Method for Manufacturing a Device on a Substrate
    3.
    发明申请
    Method for Manufacturing a Device on a Substrate 有权
    在基板上制造器件的方法

    公开(公告)号:US20100252526A1

    公开(公告)日:2010-10-07

    申请号:US12417100

    申请日:2009-04-02

    IPC分类号: C23F1/00

    CPC分类号: H01L41/297 H03H3/04

    摘要: A method for manufacturing a device on a substrate includes forming a layer structure on the substrate, forming an auxiliary layer on the layer structure, forming a planarization layer on the auxiliary layer and on the substrate, exposing the auxiliary layer by a chemical mechanical polishing process and removing at least partly the auxiliary layer to form a planar surface of the remaining auxiliary layer or of the layer structure and the planarization layer. The chemical mechanical polishing process has a first removal rate with respect to the planarization layer and a second removal rate with respect to the auxiliary layer and the first removal rate is greater than the second removal rate.

    摘要翻译: 在衬底上制造器件的方法包括在衬底上形成层结构,在层结构上形成辅助层,在辅助层和衬底上形成平坦化层,通过化学机械抛光工艺使辅助层露出 以及至少部分去除所述辅助层以形成剩余辅助层或所述层结构和所述平坦化层的平坦表面。 化学机械抛光工艺相对于平坦化层具有第一去除速率,相对于辅助层具有第二去除速率,并且第一去除速率大于第二去除速率。

    Open-cell expanded ceramic with a high level of strength, and process for the production thereof
    7.
    发明授权
    Open-cell expanded ceramic with a high level of strength, and process for the production thereof 有权
    具有高水平强度的开孔膨胀陶瓷及其生产方法

    公开(公告)号:US06635339B1

    公开(公告)日:2003-10-21

    申请号:US09194697

    申请日:1999-05-24

    IPC分类号: B32B514

    摘要: The disclosed invention relates to the field of ceramics and concerns an open-cell expanded ceramic which may be used in the form of a deep-bed filter, and a process for the production thereof. The primary object is to produce an open-cell expanded ceramic by a simple and economical process. This object is attained by an open-cell expanded ceramic in which the inner cavities, cracks and the porosity of the ceramic members are filled partially or completely by one or a plurality of metal and/or ceramic phases and/or glass phases. The open-cell expanded ceramic is also produced in that during or after sintering the cavities, cracks and the porosity of the ceramic members are partially or completely filled with a melt or a suspension which melt below the melting temperature of the expanded ceramic, have a coefficient of expansion similar to the coefficient of expansion of the expanded ceramic, and a very good wetting capacity, and only react partially or not at all with constituents of the expanded ceramic.

    摘要翻译: 所公开的发明涉及陶瓷领域,并且涉及可以深床过滤器形式使用的开孔膨胀陶瓷及其生产方法。 主要目的是通过简单经济的工艺生产开孔膨胀陶瓷。 该目的通过开孔扩展陶瓷来实现,其中陶瓷构件的内腔,裂纹和孔隙率部分地或完全地被一个或多个金属和/或陶瓷相和/或玻璃相填充。 开孔膨胀陶瓷的制造也就是在烧结过程中或之后,空腔,裂纹和陶瓷构件的孔隙率部分或完全填充熔融物或悬浮液,其熔化到膨胀陶瓷的熔融温度以下,具有 膨胀系数与膨胀陶瓷的膨胀系数相似,并且具有非常好的润湿能力,并且仅部分或根本不与膨胀陶瓷的成分反应。