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公开(公告)号：US5998906A
公开(公告)日：1999-12-07
申请号：US135158
申请日：1998-08-17
申请人： John H. Jerman , John D. Grade , Joseph D. Drake
发明人： John H. Jerman , John D. Grade , Joseph D. Drake
CPC分类号： G02B6/357 , G02B26/0833 , G02B26/0841 , G02B6/4216 , G11B7/1384 , H02N1/008 , G02B6/3518 , G02B6/3548 , G02B6/358 , G02B6/3584
摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.
摘要翻译： 一种静电微致动器，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。 第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。 第一梳状驱动构件安装在基底上。 至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。 第二梳状驱动构件覆盖在基底上。 第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部，用于将第二梳状驱动构件悬挂在基板上。 第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。
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公开(公告)号：US6128122A
公开(公告)日：2000-10-03
申请号：US398259
申请日：1999-09-17
申请人： Joseph D. Drake , John H. Jerman , John D. Grade
发明人： Joseph D. Drake , John H. Jerman , John D. Grade
CPC分类号： G02B26/0833 , G02B26/0816 , G02B26/0841 , G02B26/085 , G02B7/1821 , G11B11/1058 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , H02N1/006 , H02N1/008 , G02B6/3518 , G02B6/357 , G02B6/3584 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B7/08576
摘要： A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
摘要翻译： 用于偏转光束的微米尺寸的镜子组件。 镜组件包括平面底座和与平面基座间隔开并平行于平面基座设置的平面镜。 平面镜具有第一和第二端部以及在第一和第二端部之间延伸的纵向轴线。 第一和第二扭转构件沿着纵向轴线延伸并且连接到相应的第一和第二端部，以允许反射镜相对于平面基部围绕纵向轴线在第一和第二位置之间摇摆。 第一和第二扭转构件固定到平面基座。 反射镜的至少一部分由导电材料制成。 第一和第二间隔开的电极由平面基座承载，用于在第一和第二位置之间驱动反射镜。 系绳构件横向于纵向轴线延伸并且固定到第一扭转构件和平面基座。 系绳构件调节镜子的摇摆。
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公开(公告)号：US06836584B1
公开(公告)日：2004-12-28
申请号：US09524727
申请日：2000-03-14
IPC分类号： G02B635
CPC分类号： G02B6/3548 , G02B6/3518 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/4216 , G02B26/0833 , G02B26/0841 , G11B7/0037 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1384 , G11B11/10543 , G11B11/1058 , H02N1/008
摘要： An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
摘要翻译： 一种用于激光束的光学微动开关，其沿着包括具有适于接收激光束的入口端口和多个出口端口的主体的路径延伸。 耦合到由身体携带的多个微型马达的多个反射镜。 微型电动机选择性地将反射镜从第一位置移出激光束的路径到达激光束的路径的第二位置，以将激光束引导到出口之一。 每个微型马达都具有至少一个静电驱动的梳齿驱动组件，用于将相应的反射镜移动到第一和第二位置之一。 控制器电耦合到微型马达，用于向微型马达提供控制信号。
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公开(公告)号：US06787969B2
公开(公告)日：2004-09-07
申请号：US09876265
申请日：2001-06-06
IPC分类号： H02N100
CPC分类号： H02N1/008 , B81B3/0051 , B81B2203/0136
摘要： A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.
摘要翻译： 一种阻尼微机械装置，包括衬底，覆盖衬底的可移动结构和具有联接到衬底的第一端部的弯曲构件和联接到可移动结构的第二端部。 可移动结构可相对于基板在第一和第二位置之间以共振频率移动。 阻尼材料粘附到弯曲构件的至少一部分上，用于阻尼可动结构在共振频率下的移动。 提供了一种制造微机械装置的方法。
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公开(公告)号：US06594057B1
公开(公告)日：2003-07-15
申请号：US09587675
申请日：2000-06-05
申请人： Joseph D. Drake , John H. Jerman , John D. Grade
发明人： Joseph D. Drake , John H. Jerman , John D. Grade
IPC分类号： G02B2608
CPC分类号： G02B26/0833 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B7/1821 , G02B26/0816 , G02B26/0841 , G02B26/085 , G11B7/08564 , G11B7/08576 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B11/1058 , H02N1/006 , H02N1/008
摘要： A micromachined device of micron dimensions comprising a base and a movable member spaced apart from the base. The movable member has first and second end portions and an axis extending between the first and second end portions. First and second torsional members extend along the axis and are connected to the respective first and second end portions for permitting the movable member to rock between first and second positions about the axis relative to the base. The first and second torsional members are secured to the base. At least a portion of the movable member is of a conductive material. First and second spaced-apart electrodes are carried by the base for driving the movable member between the first and second positions. A tether member extends transversely of the axis and is secured to the first torsional member and to the base whereby the tether member regulates the rocking of the movable member.
摘要翻译： 一种微米尺寸的微加工装置，包括基座和与基座间隔开的可动构件。 可动构件具有第一和第二端部以及在第一和第二端部之间延伸的轴线。 第一和第二扭转构件沿着轴线延伸并且连接到相应的第一和第二端部部分，以允许可动构件相对于基座围绕轴线在第一和第二位置之间摇摆。 第一和第二扭转构件固定到基座。 可移动部件的至少一部分是导电材料。 第一和第二间隔开的电极由基座承载，用于在第一和第二位置之间驱动可动件。 系绳构件横向于轴线延伸并且被固定到第一扭转构件和基部，由此系绳构件调节可移动构件的摆动。
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公开(公告)号：US6134207A
公开(公告)日：2000-10-17
申请号：US135236
申请日：1998-08-17
IPC分类号： G02B6/35 , G02B6/42 , G02B26/08 , G11B7/0037 , G11B7/085 , G11B7/12 , G11B7/135 , G11B11/105 , H02N1/00 , G11B7/00
CPC分类号： H02N1/008 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866 , G02B6/4216 , G11B11/10543 , G11B7/122 , G11B7/1362 , G11B7/1384 , G02B6/3514 , G02B6/357 , G02B6/3584 , G11B11/10554 , G11B11/10563 , G11B11/1058 , G11B7/0037 , G11B7/08564
摘要： An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
摘要翻译： 一种用于激光束的光学微动开关，其沿着包括具有适于接收激光束的入口端口和多个出口端口的主体的路径延伸。 耦合到由身体携带的多个微型马达的多个反射镜。 微型电动机选择性地将反射镜从第一位置移出激光束的路径到达激光束的路径的第二位置，以将激光束引导到出口端口之一。 每个微型马达都具有至少一个静电驱动梳驱动组件，用于将相应的反射镜移动到第一和第二位置之一。 控制器电耦合到微型马达，用于向微型马达提供控制信号。
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公开(公告)号：US06076256A
公开(公告)日：2000-06-20
申请号：US191516
申请日：1998-11-13
CPC分类号： B82Y30/00 , G02B26/0816 , G02B26/0866 , G11B11/10543 , G11B11/1058 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/22 , G11B11/10554 , G11B7/0901 , Y10T29/49117 , Y10T29/49789 , Y10T29/49796
摘要： A method for manufacturing a magneto-optical data storage system. The method includes the steps of providing a support surface and rotatably mounting a magneto-optical disk having a planar storage surface with a plurality of concentrically disposed data tracks onto the support surface. A proximal extremity of an arm is pivotably mounted on the support surface so that a distal extremity of the arm pivots between first and second positions relative to the storage surface. An optical light emitter and receiver emitting a laser beam is carried by the distal extremity of the arm. A flying magneto-optical head is mounted on the distal extremity of the arm. A mirror assembly is attached to the head. The mirror of the mirror assembly can be rocked between first and second positions for reflecting the laser beam between the optical light emitter and receiver and the storage surface of the magneto-optical disk so as to permit the optical recording and/or reading of information on the storage surface.
摘要翻译： 一种制造磁光数据存储系统的方法。 该方法包括以下步骤：提供支撑表面并将具有平面存储表面的磁光盘可旋转地安装到具有多个同心设置的数据轨迹到支撑表面上。 臂的近端被可枢转地安装在支撑表面上，使得臂的远端相对于存储表面在第一和第二位置之间枢转。 发射激光束的光发射器和接收器由臂的远端承载。 飞行磁光头安装在臂的远端上。 镜组件附接到头部。 反射镜组件的反射镜可以在第一和第二位置之间摆动，用于将光束发射器和接收器之间的激光束与磁光盘的存储表面反射，以便允许光学记录和/或读取信息 存储表面。
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公开(公告)号：US06903486B2
公开(公告)日：2005-06-07
申请号：US10251035
申请日：2002-09-19
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H01S3/1055 , H01S5/022 , H01S5/0687 , H01S5/14 , H02N1/00
CPC分类号： H02N1/008
摘要： A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
摘要翻译： 平衡微型装置，包括基板，覆盖基板的可移动结构，元件和杠杆组件，其具有联接到枢轴并且可围绕枢轴枢转的枢轴和杠杆。 杠杆具有联接到可移动结构的第一末端和耦合到元件的相对的第二末端。 可移动结构使得杠杆围绕枢轴枢转，以使元件沿行进方向移动。 元件基本上是机械平衡的，以防止元件响应于外部施加的力在行进方向上的不期望的移动。
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9.发明授权
公开(公告)号：US6049650A
公开(公告)日：2000-04-11
申请号：US107221
申请日：1998-06-30
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： G03F7/40 , B25J7/00 , B81B7/00 , G02B6/36 , G02B6/38 , G02B6/42 , G11B7/22 , G02B6/00 , H01L21/70
CPC分类号： G02B6/3656 , B81C3/008 , G02B6/366 , G02B6/3692 , G11B7/22 , G02B6/3893 , G02B6/42 , G02B6/4219
摘要： Micro-machined tools and component holders useful for the manufacture, assembly, and testing of precision micro-miniature parts are provided, particurlarly embodiments well adapted for precision micro-miniature systems incorporating optical and/or electronic components including lenses, optical fibers, and the like. Structure and method find particular applicability in the precision optical systems of the read, write, or read/write heads of optically assisted storage devices for digital computers. Removable tools are used to temporarily position components while the components are glued or otherwise fixed into place during assembly, and then completely removed for use with another head assembly. Break-away tools or holders typically include three major portions: an element holder, a handle, and a break-away neck portion connecting the holder with the handle. The element holder provides a mounting block for an optical, electrical, or mechanical element. Once the elements are attached to the mounting blocks, they are moved into position within the larger assembly via the handle, the mounting block is glued to the assembly and a small predictable force is applied to the handle to break the neck and separate the handle from the holder which is at that time attached to the assembly. Tools may be formed by photolithographically patterened and etching a substrate such as silicon to selectively carve the substrate. Structures formed from plated metal, either on a base material, or made entirely of metal are also provided by the invention. Several embodiments of process for forming the inventive structures are also provided.
摘要翻译： 提供了用于精密微型部件的制造，组装和测试的微加工工具和部件保持器，特别是适用于包括光学和/或电子部件的精密微型系统的实施例，包括透镜，光纤和 喜欢。 结构和方法在数字计算机的光辅助存储设备的读，写或读/写头的精密光学系统中发现特别适用。 可拆卸工具用于临时定位部件，同时组件被胶合或以其他方式在组装期间固定到位，然后完全移除以与另一个头部组件一起使用。 分离工具或支架通常包括三个主要部分：元件支架，手柄和将支架与手柄连接的脱离颈部。 元件支架为光学，电气或机械元件提供安装块。 一旦元件连接到安装块，它们通过手柄移动到更大的组件内的位置，安装块被粘合到组件上，并且将小的可预测的力施加到手柄以打破颈部并将手柄从 当时在该大会上的持有人。 工具可以通过光刻蚀刻和蚀刻诸如硅的衬底来选择性地雕刻衬底来形成。 本发明还提供了由基底材料制成或完全由金属制成的电镀金属形成的结构。 还提供了用于形成本发明结构的方法的几个实施例。
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公开(公告)号：US06882083B2
公开(公告)日：2005-04-19
申请号：US10100545
申请日：2002-03-14
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
CPC分类号： H02N1/008
摘要： A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.
摘要翻译： 一种微型装置，包括基板，覆盖基板的可移动部件和第一和第二间隔开的悬挂部件。 第一和第二悬挂构件中的每一个具有联接到基板的第一可弯曲端部和联接到可动构件的第二可弯曲端部部分和基本上刚性的中心部分。 每个悬挂构件的第一和第二端部具有相应的第一和第二长度，并且悬挂构件具有总长度。 每个悬挂构件的第一和第二长度的总和为悬架构件的总长度的5％至40％。
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