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公开(公告)号：US08964167B2
公开(公告)日：2015-02-24
申请号：US13512477
申请日：2010-10-28
申请人： Jeong Woo Jeon , Hyeon Seok Oh , Mitica Caraiani , Sung Il Chung , Hyeon Taeg Kim , Chang Rin Lee , Jong Moon Kim
发明人： Jeong Woo Jeon , Hyeon Seok Oh , Mitica Caraiani , Sung Il Chung , Hyeon Taeg Kim , Chang Rin Lee , Jong Moon Kim
CPC分类号： G03F7/70716 , G03F7/24 , G03F7/703 , G03F7/70725 , G03F7/70758 , G03F7/70791 , G03F7/70816 , G03F7/70825 , G03F7/70841 , H01L21/68
摘要： The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time. Moreover, the present invention provides an exposure apparatus, which includes a differential vacuum means combined with the cylindrical magnetic levitation stage to create a partial vacuum environment between the light source and the surface of the cylinder, and thus it is possible to employ light sources such as X-rays, electron beams, extreme ultraviolet (EUV) rays, etc.
摘要翻译： 本发明提供一种圆柱形磁悬浮台和曝光装置，其可以直接在大圆柱体的表面上形成大面积的纳米级图案。 本发明提供了一种曝光装置，其包括一种新型的圆柱形磁悬浮台，其可以通过非接触方式的磁悬浮原理沿轴向悬浮，旋转和移动圆柱体，并在其上形成纳米尺度图案 圆柱体的表面，以及用于在圆筒表面上照射光的光源，从而将圆柱形磁悬浮台的位置误差降低到纳米尺寸，并且实时校正由机械加工引起的误差。 此外，本发明提供了一种曝光装置，其包括与圆柱形磁悬浮台结合的差分真空装置，以在光源和圆柱体的表面之间产生局部真空环境，因此可以采用光源 作为X射线，电子束，极紫外（EUV）射线等
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公开(公告)号：US20130120732A1
公开(公告)日：2013-05-16
申请号：US13512477
申请日：2010-10-28
申请人： Jeong Woo Jeon , Hyeon Seok Oh , Mitica Caraiani , Sung Il Chung , Hyeon Taeg Kim , Chang Rin Lee , Jong Moon Kim
发明人： Jeong Woo Jeon , Hyeon Seok Oh , Mitica Caraiani , Sung Il Chung , Hyeon Taeg Kim , Chang Rin Lee , Jong Moon Kim
CPC分类号： G03F7/70716 , G03F7/24 , G03F7/703 , G03F7/70725 , G03F7/70758 , G03F7/70791 , G03F7/70816 , G03F7/70825 , G03F7/70841 , H01L21/68
摘要： The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time. Moreover, the present invention provides an exposure apparatus, which includes a differential vacuum means combined with the cylindrical magnetic levitation stage to create a partial vacuum environment between the light source and the surface of the cylinder, and thus it is possible to employ light sources such as X-rays, electron beams, extreme ultraviolet (EUV) rays, etc.
摘要翻译： 本发明提供一种圆柱形磁悬浮台和曝光装置，其可以直接在大圆柱体的表面上形成大面积的纳米级图案。 本发明提供了一种曝光装置，其包括一种新型的圆柱形磁悬浮台，其可以通过非接触方式的磁悬浮原理沿轴向悬浮，旋转和移动圆柱体，并在其上形成纳米尺度图案 圆柱体的表面，以及用于在圆筒表面上照射光的光源，从而将圆柱形磁悬浮台的位置误差降低到纳米尺寸，并且实时校正由机械加工引起的误差。 此外，本发明提供了一种曝光装置，其包括与圆柱形磁悬浮台结合的差分真空装置，以在光源和圆柱体的表面之间产生局部真空环境，因此可以采用光源 作为X射线，电子束，极紫外（EUV）射线等
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公开(公告)号：US08354908B2
公开(公告)日：2013-01-15
申请号：US13001752
申请日：2008-09-29
申请人： Jeong Woo Jeon , Hyun Seok Oh , Sung Il Chung , Yeon Ho Jeong , Do Hyun Kang , S. A. Nikiforov , Mitica Caraiani
发明人： Jeong Woo Jeon , Hyun Seok Oh , Sung Il Chung , Yeon Ho Jeong , Do Hyun Kang , S. A. Nikiforov , Mitica Caraiani
IPC分类号： H01F7/00
CPC分类号： G03F7/70825 , G03F7/24 , G03F7/703 , G03F7/707 , G03F7/70725 , G03F7/70791 , G03F7/70816 , G03F7/70841 , G03F7/70858 , H02K7/09 , H02K16/00 , H02K21/12 , H02K41/031 , H02K2201/15 , H02K2201/18 , H02N15/00
摘要： The present invention provides a cylindrical magnetic levitation stage which includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on a large-area semiconductor substrate or display panel substrate, a cylindrical substrate, a combination of a first permanent magnet array and a first coil array and a combination of a first permanent magnet array and a first coil array, which are coupled to the cylindrical substrate, so that levitation, axial translation and rotation of the cylindrical substrate can be made finely through the control of a magnetic force generated by the interaction between a magnetic field generated by electric current applied to the coil arrays and a magnetic field generated from the permanent magnet arrays corresponding to the coil arrays.
摘要翻译： 本发明提供一种圆柱形磁悬浮台，其包括用于在大面积半导体基板或显示面板基板上形成各种任意形状的微图形的圆柱形基板，圆柱形基板，第一永久磁铁阵列和 第一线圈阵列和第一永磁体阵列和第一线圈阵列的组合，其耦合到圆柱形基板，从而可以通过控制产生的磁力来使得圆柱形基板的悬浮，轴向平移和旋转精细化 通过由施加到线圈阵列的电流产生的磁场与对应于线圈阵列的永磁体阵列产生的磁场之间的相互作用。
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公开(公告)号：US20110234343A1
公开(公告)日：2011-09-29
申请号：US13001752
申请日：2008-09-29
申请人： Jeong Woo Jeon , Hyun Seok Oh , Sung II Chung , Yeon Ho Jeong , Do Hyun Kang , S.A. Nikiforov , Mitica Caraiani
发明人： Jeong Woo Jeon , Hyun Seok Oh , Sung II Chung , Yeon Ho Jeong , Do Hyun Kang , S.A. Nikiforov , Mitica Caraiani
IPC分类号： H01F7/20
CPC分类号： G03F7/70825 , G03F7/24 , G03F7/703 , G03F7/707 , G03F7/70725 , G03F7/70791 , G03F7/70816 , G03F7/70841 , G03F7/70858 , H02K7/09 , H02K16/00 , H02K21/12 , H02K41/031 , H02K2201/15 , H02K2201/18 , H02N15/00
摘要： The present invention provides a cylindrical magnetic levitation stage which includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on a large-area semiconductor substrate or display panel substrate, a cylindrical substrate, a combination of a first permanent magnet array and a first coil array and a combination of a first permanent magnet array and a first coil array, which are coupled to the cylindrical substrate, so that levitation, axial translation and rotation of the cylindrical substrate can be made finely through the control of a magnetic force generated by the interaction between a magnetic field generated by electric current applied to the coil arrays and a magnetic field generated from the permanent magnet arrays corresponding to the coil arrays.
摘要翻译： 本发明提供一种圆柱形磁悬浮台，其包括用于在大面积半导体基板或显示面板基板上形成各种任意形状的微图形的圆柱形基板，圆柱形基板，第一永久磁铁阵列和 第一线圈阵列和第一永磁体阵列和第一线圈阵列的组合，其耦合到圆柱形基板，从而可以通过控制产生的磁力来使得圆柱形基板的悬浮，轴向平移和旋转精细化 通过由施加到线圈阵列的电流产生的磁场与对应于线圈阵列的永磁体阵列产生的磁场之间的相互作用。
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