Plasma processing apparatus and control method thereof
    5.
    发明申请
    Plasma processing apparatus and control method thereof 审中-公开
    等离子体处理装置及其控制方法

    公开(公告)号:US20060061287A1

    公开(公告)日:2006-03-23

    申请号:US11076922

    申请日:2005-03-11

    IPC分类号: H01J7/24

    摘要: A plasma processing apparatus effectively generates plasma in a large area by applying an external magnetic field generated by an electromagnet to the plasma in a direction which is not in parallel with a wall of a plasma container, such that the magnetic field diverge or converge in the vicinity of a work piece (for example, a wafer). The plasma processing apparatus includes a power supply to generate a high frequency power, an antenna to receive the high frequency power and to generate an electromagnetic field, a chamber to generate the plasma using power generated through the electromagnetic field, and a coil provided on a side wall of the chamber to disrupt a uniformity of the electromagnetic field within the chamber.

    摘要翻译: 等离子体处理装置通过在与等离子体容器的壁不平行的方向上将由电磁体产生的外部磁场施加到等离子体而大面积地产生等离子体,使得磁场在等离子体容器中发散或会聚 工件附近(例如,晶片)。 等离子体处理装置包括用于产生高频电力的电源,接收高频电力并产生电磁场的天线,使用通过电磁场产生的电力产生等离子体的室,以及设置在电磁场上的线圈 该室的侧壁破坏室内的电磁场的均匀性。

    Liquid crystal display device
    6.
    发明申请
    Liquid crystal display device 有权
    液晶显示装置

    公开(公告)号:US20050285986A1

    公开(公告)日:2005-12-29

    申请号:US11159207

    申请日:2005-06-23

    IPC分类号: G02F1/136 G02F1/1362

    CPC分类号: G02F1/136286 G02F2203/60

    摘要: A liquid crystal display device is disclosed. The disclosed device includes a first substrate including a plurality of gate and data lines defining a plurality of pixel regions, heating conductive lines having first conductive lines formed substantially in parallel with the gate lines and second conductive lines formed substantially in parallel with the data lines, thin film transistors (TFT) connected to the corresponding gate lines and data lines, and pixel electrodes connected to the corresponding TFTs. The disclosed device also includes a second substrate including a plurality of color filters formed corresponding to the pixel regions, and a liquid crystal layer between the first substrate and the second substrate. At least one of the second conductive lines is separated from at least one of the first conductive lines.

    摘要翻译: 公开了一种液晶显示装置。 所公开的装置包括:第一衬底,包括限定多个像素区域的多个栅极和数据线;加热导电线,其具有基本上与栅极线平行形成的第一导电线和与数据线基本上平行形成的第二导线; 连接到相应的栅极线和数据线的薄膜晶体管(TFT)以及连接到相应的TFT的像素电极。 所公开的装置还包括包括对应于像素区域形成的多个滤色器的第二基板和在第一基板和第二基板之间的液晶层。 第二导线中的至少一个与第一导线中的至少一个分离。