnetic layer stacked with a ferromagnetic layer or a Cr layer stacked with a permanent magnetic layer. Form an inwardly tapered depression in the patterned underlayers down to the buffer layer by either ion milling through a mask or a stencil lift off technique. Form layers covering the patterned underlayers that cover the inwardly tapered depression. Form free, pinned, spacer and antiferromagnetic layers. Form conductors either on a surface of the antiferromagnetic layer aside from the depression or between the buffer layer and the patterned underlayers.

    摘要翻译: 为了形成自旋阀装置,通过形成间隙层开始。 在缓冲层上形成具有耐火材料层的缓冲层。 包括用于在缓冲层上提供轨道宽度和纵向偏压的磁性材料的形式图案化底层,包括堆叠有铁磁层的下反铁磁层或与永久磁性层堆叠的Cr层。 通过离子铣削通过掩模或模板剥离技术,在图案化的底层中形成向下渐变的凹陷,直到缓冲层。 覆盖图案化底层的覆盖向内倾斜的凹陷的成形层。 无形,固定,间隔和反铁磁层。 在反铁磁层的表面上,在凹陷之外或缓冲层和图案化的底层之间形成导体。