公开(公告)号：US20070128839A1

公开(公告)日：2007-06-07

申请号：US11607516

申请日：2006-12-01

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

IPC分类号： H01L21/20 ,  H01L21/36 ,  H01L31/20

CPC分类号： H01S5/12 ,  B82Y20/00 ,  H01S5/3412 ,  H01S5/34306 ,  H01S2301/173

摘要： Provided are a quantum dot laser diode and a method of manufacturing the same. The method of manufacturing a quantum dot laser diode includes the steps of: forming a grating structure layer including a plurality of gratings on a substrate; forming a first lattice-matched layer on the grating structure layer; forming at least one quantum dot layer having at least one quantum dot on the first lattice-matched layer; forming a second lattice-matched layer on the quantum dot layer; forming a cladding layer on the second lattice-matched layer; and forming an ohmic contact layer on the cladding layer. Consequently, it is possible to obtain high gain at a desired wavelength without affecting the uniformity of quantum dots, so that the characteristics of a laser diode can be improved.

摘要翻译： 提供量子点激光二极管及其制造方法。 制造量子点激光二极管的方法包括以下步骤：在衬底上形成包括多个光栅的光栅结构层; 在所述光栅结构层上形成第一晶格匹配层; 在所述第一晶格匹配层上形成至少一个具有至少一个量子点的量子点层; 在量子点层上形成第二晶格匹配层; 在第二晶格匹配层上形成包覆层; 以及在所述包覆层上形成欧姆接触层。 因此，可以在不影响量子点的均匀性的情况下获得期望波长的高增益，从而可以提高激光二极管的特性。

公开(公告)号：US20100260223A1

公开(公告)日：2010-10-14

申请号：US11633201

申请日：2006-12-04

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

IPC分类号： H01S5/343 ,  H01L33/02

CPC分类号： H01S5/341 ,  B82Y20/00 ,  H01S5/3403 ,  H01S5/3412 ,  H01S5/34306 ,  H01S2304/00

摘要： A quantum dot laser diode and a method of fabricating the same are provided. The quantum dot laser diode includes: a first clad layer formed on an InP substrate; a first lattice-matched layer formed on the first clad layer; an active layer formed on the first lattice-matched layer, and including at least one quantum dot layer formed of an InAlAs quantum dot or an InGaPAs quantum dot which is grown by an alternate growth method; a second lattice-matched layer formed on the active layer; a second clad layer formed on the second lattice-matched layer, and an ohmic contact layer formed on the second clad layer.

摘要翻译： 提供了一种量子点激光二极管及其制造方法。 量子点激光二极管包括：形成在InP衬底上的第一覆层; 形成在第一覆盖层上的第一晶格匹配层; 形成在第一晶格匹配层上的活性层，并且包括由交替生长法生长的InAlAs量子点或InGaPAs量子点形成的至少一个量子点层; 形成在所述有源层上的第二晶格匹配层; 形成在第二晶格匹配层上的第二覆盖层和形成在第二覆盖层上的欧姆接触层。

公开(公告)号：US07749787B2

公开(公告)日：2010-07-06

申请号：US11272617

申请日：2005-11-14

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Byung Seok Choi ,  Ho Sang Kwack ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Byung Seok Choi ,  Ho Sang Kwack ,  Dae Kon Oh

IPC分类号： H01L21/00

CPC分类号： H01S5/341 ,  B82Y10/00 ,  B82Y20/00 ,  H01L21/02392 ,  H01L21/02461 ,  H01L21/02463 ,  H01L21/02507 ,  H01L21/02543 ,  H01L21/02546 ,  H01S5/3403 ,  H01S5/3412 ,  H01S5/34306 ,  Y10S438/962

摘要： Provided is a method of forming quantum dots, including: forming a buffer layer on an InP substrate so as to be lattice-matched with the InP substrate; and sequentially alternately depositing In(Ga)As layers and InAl(Ga)As or In(Ga, Al, As)P layers that are greatly lattice-mismatched with each other on the buffer layer so as to form In(Ga, Al)As or In(Ga, Al, P)As quantum dots.

摘要翻译： 提供一种形成量子点的方法，包括：在InP衬底上形成缓冲层以与InP衬底晶格匹配; 并顺序交替地沉积In（Ga）As层和InAl（Ga）As或In（Ga，Al，As）P层，在缓冲层上彼此大大地晶格失配，以形成In（Ga，Al） As或In（Ga，Al，P）作为量子点。

公开(公告)号：US20090296766A1

公开(公告)日：2009-12-03

申请号：US12499902

申请日：2009-07-09

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

IPC分类号： H01S5/00

CPC分类号： H01S5/12 ,  B82Y20/00 ,  H01S5/3412 ,  H01S5/34306 ,  H01S2301/173

摘要： Provided are a quantum dot laser diode and a method of manufacturing the same. The method of manufacturing a quantum dot laser diode includes the steps of: forming a grating structure layer including a plurality of gratings on a substrate; forming a first lattice-matched layer on the grating structure layer; forming at least one quantum dot layer having at least one quantum dot on the first lattice-matched layer; forming a second lattice-matched layer on the quantum dot layer; forming a cladding layer on the second lattice-matched layer; and forming an ohmic contact layer on the cladding layer. Consequently, it is possible to obtain high gain at a desired wavelength without affecting the uniformity of quantum dots, so that the characteristics of a laser diode can be improved.

摘要翻译： 提供量子点激光二极管及其制造方法。 制造量子点激光二极管的方法包括以下步骤：在衬底上形成包括多个光栅的光栅结构层; 在所述光栅结构层上形成第一晶格匹配层; 在所述第一晶格匹配层上形成至少一个具有至少一个量子点的量子点层; 在量子点层上形成第二晶格匹配层; 在第二晶格匹配层上形成包覆层; 以及在所述包覆层上形成欧姆接触层。 因此，可以在不影响量子点的均匀性的情况下获得期望波长的高增益，从而可以提高激光二极管的特性。

公开(公告)号：US09006749B2

公开(公告)日：2015-04-14

申请号：US12499902

申请日：2009-07-09

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

IPC分类号： H01L27/15 ,  H01S5/12 ,  B82Y20/00 ,  H01S5/34 ,  H01S5/343

CPC分类号： H01S5/12 ,  B82Y20/00 ,  H01S5/3412 ,  H01S5/34306 ,  H01S2301/173

摘要： Provided are a quantum dot laser diode and a method of manufacturing the same. The method of manufacturing a quantum dot laser diode includes the steps of: forming a grating structure layer including a plurality of gratings on a substrate; forming a first lattice-matched layer on the grating structure layer; forming at least one quantum dot layer having at least one quantum dot on the first lattice-matched layer; forming a second lattice-matched layer on the quantum dot layer; forming a cladding layer on the second lattice-matched layer; and forming an ohmic contact layer on the cladding layer. Consequently, it is possible to obtain high gain at a desired wavelength without affecting the uniformity of quantum dots, so that the characteristics of a laser diode can be improved.

公开(公告)号：US07575943B2

公开(公告)日：2009-08-18

申请号：US11607516

申请日：2006-12-01

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Ho Sang Kwack ,  Byung Seok Choi ,  Dae Kon Oh

IPC分类号： H01L21/00

CPC分类号： H01S5/12 ,  B82Y20/00 ,  H01S5/3412 ,  H01S5/34306 ,  H01S2301/173

摘要： Provided are a quantum dot laser diode and a method of manufacturing the same. The method of manufacturing a quantum dot laser diode includes the steps of: forming a grating structure layer including a plurality of gratings on a substrate; forming a first lattice-matched layer on the grating structure layer; forming at least one quantum dot layer having at least one quantum dot on the first lattice-matched layer; forming a second lattice-matched layer on the quantum dot layer; forming a cladding layer on the second lattice-matched layer; and forming an ohmic contact layer on the cladding layer. Consequently, it is possible to obtain high gain at a desired wavelength without affecting the uniformity of quantum dots, so that the characteristics of a laser diode can be improved.

摘要翻译： 提供量子点激光二极管及其制造方法。 制造量子点激光二极管的方法包括以下步骤：在衬底上形成包括多个光栅的光栅结构层; 在所述光栅结构层上形成第一晶格匹配层; 在所述第一晶格匹配层上形成至少一个具有至少一个量子点的量子点层; 在量子点层上形成第二晶格匹配层; 在第二晶格匹配层上形成包覆层; 以及在所述包覆层上形成欧姆接触层。 因此，可以在不影响量子点的均匀性的情况下获得期望波长的高增益，从而可以提高激光二极管的特性。

公开(公告)号：US20060222027A1

公开(公告)日：2006-10-05

申请号：US11272617

申请日：2005-11-14

申请人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Byung Seok Choi ,  Ho Sang Kwack ,  Dae Kon Oh

发明人： Jin Soo Kim ,  Jin Hong Lee ,  Sung Ui Hong ,  Byung Seok Choi ,  Ho Sang Kwack ,  Dae Kon Oh

IPC分类号： H01S5/00

CPC分类号： H01S5/341 ,  B82Y10/00 ,  B82Y20/00 ,  H01L21/02392 ,  H01L21/02461 ,  H01L21/02463 ,  H01L21/02507 ,  H01L21/02543 ,  H01L21/02546 ,  H01S5/3403 ,  H01S5/3412 ,  H01S5/34306 ,  Y10S438/962

摘要： Provided is a method of forming quantum dots, including: forming a buffer layer on an InP substrate so as to be lattice-matched with the InP substrate; and sequentially alternately depositing In(Ga)As layers and InAl(Ga)As or In(Ga, Al, As)P layers that are greatly lattice-mismatched with each other on the buffer layer so as to form In(Ga, Al)As or In(Ga, Al, P)As quantum dots.

摘要翻译： 提供一种形成量子点的方法，包括：在InP衬底上形成缓冲层以与InP衬底晶格匹配; 并顺序交替地沉积In（Ga）As层和InAl（Ga）As或In（Ga，Al，As）P层，在缓冲层上彼此大大地晶格失配，以形成In（Ga，Al） As或In（Ga，Al，P）作为量子点。

公开(公告)号：USRE45071E1

公开(公告)日：2014-08-12

申请号：US13070906

申请日：2011-03-24

申请人： Sung Ui Hong ,  Jin Hong Lee ,  Jin Soo Kim ,  Ho Sang Kwack ,  Dae Kon Oh

发明人： Sung Ui Hong ,  Jin Hong Lee ,  Jin Soo Kim ,  Ho Sang Kwack ,  Dae Kon Oh

IPC分类号： H01S5/22

CPC分类号： B82Y10/00 ,  B82Y20/00

摘要： Provided are a semiconductor laser diode and a method of manufacturing the same. The semiconductor laser diode includes a lower cladding layer disposed on a substrate; a ridge including an optical waveguide layer, an active layer, an upper cladding layer, and an ohmic contact layer, which are sequentially stacked on the lower cladding layer, and having a predetermined width, which is obtained by performing a channel etching process on both sides of the ridge; an oxide layer disposed on surfaces of the upper and lower cladding layer to control the width of the ridge; a dielectric layer disposed on left and right channels of the ridge; an upper electrode layer disposed on the entire surface of the resultant structure to enclose the ridge and the dielectric layer; and a lower electrode layer disposed on a bottom surface of the substrate. The method is simpler than a conventional process of manufacturing a semiconductor laser diode. Also, by controlling a wet oxidation time, the width of a ridge can be freely controlled and an ohmic contact layer can be automatically formed.

摘要翻译： 提供半导体激光二极管及其制造方法。 半导体激光二极管包括设置在基板上的下包层; 包括光波导层，有源层，上覆层和欧姆接触层的脊，其顺序地层叠在下包层上，并且具有预定的宽度，其通过对两者进行沟道蚀刻处理而获得 山脊边; 设置在所述上​​下包层的表面上以控制所述脊的宽度的氧化物层; 布置在所述脊的左通道和右通道上的电介质层; 设置在所得结构的整个表面上以包围脊和电介质层的上电极层; 以及设置在所述基板的底面上的下电极层。 该方法比制造半导体激光二极管的常规方法简单。 此外，通过控制湿式氧化时间，可以自由地控制脊的宽度，并且可以自动形成欧姆接触层。

公开(公告)号：US07606284B2

公开(公告)日：2009-10-20

申请号：US11595470

申请日：2006-11-09

申请人： Dae Kon Oh ,  Jin Hong Lee ,  Jin Soo Kim ,  Sung Ui Hong ,  Ho Sang Kwack

发明人： Dae Kon Oh ,  Jin Hong Lee ,  Jin Soo Kim ,  Sung Ui Hong ,  Ho Sang Kwack

IPC分类号： H01S3/08

CPC分类号： H01S5/12 ,  H01S5/1231 ,  H01S5/1243 ,  H01S5/22

摘要： Provided is a distributed feedback semiconductor laser structure including: a first clad layer; a first ridge waveguide formed on the first clad layer; an active layer formed on the first ridge waveguide; a second ridge waveguide formed on the active layer; a second clad layer formed on the second ridge waveguide; an ohmic contact layer formed on the second clad layer; and a plurality of gratings formed in at least one of the first and second clad layers, making a predetermined angle with the first ridge waveguide or the second ridge waveguide, and periodically arranged in a longitudinal direction of the first or second ridge waveguide. As a result, a general hologram lithography process capable of mass production is applied to the present invention so that process time can be reduced. Also, a distributed feedback semiconductor laser structure using a quantum-dot active layer that does not require an additional process for obtaining a pure single-wavelength is provided.

摘要翻译： 提供一种分布式反馈半导体激光器结构，包括：第一覆层; 形成在第一覆盖层上的第一脊状波导; 形成在第一脊波导上的有源层; 形成在有源层上的第二脊状波导; 形成在第二脊波导上的第二覆层; 形成在所述第二覆盖层上的欧姆接触层; 以及形成在所述第一和第二包层中的至少一个中的多个光栅，与所述第一脊波导或所述第二脊波导成预定的角度，并且沿所述第一或第二脊波导的纵向方向周期性地布置。 结果，能够大量生产的一般的全息图光刻工艺被应用于本发明，从而可以减少处理时间。 此外，提供了使用量子点有源层的分布式反馈半导体激光器结构，其不需要用于获得纯单波长的附加工艺。

公开(公告)号：US20070133639A1

公开(公告)日：2007-06-14

申请号：US11595470

申请日：2006-11-09

申请人： Dae Kon Oh ,  Jin Hong Lee ,  Jin Soo Kim ,  Sung Ui Hong ,  Ho Sang Kwack

发明人： Dae Kon Oh ,  Jin Hong Lee ,  Jin Soo Kim ,  Sung Ui Hong ,  Ho Sang Kwack

IPC分类号： H01S5/00

CPC分类号： H01S5/12 ,  H01S5/1231 ,  H01S5/1243 ,  H01S5/22

摘要： Provided is a distributed feedback semiconductor laser structure including: a first clad layer; a first ridge waveguide formed on the first clad layer; an active layer formed on the first ridge waveguide; a second ridge waveguide formed on the active layer; a second clad layer formed on the second ridge waveguide; an ohmic contact layer formed on the second clad layer; and a plurality of gratings formed in at least one of the first and second clad layers, making a predetermined angle with the first ridge waveguide or the second ridge waveguide, and periodically arranged in a longitudinal direction of the first or second ridge waveguide. As a result, a general hologram lithography process capable of mass production is applied to the present invention so that process time can be reduced. Also, a distributed feedback semiconductor laser structure using a quantum-dot active layer that does not require an additional process for obtaining a pure single-wavelength is provided.

摘要翻译： 提供一种分布式反馈半导体激光器结构，包括：第一覆层; 形成在第一覆盖层上的第一脊状波导; 形成在第一脊波导上的有源层; 形成在有源层上的第二脊形波导; 形成在第二脊波导上的第二覆层; 形成在所述第二覆盖层上的欧姆接触层; 以及形成在所述第一和第二包层中的至少一个中的多个光栅，与所述第一脊波导或所述第二脊波导成预定的角度，并且沿所述第一或第二脊波导的纵向方向周期性地布置。 结果，能够大量生产的一般的全息图光刻工艺被应用于本发明，从而可以减少处理时间。 此外，提供了使用量子点有源层的分布式反馈半导体激光器结构，其不需要用于获得纯单波长的附加工艺。