公开(公告)号：US20060284117A1

公开(公告)日：2006-12-21

申请号：US11445677

申请日：2006-06-02

申请人： John Vanderpot ,  Yongzhang Huang

发明人： John Vanderpot ,  Yongzhang Huang

IPC分类号： H01J37/08

CPC分类号： H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

摘要： A system, method, and apparatus for mitigating contamination during ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and travels through the mass analyzer to the end station. An ion beam dump assembly comprising a particle collector, particle attractor, and shield are associated with the mass analyzer, wherein an electrical potential of the particle attractor is operable to attract and constrain contamination particles within the particle collector, and wherein the shield is operable to shield the electrical potential of the particle attractor from an electrical potential of an ion beam within the mass analyzer.

公开(公告)号：US20060284071A1

公开(公告)日：2006-12-21

申请号：US11445722

申请日：2006-06-02

申请人： John Vanderpot ,  Yongzhang Huang

发明人： John Vanderpot ,  Yongzhang Huang

IPC分类号： B01D59/44

CPC分类号： H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

摘要： A system, method, and apparatus for mitigating contamination associated with ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and selectively travels through the mass analyzer to the end station, based on a position of a beam stop assembly. The beam stop assembly selectively prevents the ion beam from entering and/or exiting the mass analyzer, therein minimizing contamination associated with an unstable ion source during transition periods such as a start-up of the ion implantation system.

公开(公告)号：US20060284116A1

公开(公告)日：2006-12-21

申请号：US11445667

申请日：2006-06-02

申请人： Donald Berrian ,  John Vanderpot

发明人： Donald Berrian ,  John Vanderpot

IPC分类号： H01J37/08

CPC分类号： H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

摘要： A system and method for mitigating contamination in an ion implantation system is provided. The system comprises an ion source, a power supply operable to supply power to a filament and mirror electrode of the ion source, a workpiece handling system, and a controller, wherein the ion source is selectively tunable via the controller to provide rapid control of a formation of an ion beam. The controller is operable to selectively rapidly control power to the ion source, therein modulating a power of the ion beam between an implantation power and a minimal power in less than approximately 20 microseconds based, at least in part, to a signal associated with a workpiece position. Control of the ion source therefore mitigates particle contamination in the ion implantation system by minimizing an amount of time at which the ion beam is at the implantation current.

公开(公告)号：US20070069156A1

公开(公告)日：2007-03-29

申请号：US11235754

申请日：2005-09-27

申请人： John Pollock ,  John Vanderpot ,  Donald Berrian

发明人： John Pollock ,  John Vanderpot ,  Donald Berrian

IPC分类号： H01J37/244 ,  H01J37/317

CPC分类号： H01J37/3171 ,  H01J37/244 ,  H01J2237/24405 ,  H01J2237/24507 ,  H01J2237/24528 ,  H01J2237/24542 ,  H01J2237/30477 ,  H01J2237/31703

摘要： A system, method, and apparatus for determining a profile of an ion beam are provided. The apparatus comprises a measuring device positioned along a path of the ion beam, a drive mechanism, and a first plate rotatably coupled to the drive mechanism. The drive mechanism is operable to rotate the first plate about a first axis through a path of the ion beam, therein selectively blocking the ion beam from reaching the measuring device. The apparatus may comprise a second plate further rotatably coupled to the drive mechanism, wherein the drive mechanism is operable to rotate the second plate about the first axis through the path of the ion beam independently from the rotation of the first plate, therein further selectively blocking the ion beam from reaching the measuring device. The drive mechanism may further linearly translate first plate and/or second plate through the ion beam.

摘要翻译： 提供了一种用于确定离子束轮廓的系统，方法和装置。 该装置包括沿着离子束的路径定位的测量装置，驱动机构和可旋转地联接到驱动机构的第一板。 驱动机构可操作以使第一板围绕第一轴线旋转通过离子束的路径，其中选择性地阻挡离子束到达测量装置。 该装置可以包括进一步可旋转地联接到驱动机构的第二板，其中驱动机构可操作以独立于第一板的旋转使第二板围绕第一轴线旋转通过离子束的路径，其中进一步选择性地阻挡 离子束到达测量装置。 驱动机构可以进一步使第一板和/或第二板线性地平移通过离子束。

公开(公告)号：US20050232749A1

公开(公告)日：2005-10-20

申请号：US11099062

申请日：2005-04-05

申请人： John Vanderpot ,  John Pollock ,  Donald Berrian

发明人： John Vanderpot ,  John Pollock ,  Donald Berrian

IPC分类号： A61N5/00 ,  B65H1/00 ,  H01J37/317 ,  H01L21/00 ,  H01L21/687

CPC分类号： H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

摘要： A method for reciprocally transporting a workpiece on a scan arm through an ion beam is provided, wherein the scan arm is operably coupled to a motor comprising a rotor and stator that are individually rotatable about a first axis. An electromagnetic force applied between the rotor and stator rotates the rotor about the first axis and translates the workpiece through the ion beam along a first scan path. A position of the workpiece is sensed and the electromagnetic force between the rotor and stator is controlled in order to reverse the direction of motion of the workpiece along the first scan path, and wherein the control is based, at least in part, on the sensed position of the workpiece. The stator further rotates about the first axis in reaction to the rotation of the rotor, particularly in the reversal of direction of motion of the workpiece, thus acting as a reaction mass to the rotation of one or more of the rotor, scan arm, and workpiece.

摘要翻译： 提供了一种用于通过离子束在扫描臂上往复运送工件的方法，其中扫描臂可操作地耦合到包括转子和定子的电动机，该转子和定子可以围绕第一轴线单独旋转。 施加在转子和定子之间的电磁力围绕第一轴线旋转转子，并使工件沿第一扫描路径平移离子束。 感测工件的位置，并且控制转子和定子之间的电磁力以便沿着第一扫描路径反转工件的运动方向，并且其中控制至少部分地基于感测的 工件位置。 定子进一步围绕第一轴线转动，以反应转子的旋转，特别是在反转工件的运动方向上，从而作为与转子，扫描臂和转子的一个或多个的旋转的反作用质量 工件。

公开(公告)号：US20050232748A1

公开(公告)日：2005-10-20

申请号：US11098878

申请日：2005-04-05

申请人： John Vanderpot ,  John Pollock ,  Donald Berrian

发明人： John Vanderpot ,  John Pollock ,  Donald Berrian

IPC分类号： A61N5/00 ,  B65H1/00 ,  H01J37/317 ,  H01L21/00 ,  H01L21/687

CPC分类号： H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

摘要： A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationary reference. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the Workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

摘要翻译： 提供了一种用于扫描工件的往复驱动系统，方法和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于固定基准往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。

公开(公告)号：US20050230643A1

公开(公告)日：2005-10-20

申请号：US11098942

申请日：2005-04-05

申请人： John Vanderpot ,  John Pollock ,  Donald Berrian

发明人： John Vanderpot ,  John Pollock ,  Donald Berrian

IPC分类号： A61N5/00 ,  B65H1/00 ,  H01J37/317 ,  H01L21/00 ,  H01L21/687

CPC分类号： H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

摘要： A reciprocating drive system and apparatus for scanning a workpiece through an ion beam are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to the ion beam. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

摘要翻译： 提供了一种用于通过离子束扫描工件的往复驱动系统和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于离子束往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。