System and Method for Surface Inspection of Micro- and Nanomechanical Structures
    4.
    发明申请
    System and Method for Surface Inspection of Micro- and Nanomechanical Structures 有权
    微机械结构和纳米机械结构表面检测系统与方法

    公开(公告)号:US20090207404A1

    公开(公告)日:2009-08-20

    申请号:US11988737

    申请日:2006-07-13

    IPC分类号: G01C3/00

    CPC分类号: G01Q10/06 G01Q20/02 G01Q70/06

    摘要: The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C).The invention further relates to a corresponding method and to a program for carrying out the method.

    摘要翻译: 用于表面检查的系统被布置成检测形成机械结构(5)的一部分的多个元件(51)的多个点的相对位移和/或振动特征,诸如微机械结构或纳米机械结构。 沿着机械结构沿着第一轨迹(A)移动光束,以沿着所述第一轨迹(A)检测多个随后的参考位置(C),并且光束沿机械结构进一步移位 多个第二轨迹(B),每个所述第二轨迹(B)与所述参考位置(C)中的一个相关联。 本发明还涉及相应的方法和用于执行该方法的程序。

    System and method for the inspection of micro and nanomechanical structures
    5.
    发明授权
    System and method for the inspection of micro and nanomechanical structures 有权
    微纳米机械结构检测系统及方法

    公开(公告)号:US07978344B2

    公开(公告)日:2011-07-12

    申请号:US11988737

    申请日:2006-07-13

    IPC分类号: G01B11/14

    CPC分类号: G01Q10/06 G01Q20/02 G01Q70/06

    摘要: The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C).The invention further relates to a corresponding method and to a program for carrying out the method.

    摘要翻译: 用于表面检查的系统被布置成检测形成机械结构(5)的一部分的多个元件(51)的多个点的相对位移和/或振动特征,诸如微机械结构或纳米机械结构。 沿着机械结构沿着第一轨迹(A)移动光束,以沿着所述第一轨迹(A)检测多个随后的参考位置(C),并且光束沿机械结构进一步移位 多个第二轨迹(B),每个所述第二轨迹(B)与所述参考位置(C)中的一个相关联。 本发明还涉及相应的方法和用于执行该方法的程序。