-
公开(公告)号：US06924921B2
公开(公告)日：2005-08-02
申请号：US10743418
申请日：2003-12-22
申请人： John South Lewis, lll , Scott Halden Goodwin-Johansson , Brian Rhys Stoner , Sonia Grego , David Edward Dausch
发明人： John South Lewis, lll , Scott Halden Goodwin-Johansson , Brian Rhys Stoner , Sonia Grego , David Edward Dausch
CPC分类号： B82Y20/00 , C30B5/00 , C30B7/005 , C30B29/60 , G02B6/1225 , Y10S117/902 , Y10S117/913 , Y10T428/261 , Y10T428/265 , Y10T428/31504
摘要： A three dimensional photonic crystal and layer-by-layer processes of fabricating the photonic crystal. A substrate is exposed to a plurality of first microspheres made of a first material, the first material being of a type that will bond to the templated substrate and form a self-passivated layer of first microspheres to produce a first layer. The first layer is exposed to a plurality of second microspheres made of a second material, the second material being of a type that will bond to the first layer and form a self-passivated layer of second microspheres. This layering of alternating first and second microspheres can be repeated as desired to build a three dimensional photonic crystal of desired geometry. Charged polymers such as polyelectrolyte coatings can be used to create the bonds.
摘要翻译： 一个三维光子晶体和逐层制造光子晶体的过程。 将基底暴露于由第一材料制成的多个第一微球体中，第一材料是将结合到模板底物并形成第一微球的自钝化层以产生第一层的类型。 第一层暴露于由第二材料制成的多个第二微球，第二材料是将结合到第一层并形成第二微球的自钝化层的类型。 交替的第一和第二微球的这种层叠可以根据需要重复以构建所需几何形状的三维光子晶体。 可以使用带电聚合物如聚电解质涂层来形成结合。
-
公开(公告)号：US06752868B2
公开(公告)日：2004-06-22
申请号：US10210010
申请日：2002-07-31
申请人： John South Lewis, III , Scott Halden Goodwin-Johansson , Brian Rhys Stoner , Sonia Grego , David Edward Dausch
发明人： John South Lewis, III , Scott Halden Goodwin-Johansson , Brian Rhys Stoner , Sonia Grego , David Edward Dausch
IPC分类号： C30B2954
CPC分类号： B82Y20/00 , C30B5/00 , C30B7/005 , C30B29/60 , G02B6/1225 , Y10S117/902 , Y10S117/913 , Y10T428/261 , Y10T428/265 , Y10T428/31504
摘要： A three dimensional photonic crystal and layer-by-layer processes of fabricating the photonic crystal. A templated substrate is exposed to a plurality of first microspheres made of a first material, the first material being of a type that will bond to the templated substrate and form a self-passivated layer of first microspheres to produce a first layer. The first layer is exposed to a plurality of second microspheres made of a second material, the second material being of a type that will bond to the first layer and form a self-passivated layer of second microspheres. This layering of alternating first and second microspheres can be repeated as desired to build a three dimensional photonic crystal of desired geometry.
摘要翻译： 一个三维光子晶体和逐层制造光子晶体的过程。 模板化的衬底暴露于由第一材料制成的多个第一微球体中，第一材料是将结合到模板衬底并形成第一微球的自钝化层以产生第一层的类型。 第一层暴露于由第二材料制成的多个第二微球，第二材料是将结合到第一层并形成第二微球的自钝化层的类型。 交替的第一和第二微球的这种层叠可以根据需要重复以构建所需几何形状的三维光子晶体。
-
公开(公告)号：US06456420B1
公开(公告)日：2002-09-24
申请号：US09626725
申请日：2000-07-27
IPC分类号： G02B2600
CPC分类号： H01H59/0009 , B81B3/0018 , B81B3/0035 , H01H2059/0081
摘要： A MEMS apparatus is provided that includes a microelectronic substrate and an elevating structure having a fixed portion attached to the substrate and a distal portion raised from the surface of the substrate. The distal portion of the elevating structure defines at least one zone of attachment. Additionally, the MEMS apparatus comprises a MEMS device attached to the distal portion of the elevating structure at one of the zones of attachment. The attached MEMS device may comprise an electrostatic actuator having a first and second electrode film that are attached to the elevating structure at one of the zones of attachment. In those embodiments in which the MEMS devices comprise an electrostatic actuator the force and movement provided by the actuator may be used to incorporate switches, pumps, valves or other similar MEMS devices.
摘要翻译： 提供一种MEMS装置，其包括微电子基板和具有附接到基板的固定部分和从基板的表面凸起的远侧部分的升降结构。 升降结构的远端部分限定了至少一个连接区域。 另外，MEMS装置包括在附接区域中的一个附接到升降结构的远端部分的MEMS装置。 附接的MEMS器件可以包括具有第一和第二电极膜的静电致动器，该第一和第二电极膜在附接区域中的一个附接到升降结构。 在其中MEMS器件包括静电致动器的那些实施例中，由致动器提供的力和运动可用于并入开关，泵，阀或其它类似的MEMS器件。
-
公开(公告)号：US06229683B1
公开(公告)日：2001-05-08
申请号：US09345722
申请日：1999-06-30
IPC分类号： H02N1300
CPC分类号： H01H59/0009 , H01H1/20 , H01H2037/008 , H01H2059/0081
摘要： A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. This device can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a moveable composite overlying the substrate, one or more composite contacts, and at least one insulator. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Applying a voltage between the substrate electrode and moveable composite electrode creates an electrostatic force that attracts the moveable composite to the underlying microelectronic substrate. The substrate contact and composite contact are selectively interconnected in response to the application of electrostatic force. Once electrostatic force is removed, the moveable composite reassumes the biased position such that the substrate and composite contacts are disconnected. Various embodiments further define components of the device. Other embodiments further include a source of electrical energy, a diode, and a switching device connected to different components of the MEMS device. A method of using the aforementioned electrostatic MEMS device is provided.
摘要翻译： 提供了一种MEMS（微机电系统）静电操作的高压开关或继电器。 该设备可以在使用相对较低的静电工作电压的同时切换高电压。 MEMS器件包括微电子衬底，衬底电极和一个或多个衬底触点。 MEMS器件还包括覆盖衬底，一个或多个复合触点和至少一个绝缘体的可移动复合材料。 在横截面中，可移动复合材料包括电极层和偏置层。 在长度方面，可移动复合材料包括附接到下面的基底的固定部分，中间部分和可相对于基底电极移动的远端部分。 当不施加静电力时，可移动复合材料的远侧和/或中间部分被偏压到适当位置。 在基板电极和可移动复合电极之间施加电压产生吸引可移动复合材料到下面的微电子基板的静电力。 响应于静电力的应用，衬底接触和复合接触选择性互连。 一旦静电力被去除，可移动的复合材料重新确定偏置的位置，使得基板和复合触点断开。 各种实施例进一步限定了装置的部件。 其他实施例还包括电能源，二极管和连接到MEMS装置的不同部件的开关装置。 提供了使用上述静电MEMS器件的方法。
-
公开(公告)号：US06236491B1
公开(公告)日：2001-05-22
申请号：US09320891
申请日：1999-05-27
IPC分类号： G02B2600
CPC分类号： B81C1/00666 , B81B2201/032 , B81B2203/0118 , B81C2201/0167 , G02B6/353 , G02B6/3566 , G02B6/357 , G02B6/3594 , H01H59/0009 , H01H2059/0081
摘要： A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for attenuating electromagnetic radiation are provided. Improved operating voltage characteristics are achieved by defining a non increasing air gap between the substrate electrode and flexible composite electrode within the electrostatic device. A medial portion of a multilayer flexible composite overlying the electromechanical substrate is held in position regardless of the application of electrostatic force, thereby sustaining the defined air gap. The air gap is relatively constant in separation from the underlying microelectronic surface when the medial portion is cantilevered in one embodiment. A further embodiment provides an air gap that decreases to zero when the medial portion approaches and contacts the underlying microelectronic surface. A moveable distal portion of the flexible composite is biased to curl naturally due to differences in thermal coefficients of expansion between the component layers. In response to electrostatic forces, the distal portion moves and thereby alters the distance separating the flexible composite from the underlying microelectronic surface. Structures and techniques for controlling bias in the medial portion and the resulting air gap are provided. The electrostatic device may be disposed to selectively clear or intercept the path of electromagnetic radiation. Materials used in the attenuator can be selected to pass, reflect, or absorb various types of electromagnetic radiation. A plurality of electromagnetic attenuators may be disposed in an array and selectively activated in subsets.
摘要翻译： 提供了具有更低和更可预测的工作电压的MEMS（微机电系统）静电装置。 提供静电致动器，电磁辐射的静电衰减器和用于衰减电磁辐射的方法。 通过在静电装置内限定衬底电极和柔性复合电极之间的不增加的空气间隙来实现改进的工作电压特性。 覆盖机电衬底的多层柔性复合体的中间部分保持在适当的位置，而与施加静电力无关，从而维持限定的气隙。 在一个实施例中，当中间部分为悬臂时，气隙与下面的微电子表面分离时相对恒定。 另一实施例提供了当中间部分靠近并接触下面的微电子表面时减小到零的气隙。 由于组件层之间的热膨胀系数的差异，柔性复合材料的可移动远端部分被偏压以自然地卷曲。 响应于静电力，远端部分移动，从而改变将柔性复合材料与下面的微电子表面分开的距离。 提供了用于控制中间部分中的偏压和产生的气隙的结构和技术。 静电装置可以设置成选择性地清除或拦截电磁辐射的路径。 衰减器中使用的材料可以选择通过，反射或吸收各种类型的电磁辐射。 多个电磁衰减器可以被布置成阵列并且选择性地在子集中激活。
-
公开(公告)号：US06373682B1
公开(公告)日：2002-04-16
申请号：US09464010
申请日：1999-12-15
IPC分类号： H01G501
CPC分类号： H01H59/0009 , H01G5/18 , H01H2059/0081
摘要： A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage variable controlled capacitor device is provided. This device can store high energy over a wide range while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate signal electrode, and one or more substrate control electrodes. The MEMS device also includes a moveable composite overlying the substrate, having a composite signal electrode, one or more composite control electrodes, and a biasing element. In cross-section, the moveable composite comprises at least one electrode layer and, in most instances, a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Additionally, the MEMS device comprises insulators to electrically isolate the substrate and electrodes. Applying a variable controlled voltage between the substrate control electrode and moveable composite control electrode, controls the bias of the moveable composite and, in turn, controls the capacitance between the substrate signal electrode and the composite signal electrode. Various embodiments further define the various layering alternatives if the moveable composite, shaping of the electrodes and placement of the electrodes. Additionally, a system for electrostatically controlled variable capacitance comprises a variable controlled voltage source coupled to the control electrodes of the MEMS device of the present invention and a circuit signal electrically coupled to the signal electrodes of the MEMS device. A method of using and a method for making the aforementioned electrostatic MEMS device are also provided.
摘要翻译： 提供了一种MEMS（微机电系统）静电操作的高压可变控制电容器件。 该器件可以在较宽的范围内存储高能量，同时使用相对较低的静电工作电压。 MEMS器件包括微电子衬底，衬底信号电极和一个或多个衬底控制电极。 MEMS器件还包括覆盖衬底的可移动复合材料，具有复合信号电极，一个或多个复合控制电极和偏置元件。 在横截面中，可移动复合材料包括至少一个电极层，并且在大多数情况下包括偏置层。 在长度方面，可移动复合材料包括附接到下面的基底的固定部分和可相对于基底电极移动的远端部分。 当不施加静电力时，可移动复合材料的远侧和/或中间部分被偏压到适当位置。 另外，MEMS器件包括绝缘体以电隔离衬底和电极。 在基板控制电极和可移动的复合控制电极之间施加可变的控制电压，控制可移动复合材料的偏压，进而控制基板信号电极和复合信号电极之间的电容。 各种实施例进一步限定了各种分层替代方案，如果可移动复合物，电极的成形和电极的放置。 另外，用于静电控制可变电容的系统包括耦合到本发明的MEMS器件的控制电极的可变控制电压源和电耦合到MEMS器件的信号电极的电路信号。 还提供了一种使用方法和制造上述静电MEMS器件的方法。
-
公开(公告)号：US6057520A
公开(公告)日：2000-05-02
申请号：US345300
申请日：1999-06-30
CPC分类号： H01H59/0009 , H01H1/20 , H01H2037/008 , H01H2059/0081 , H01H9/40 , H01H9/42
摘要： A MEMS (Micro Electro Mechanical System) electrostatically operated device is provided that can switch high voltages while providing improved arcing tolerance. The MEMS device comprises a microelectronic substrate, a substrate electrode, first and second contact sets, an insulator, and a moveable composite. The moveable composite overlies the substrate and substrate electrode. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. Each contact set has at least one composite contact attached to the moveable composite, and preferably at least one substrate contact attached to the substrate. One of the contact sets is closer to the composite distal portion. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Applying a voltage between the substrate electrode and moveable composite electrode creates an electrostatic force that attracts the moveable composite to the underlying substrate. The first and second contact sets are electrically connected when the distal portion of the moveable composite is attracted to the substrate. Once electrostatic force is removed, the moveable composite reassumes the biased position such that the first and second contact sets are disconnected in a sequence to minimize arcing. Various embodiments and methods of using the electrostatic MEMS device are provided.
摘要翻译： 提供了一种MEMS（微机电系统）静电操作装置，可以提供更高的电弧容差，从而切换高电压。 MEMS器件包括微电子衬底，衬底电极，第一和第二接触组，绝缘体和可移动复合材料。 可移动复合物覆盖基板和基板电极。 在横截面中，可移动复合材料包括电极层和偏置层。 在长度方面，可移动复合材料包括附接到下面的基底的固定部分，中间部分和可相对于基底电极移动的远端部分。 每个接触组具有至少一个连接到可移动复合材料的复合触点，并且优选地至少一个连接到基底的基底触点。 接触组中的一个更靠近复合远端部分。 当不施加静电力时，可移动复合材料的远侧和/或中间部分被偏压到适当位置。 在基板电极和可移动复合电极之间施加电压产生吸引可移动复合材料到底层基板的静电力。 当可移动复合材料的远端部分被吸引到基底时，第一和第二接触套电连接。 一旦静电力被去除，可移动复合材料重新确定偏置位置，使得第一和第二接触组件以一个顺序断开以最小化电弧。 提供使用静电MEMS器件的各种实施例和方法。
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.028 秒)
