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公开(公告)号：US06764605B2
公开(公告)日：2004-07-20
申请号：US10061923
申请日：2002-01-31
申请人： Jeremy Donaldson , Naoto A. Kawamura , Daniel A. Kearl , Donald J. Milligan , J. Daniel Smith , Martha A. Truninger , Diane Lai , Norman L. Johnson , William Edwards , Sadiq Bengali , Timothy R. Emery
发明人： Jeremy Donaldson , Naoto A. Kawamura , Daniel A. Kearl , Donald J. Milligan , J. Daniel Smith , Martha A. Truninger , Diane Lai , Norman L. Johnson , William Edwards , Sadiq Bengali , Timothy R. Emery
IPC分类号： C03C1500
CPC分类号： B41J2/17513 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642
摘要： In one embodiment, a fluid ejection device comprises a substrate having a fluid slot defined from a first surface through to a second opposite surface; an ejection element formed over the first surface and that ejects fluid therefrom; and a filter having feed holes positioned over the fluid slot near the first surface. Fluid moves from the second surface through the feed holes to the ejection element. In a particular embodiment, the filter is formed of a first material that is surrounded by a second material. In another particular embodiment, the filter is formed from the back side and is formed of the same material as the substrate.
摘要翻译： 在一个实施例中，流体喷射装置包括具有从第一表面到第二相对表面限定的流体槽的基板; 形成在所述第一表面上并从其喷出流体的喷射元件; 以及具有位于第一表面附近的流体槽上方的进料孔的过滤器。 流体从第二表面通过进料孔移动到喷射元件。 在特定实施例中，过滤器由被第二材料包围的第一材料形成。 在另一特定实施例中，过滤器由背面形成并且由与基底相同的材料形成。
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公开(公告)号：US07238293B2
公开(公告)日：2007-07-03
申请号：US10601148
申请日：2003-06-20
IPC分类号： B41J2/16
CPC分类号： B41J2/1628 , B41J2/14145 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/19
摘要： The described embodiments relate to a slotted substrate and methods of forming same. One exemplary method patterns a hardmask on a first substrate surface sufficient to expose a first area of the first surface and forms a slot portion in the substrate through less than an entirety of the first area of the first surface. The slot portion has a cross-sectional area at the first surface that is less than a cross-sectional area of the first area. After forming the slot portion, the method etches the substrate to remove material from within the first area to form a fluid-handling slot.
摘要翻译： 所描述的实施例涉及开槽衬底及其形成方法。 一种示例性方法在第一衬底表面上形成足以暴露第一表面的第一区域的硬掩模，并且通过少于第一表面的第一区域的整体在衬底中形成狭缝部分。 狭槽部分在第一表面处具有小于第一区域的横截面面积的横截面积。 在形成狭缝部分之后，该方法蚀刻基板以从第一区域内移除材料以形成流体处理槽。
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公开(公告)号：US06648454B1
公开(公告)日：2003-11-18
申请号：US10283767
申请日：2002-10-30
IPC分类号： B41J205
CPC分类号： B41J2/1628 , B41J2/14145 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/19
摘要： The described embodiments relate to a slotted substrate and methods of forming same. One exemplary method patterns a hardmask on a first substrate surface sufficient to expose a first area of the first surface and forms a slot portion in the substrate through less than an entirety of the first area of the first surface. The slot portion has a cross-sectional area at the first surface that is less than a cross-sectional area of the first area. After forming the slot portion, the method etches the substrate to remove material from within the first area to form a fluid-handling
摘要翻译： 所描述的实施例涉及开槽衬底及其形成方法。 一种示例性方法在第一衬底表面上形成足以暴露第一表面的第一区域的硬掩模，并且通过少于第一表面的第一区域的整体在衬底中形成狭缝部分。 狭槽部分在第一表面处具有小于第一区域的横截面面积的横截面积。 在形成狭缝部分之后，该方法蚀刻基底以从第一区域内移除材料以形成流体处理
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公开(公告)号：US20070095129A1
公开(公告)日：2007-05-03
申请号：US11264652
申请日：2005-10-31
申请人： Jeremy Donaldson , Manish Giri , Joshua Yu , Sriram Ramamoorthi , Mark Taylor , Mark Johnson
发明人： Jeremy Donaldson , Manish Giri , Joshua Yu , Sriram Ramamoorthi , Mark Taylor , Mark Johnson
IPC分类号： G01N11/00
CPC分类号： G01N11/16 , G01N3/32 , G01N2203/0023 , G01N2203/0286 , G01N2203/0623
摘要： A system for sensing a property of a fluid comprises a fluid channel operable to receive the fluid therein, a flexible arm having a free end positioned within at least a portion of the fluid channel, a fluid actuator disposed sufficiently close to the flexible arm such that actuation of the fluid actuator induces movement of the flexible arm when the fluid is present, and a deflection sensing system operable to quantifiably detect movement of the flexible arm.
摘要翻译： 用于感测流体性质的系统包括可操作以在其中接收流体的流体通道，具有定位在流体通道的至少一部分内的自由端的柔性臂，设置成足够靠近柔性臂的流体致动器，使得 当存在流体时，流体致动器的致动器引起柔性臂的运动，以及可操作以可量化地检测柔性臂的运动的偏转感测系统。
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公开(公告)号：US07695104B2
公开(公告)日：2010-04-13
申请号：US11410358
申请日：2006-04-25
IPC分类号： B41J2/135
CPC分类号： B41J2/1631 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1634
摘要： Methods and systems for forming compound slots in a substrate are described. In one exemplary implementation, a structure contains a plurality of slots in a substrate. The structure also has a trench in the substrate contiguous with the plurality of slots to form a compound slot.
摘要翻译： 描述了在衬底中形成复合槽的方法和系统。 在一个示例性实施例中，结构在衬底中包含多个槽。 该结构还在衬底中具有与多个槽相邻的沟槽，以形成复合槽。
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公开(公告)号：US20080085476A1
公开(公告)日：2008-04-10
申请号：US11949509
申请日：2007-12-03
申请人： Thomas Strand , Manish Giri , Jeremy Donaldson , William Keese , Mohammed Shaarawi , Randall Willard
发明人： Thomas Strand , Manish Giri , Jeremy Donaldson , William Keese , Mohammed Shaarawi , Randall Willard
CPC分类号： B41J2/1631 , B41J2/1603 , B41J2/1606 , B41J2/1628 , B41J2/1629 , B41J2/1645 , Y10T29/49401
摘要： Methods of manufacturing a fluid ejection device comprise, in one embodiment, forming filler structures on a substrate and laminating a dry film onto the substrate over the filler structures. The dry film defines a barrier layer around the filler structures and an orifice layer above the filler structures. The filler structures are removed to form voids within the barrier layer.
摘要翻译： 制造流体喷射装置的方法在一个实施方案中包括在基材上形成填料结构并且在填料结构上将干膜层压到基材上。 干膜限定了围绕填料结构的阻挡层和在填料结构之上的孔层。 去除填料结构以在阻挡层内形成空隙。
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公开(公告)号：US20060172227A1
公开(公告)日：2006-08-03
申请号：US11047454
申请日：2005-01-31
IPC分类号： G03C1/76
CPC分类号： G03F7/26 , B41J2/1433 , B41J2/162 , B41J2/1626 , B41J2/1631 , B81B2203/0353 , B81B2203/0384 , B81C1/00103 , G03F7/2022 , G03F7/38
摘要： A method of forming a tapered bore an orifice layer of a photo-resist comprises forming a lens in a surface of a first unexposed portion of the layer and exposing the first unexposed portion through a bore-hole mask to define an exposed portion and a second unexposed portion, wherein the second unexposed portion has a tapered shape. The layer is baked to cross-link the exposed portion and developed to remove the second unexposed portion to form a tapered bore hole. The tapered bore hole has a shape corresponding to the tapered shape.
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公开(公告)号：US07198726B2
公开(公告)日：2007-04-03
申请号：US10643290
申请日：2003-08-19
IPC分类号： B41J2/16
CPC分类号： B41J2/1631 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1634
摘要： Methods and systems for forming compound slots in a substrate are described. In one exemplary implementation, a method forms a plurality of slots in a substrate. The method also etches a trench in the substrate contiguous with the plurality of slots to form a compound slot.
摘要翻译： 描述了在衬底中形成复合槽的方法和系统。 在一个示例性实施方式中，一种方法在衬底中形成多个槽。 该方法还蚀刻与多个狭缝相邻的衬底中的沟槽，以形成复合槽。
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公开(公告)号：US06672712B1
公开(公告)日：2004-01-06
申请号：US10284867
申请日：2002-10-31
IPC分类号： B41J205
CPC分类号： B41J2/1631 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1634
摘要： Methods and systems for forming compound slots in a substrate are described. In one exemplary implementation, a method forms a plurality of slots in a substrate. The method also etches a trench in the substrate contiguous with the plurality of slots to form a compound slot.
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10.发明授权Method of manufacturing fluid ejection device with dry-film photo-resist layer 有权使用干膜光刻胶层制造流体喷射装置的方法公开(公告)号：US07979987B2
公开(公告)日：2011-07-19
申请号：US11949509
申请日：2007-12-03
申请人： Thomas R. Strand , Manish Giri , Jeremy Donaldson , William A. Keese , Mohammed Shaarawi , Randall Orson Willard
发明人： Thomas R. Strand , Manish Giri , Jeremy Donaldson , William A. Keese , Mohammed Shaarawi , Randall Orson Willard
IPC分类号： B41J2/145
CPC分类号： B41J2/1631 , B41J2/1603 , B41J2/1606 , B41J2/1628 , B41J2/1629 , B41J2/1645 , Y10T29/49401
摘要： A method of manufacturing a fluid ejection device includes providing a barrier layer and an orifice layer on a substrate, laminating a layer of photo-resist over a substantially planar surface of the orifice layer, forming an orifice in the orifice layer, and forming a counterbore in the layer of photo-resist, with forming a counterbore in the layer of photo-resist including exposing a portion of the substantially planar surface of the orifice layer within the counterbore.
摘要翻译： 制造流体喷射装置的方法包括在基底上设置阻挡层和孔口层，在孔层的基本上平坦的表面上层叠光致抗蚀剂层，在孔层中形成孔口，并形成沉孔 在光致抗蚀剂层中，在光致抗蚀剂层中形成沉孔，包括暴露在沉孔内的孔层的基本上平坦的表面的一部分。
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