Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist

    公开(公告)号:US09195139B2

    公开(公告)日:2015-11-24

    申请号:US14244942

    申请日:2014-04-04

    IPC分类号: G03F7/20 G03F7/213 G03B27/53

    摘要: Methods of and apparatus for performing direct-write lithography in a two-color photoresist layer are disclosed. The method includes exposing the two-color photoresist layer with transducer and inhibition images that respectively define bright spots and dark spots. The transducer image generates excited-state photo-molecules while the inhibition image converts the exited-state photo-molecules to an unexcited state that is not susceptible to conversion to an irreversible exposed state. The dark spots and bright spots are aligned, with the dark spots being smaller than the bright spots so that a portion of the excited-state photo-molecules adjacent the periphery of the bright spots absorb the inhibition radiation and transition to the unexcited state while a portion of the excited photo-molecules at the center of bright spots are not exposed to the inhibition light and transition to an irreversible exposed state. This forms in the two-color photoresist layer a pattern of sub-resolution photoresist pixels.

    Method for phase shift mask design, fabrication, and use
    2.
    发明授权
    Method for phase shift mask design, fabrication, and use 失效
    相移掩模设计,制造和使用方法

    公开(公告)号:US06800401B2

    公开(公告)日:2004-10-05

    申请号:US09843622

    申请日:2001-04-26

    申请人: John S. Petersen

    发明人: John S. Petersen

    IPC分类号: G03F900

    摘要: A system and method of strong phase-shifting a beam from an actinic light source in a lithographic process includes focusing a beam from the electromagnetic beam source onto a mask adapted to selectively phase-shift at least a portion of the beam according to a predetermined pattern. The beam is passed from the actinic light source through the mask producing a phase-shifted beam, and the phase-shifted beam is directed at a substrate such as a semiconductor wafer adapted to be selectively etched according to the predetermined pattern. The strong phase-shift serves to substantially eliminate zero-order light in the phase-shifted beam. Strong phase-shift mask techniques, through a two electromagnetic beam interference imaging process, are known in the art of microlithography to form imaging results for features of a size well below the limit of conventional prior art imaging.

    摘要翻译: 在光刻工艺中将来自光化光源的光强相移的系统和方法包括将来自电磁光束源的光束聚焦到适于根据预定图案选择性地相移光束的至少一部分的掩模 。 光束从光化光源通过掩模产生相移光束,并且相移光束被引导到诸如半导体晶片的衬底,其适于根据预定图案被选择性地蚀刻。 强相移用于基本上消除相移光束中的零级光。 通过两个电磁束干涉成像过程的强相移掩模技术在微光刻技术中是已知的,以形成远远低于传统现有技术成像极限的特征的成像结果。

    Projection imaging system with a non-circular aperture and a method thereof
    3.
    发明授权
    Projection imaging system with a non-circular aperture and a method thereof 有权
    具有非圆形孔径的投影成像系统及其方法

    公开(公告)号:US06556361B1

    公开(公告)日:2003-04-29

    申请号:US09528272

    申请日:2000-03-17

    IPC分类号: G02B908

    摘要: A imaging tool for use with a mask with features oriented along at least an x-axis or a y-axis where the x-axis extends in directions substantially perpendicular to the directions of the y-axis. The tool has a condenser lens with a condenser plate which is located in a condenser lens pupil plane and which has a condenser aperture with four-sides. The sides of the condenser aperture are oriented in substantially the same direction as either the x-axis or the y-axis. The condenser lens is positioned to place at least a portion of any illumination on at least a portion of the mask.

    摘要翻译: 一种用于与面罩一起使用的成像工具,其特征是至少沿x轴或y轴定向,其中x轴沿基本上垂直于y轴方向的方向延伸。 该工具具有聚光透镜,其具有位于聚光透镜光瞳平面中并且具有四面的聚光器孔的聚光板。 冷凝器孔的侧面被定向在与x轴或y轴基本相同的方向上。 聚光透镜被定位成将任何照明的至少一部分放置在掩模的至少一部分上。

    Hydrophobic sequestrant for cholesterol depletion
    4.
    发明授权
    Hydrophobic sequestrant for cholesterol depletion 有权
    疏水性螯合剂用于胆固醇消耗

    公开(公告)号:US5969090A

    公开(公告)日:1999-10-19

    申请号:US185157

    申请日:1998-11-03

    摘要: The present invention relates to a poly(allylamine) polymer and, more generally, a hydrocarbon amine polymer. Preferably, these polymers are crosslinked. The present invention also relates to methods of forming these polymers and methods for their use. Further, the present invention relates to alkylating agents that can be employed to form the polymers and to methods for forming the alkylating agents. Generally, the polymer sequestrant includes a substituent bound to an amine of the polymer. The substituent includes a quaternary amine-containing moiety having one, two or three terminal hydrophobic substituents. A method of preparing quaternary amine-containing alkylating agents includes reacting an unsymmetrical dihalide with a tertiary amine having at least one hydrophobic substituent. A method for binding bile salts of bile acids in a mammal includes orally administering to the mammal a therapeutically-effective amount of the polymer sequestrant.

    摘要翻译: 本发明涉及聚(烯丙胺)聚合物,更一般地,涉及烃胺聚合物。 优选地,这些聚合物是交联的。 本发明还涉及形成这些聚合物的方法及其使用方法。 此外,本发明涉及可用于形成聚合物的烷基化剂和形成烷基化剂的方法。 通常,聚合物螯合剂包括与聚合物的胺结合的取代基。 取代基包括具有一个,两个或三个末端疏水取代基的含季胺的部分。 制备含季铵烷基化剂的方法包括使不对称二卤化物与具有至少一个疏水取代基的叔胺反应。 用于结合哺乳动物胆汁酸胆汁的方法包括向哺乳动物口服给予治疗有效量的聚合物螯合剂。

    Hydrophilic nonamine-containing and amine-containing copolymers and
their use as bile acid sequestrants
    5.
    发明授权
    Hydrophilic nonamine-containing and amine-containing copolymers and their use as bile acid sequestrants 失效
    含亲水性非胺和含胺共聚物及其作为胆汁酸螯合剂的用途

    公开(公告)号:US5929184A

    公开(公告)日:1999-07-27

    申请号:US999029

    申请日:1997-12-29

    CPC分类号: A61K31/785 C08F6/008

    摘要: The present invention relates to polymer compositions and methods of using said compositions for sequestering bile acids in a patient. The polymer compositions of this invention comprise a copolymer characterized by one or more hydrophilic nonamine-containing monomers or repeat units and one or more amine-containing monomers or repeat units. The amine-containing monomers or repeat units of the polymer compositions have one or more substituents bound to a portion of the amine nitrogens. The substituent or substituents which are bound to the amine nitrogens of the polymer composition can include a hydrophobic moiety and/or a quaternary amine-containing moiety. Suitable amine-containing monomers or repeat units include, but are not limited to, for example, vinylamine, allylamine, diallylamine, diallylmethylamine, and ethyleneimine, which are appropriately substituted, as described above.The hydrophilic nonamine-containing monomer can be, but is not limited to, for example, allyl alcohol, vinyl alcohol, ethylene oxide, propylene oxide, hydroxyethylacrylate, hydroxyethylmethacrylate, hydroxypropylacrylate, hydroxypropylmethacrylate, poly(propyleneglycol) monomethacrylate, poly(ethyleneglycol) monomethacrylate, acrylic acid, carbon dioxide, and sulfur dioxide. Typically, the hydrophilic nonamine-containing monomer or repeat unit comprises from about 10 to about 90 mole percent of the polymer composition.

    摘要翻译: 本发明涉及聚合物组合物和使用所述组合物在患者体内螯合胆汁酸的方法。 本发明的聚合物组合物包含一种共聚物,其特征在于一种或多种含亲水性非胺的单体或重复单元和一种或多种含胺单体或重复单元。 聚合物组合物的含胺单体或重复单元具有一个或多个与一部分胺氮结合的取代基。 与聚合物组合物的胺氮键合的取代基或取代基可以包括疏水部分和/或含季胺的部分。 合适的含胺单体或重复单元包括但不限于如上所述的适当取代的乙烯胺,烯丙胺,二烯丙基胺,二烯丙基甲胺和乙烯亚胺。 含亲水非胺的单体可以是但不限于例如烯丙醇,乙烯醇,环氧乙烷,环氧丙烷,丙烯酸羟乙酯,甲基丙烯酸羟乙酯,丙烯酸羟丙酯,甲基丙烯酸羟丙酯,单(甲基)丙烯酸聚(乙二醇),单甲基丙烯酸聚(乙二醇) 丙烯酸,二氧化碳和二氧化硫。 通常,含亲水非胺的单体或重复单元包含约10至约90摩尔%的聚合物组合物。

    Apparatus and method of direct writing with photons beyond the diffraction limit
    6.
    发明申请
    Apparatus and method of direct writing with photons beyond the diffraction limit 审中-公开
    用光子直接写入超过衍射极限的装置和方法

    公开(公告)号:US20150331330A1

    公开(公告)日:2015-11-19

    申请号:US14143139

    申请日:2013-12-30

    IPC分类号: G03F7/20

    摘要: Direct-write lithography apparatus and methods are disclosed in which a transducer image and an image of crossed interference fringe patterns are superimposed on a photoresist layer supported by a substrate. The transducer image has an exposure wavelength and contains bright spots, each corresponding to an activated pixel. The interference image has an inhibition wavelength and contains dark spots where the null points in the crossed interference fringes coincide. The dark spots are aligned with and trim the peripheries of the corresponding bright spot to form sub-resolution photoresist pixels having a size smaller than would be formed in the absence of the dark spots.

    摘要翻译: 公开了直接写入光刻设备和方法,其中传感器图像和交叉干涉条纹图案的图像叠加在由衬底支撑的光致抗蚀剂层上。 换能器图像具有曝光波长并且包含亮点,每个对应于激活的像素。 干涉图像具有抑制波长,并且包含交叉干涉条纹中的零点重合的暗点。 黑点与对应的亮点的周边对准并修剪,以形成尺寸小于在不存在黑点的情况下形成的分辨率的光致抗蚀剂像素。

    Direct compression polymer tablet core
    7.
    发明授权
    Direct compression polymer tablet core 有权
    直接压缩聚合物片芯

    公开(公告)号:US08187631B2

    公开(公告)日:2012-05-29

    申请号:US12461143

    申请日:2009-08-03

    摘要: The present invention provides a tablet core which comprises at least about 95% by weight of an aliphatic amine polymer. The invention also provides a method of producing a tablet core comprising at least about 95% by weight of an aliphatic amine polymer resin The method comprises the step of compressing the aliphatic amine polymer to form the tablet core. The tablet core can further include one or more excipients. In this embodiment, the method of producing the tablet core comprises the steps of: (1) hydrating the aliphatic amine polymer to the desired moisture level; (2) blending the aliphatic amine polymer with the excipients in amounts such that the polymer comprises at least about 95% by weight of the resulting blend; and (3) compressing the blend to form the tablet core. The present invention further relates to a coated tablet comprising an aliphatic amine polymer core wherein the coating is a water based coating.

    摘要翻译: 本发明提供一种片芯,其包含至少约95重量%的脂族胺聚合物。 本发明还提供一种生产包含至少约95重量%的脂族胺聚合物树脂的片芯的方法。该方法包括压缩脂族胺聚合物以形成片芯的步骤。 片芯可进一步包括一种或多种赋形剂。 在该实施方案中,制备片芯的方法包括以下步骤:(1)将脂族胺聚合物水合至期望的水分含量; (2)将脂族胺聚合物与赋形剂混合,使得聚合物包含至少约95重量%的所得共混物; 和(3)压缩混合物以形成片芯。 本发明还涉及一种包含脂族胺聚合物核心的包衣片剂,其中该涂料是水基涂料。

    Combination therapy for treating hypercholestrolemia
    8.
    发明授权
    Combination therapy for treating hypercholestrolemia 有权
    联合治疗高胆固醇血症

    公开(公告)号:US06264938B1

    公开(公告)日:2001-07-24

    申请号:US09311402

    申请日:1999-05-13

    IPC分类号: A61K31787

    CPC分类号: A61K31/785 Y10S514/824

    摘要: The invention relates to methods for treating hypercholesterolemia and atherosclerosis, and reducing serum cholesterol in a mammal. The methods of the invention comprise administering to a mammal a first amount of a bile acid sequestrant compound which is an unsubstituted polydiallylamine polymer and a second amount of an HMG Co-A reductase inhibitor compound. The first and second amounts together comprise a therapeutically effective amount. The invention further relates to pharmaceutical compositions useful for the treatment of hypercholesterolemia and atherosclerosis, and for reducing serum cholesterol. The pharmaceutical compositions comprise a combination of a first amount of an unsubstituted polydiallylamine polymer compound and a second amount of an HMG Co-A reductase inhibitor compound. The first and second amounts comprise a therapeutically effective amount. The pharmaceutical compositions of the present invention may optionally contain a pharmaceutically acceptable carrier.

    摘要翻译: 本发明涉及治疗高胆固醇血症和动脉粥样硬化以及降低哺乳动物血清胆固醇的方法。 本发明的方法包括向哺乳动物施用第一量的胆汁酸多价螯合剂化合物,其是未取代的聚二烯丙基胺聚合物和第二量的HMG Co-A还原酶抑制剂化合物。 第一和第二量一起包含治疗有效量。本发明还涉及可用于治疗高胆固醇血症和动脉粥样硬化以及降低血清胆固醇的药物组合物。 药物组合物包含第一量的未取代的聚二烯丙基胺聚合物化合物和第二量的HMG Co-A还原酶抑制剂化合物的组合。 第一和第二量包括治疗有效量。 本发明的药物组合物可任选地含有药学上可接受的载体。

    Polyvalent polymers for the treatment of rotavirus infection
    10.
    发明授权
    Polyvalent polymers for the treatment of rotavirus infection 失效
    用于治疗轮状病毒感染的多价聚合物

    公开(公告)号:US5891862A

    公开(公告)日:1999-04-06

    申请号:US717265

    申请日:1996-09-20

    摘要: The present invention includes polymerizable monomers comprising a fucoside moiety. In one embodiment, the monomer has a polymerizable functional group, such as an olefinic bond, to which the fucoside moiety is attached by a spacer group, for example, an alkylene group, or an alkylene group wherein one or more carbon atoms are substituted by heteroatoms, such as oxygen, nitrogen or sulfur atoms. The present invention also includes polymers comprising one or more fucoside moieties, such as pendant fucoside moieties, which can inhibit or prevent rotavirus infection in a mammal. Such a polymer can comprise, for example, a monomer of the present invention. The polymer can be a homopolymer or a copolymer, and can have, for example, a polyacrylamide, polyacrylate or polystyrene backbone. In another embodiment, the present invention comprises a method for treating a rotavirus infection in a mammal, for example, a human, by administering to the mammal a therapeutically effective amount of a polymer comprising one or more glycoside moieties, such as pendant glycoside moieties. The glycoside moieties can be, for example, fucoside moieties or sialic acid moieties. The polymer can be a homopolymer or a co-polymer. In one embodiment, the polymer is a copolymer comprising a glycoside-bearing monomer and a hydrophobic monomer. In another embodiment, the polymer to be administered comprises two or more different glycoside-bearing monomers.

    摘要翻译: 本发明包括包含岩藻糖苷部分的可聚合单体。 在一个实施方案中,单体具有可聚合官能团,例如烯键,通过间隔基团例如亚烷基或其中一个或多个碳原子被 杂原子,例如氧,氮或硫原子。 本发明还包括包含一种或多种可以抑制或预防哺乳动物轮状病毒感染的岩藻糖苷部分的聚合物,例如侧壁ucoside部分。 这样的聚合物可以包括例如本发明的单体。 聚合物可以是均聚物或共聚物,并且可以具有例如聚丙烯酰胺,聚丙烯酸酯或聚苯乙烯主链。 在另一个实施方案中,本发明包括通过向哺乳动物施用治疗有效量的包含一个或多个糖苷部分的聚合物,例如侧链糖苷部分,来治疗哺乳动物例如人的轮状病毒感染的方法。 糖苷部分可以是例如岩藻糖苷部分或唾液酸部分。 聚合物可以是均聚物或共聚物。 在一个实施方案中,聚合物是包含含糖苷单体和疏水单体的共聚物。 在另一个实施方案中,待施用的聚合物包含两种或更多种不同的含糖苷的单体。