Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same
    2.
    发明授权
    Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same 有权
    横流原子层沉积装置和使用其的原子层沉积方法

    公开(公告)号:US09062375B2

    公开(公告)日:2015-06-23

    申请号:US13587061

    申请日:2012-08-16

    IPC分类号: C23C16/00 C23C16/455

    摘要: A lateral flow atomic layer deposition (ALD) apparatus has two gas inflow channels and two gas outflow channels that are connected to two gas outlets that are symmetrically formed based on a substrate in which a thin film is deposited, thereby differently guiding a flow direction of a gas flowing on the substrate. Therefore, uniformity of a deposited film is improved, compared with the conventional lateral flow ALD apparatus in which a supplied source gas and reaction gas constantly flow in only one direction on the substrate.

    摘要翻译: 侧流原子层沉积(ALD)装置具有两个气体流入通道和两个气体流出通道,其连接到基于其中沉积薄膜的基底对称形成的两个气体出口,从而不同地引导流动方向 在基板上流动的气体。 因此,与供给的原料气体和反应气体在基板上仅沿一个方向恒定流动的常规侧流ALD装置相比,沉积膜的均匀性得到改善。

    METHOD OF COMMUNICATING AND ESTABLISHING RELAY CHANNEL BETWEEN BASE STATION AND NON-LINE-OF-SIGHT CHANNEL TERMINAL IN NEXT GENERATION CELLULAR COMMUNICATION SYSTEM
    5.
    发明申请
    METHOD OF COMMUNICATING AND ESTABLISHING RELAY CHANNEL BETWEEN BASE STATION AND NON-LINE-OF-SIGHT CHANNEL TERMINAL IN NEXT GENERATION CELLULAR COMMUNICATION SYSTEM 审中-公开
    在下一代蜂窝通信系统中通信和建立基站和非线路信道之间的继电信道的方法

    公开(公告)号:US20110077013A1

    公开(公告)日:2011-03-31

    申请号:US12995742

    申请日:2009-02-24

    IPC分类号: H04W40/00

    摘要: Disclosed herein are a method of communicating and establishing a relay channel between a base station and a non-line-of-sight channel terminal in a next generation cellular communication system. The method of communicating between a base station and a non-line-of-sight channel terminal includes a first step of the base station receiving channel state information from the non-line-of-sight channel terminal; a second step of the base station collecting channel state information between the non-line-of-sight channel terminal and adjacent terminals; a third step of, if there is a relay channel terminal that belongs to the adjacent terminals and that can ensure line-of-sight channels to the base station and the non-line-of-sight channel terminal, the base station and the non-line-of-sight channel terminal performing high frequency cellular communication via the relay channel terminal; and a fourth step of, otherwise, the base station and the non-line-of-sight channel terminal performing low frequency cellular communication.

    摘要翻译: 这里公开了一种在下一代蜂窝通信系统中在基站和非视线信道终端之间传送和建立中继信道的方法。 基站和非视线信道终端之间的通信方法包括基站从非视线信道终端接收信道状态信息的第一步骤; 基站收集非视距信道终端与相邻终端之间的信道状态信息的第二步骤; 第三步,如果存在属于相邻终端的中继信道终端,并且可以确保到基站和非视距信道终端的视距信道,则基站和非 - 视线通道终端经由中继信道终端执行高频蜂窝通信; 以及第四步骤,否则,基站和非视距信道终端执行低频蜂窝通信。

    Thin film deposition apparatus and method of maintaining the same
    8.
    发明授权
    Thin film deposition apparatus and method of maintaining the same 有权
    薄膜沉积装置及其保持方法

    公开(公告)号:US08273178B2

    公开(公告)日:2012-09-25

    申请号:US12393377

    申请日:2009-02-26

    CPC分类号: C23C14/22 C23C16/44

    摘要: A thin film deposition apparatus and a method of maintaining the same are disclosed. In one embodiment, a thin film deposition apparatus includes: a chamber including a removable chamber cover; one or more reactors housed in the chamber; a chamber cover lifting device connected to the chamber cover. The chamber cover lifting device is configured to move the chamber cover vertically between a lower position and an upper position. The apparatus further includes a level sensing device configured to detect whether the chamber cover is level, and a level maintaining device configured to adjust the chamber cover if the chamber cover is not level. This configuration maintains the chamber cover to be level as a condition for further vertical movement of the chamber cover.

    摘要翻译: 公开了一种薄膜沉积装置及其保持方法。 在一个实施例中,薄膜沉积设备包括:包括可移除室盖的室; 容纳在室中的一个或多个反应器; 连接到室盖的室盖提升装置。 室盖提升装置构造成在下位置和上位置之间垂直移动室盖。 所述装置还包括液位感测装置,其被配置为检测所述腔室盖是否水平;以及水平维持装置,其被配置为如果所述腔室盖不是水平面则调节所述腔室盖。 这种构造保持室盖被平坦化,作为室盖的进一步垂直移动的条件。

    DTV transmitter and method of coding data in DTV transmitter
    9.
    发明授权
    DTV transmitter and method of coding data in DTV transmitter 有权
    DTV发射机和DTV发射机中的数据编码方法

    公开(公告)号:US08194784B2

    公开(公告)日:2012-06-05

    申请号:US12836502

    申请日:2010-07-14

    IPC分类号: H04L27/00

    摘要: A DTV transmitter includes a pre-processor expanding original enhanced data, a data formatter generating enhanced data packets including the expanded enhanced data and inserting known data place holders into the data packets, a multiplexer multiplexing the enhanced data packets with main data packets including main data, and an RS encoder adding systematic RS parity data to each main data packet and adding non-systematic RS parity data holders to each enhanced data packet. It further includes a data interleaver interleaving the RS-coded data packets, a known data generator generating know data symbols, a converter converting the interleaved data packet into symbols, and a symbol processor processing the converted symbols. The symbol processor removes symbols representing the null data, encodes symbols representing the original enhanced data at a rate of N/M, and replaces symbols representing the know data place holders with known data symbols.

    摘要翻译: 数字电视发射机包括预处理器扩展原始增强数据,数据格式化器生成包括扩展增强数据的增强数据分组并将已知数据占位符插入到数据分组中,多路复用多路复用增强数据分组与主数据分组,包括主数据 以及RS编码器,将系统RS奇偶校验数据添加到每个主数据分组,并将非系统RS奇偶校验数据保持器添加到每个增强数据分组。 它还包括交织RS编码的数据分组的数据交织器,产生知识数据符号的已知数据生成器,将交织的数据分组转换为符号的转换器,以及处理转换的符号的符号处理器。 符号处理器去除表示空数据的符号,以N / M的速率对表示原始增强数据的符号进行编码,并用已知数据符号代替表示知识数据占位符的符号。