摘要:
The thin film transistor substrate includes a reflection area and a transmission area formed in a pixel region, a thin film transistor formed in the reflection area and connected to a gate line and a data line, an imprint layer formed in the reflection area and having an optical pattern surface, a reflective electrode formed on the imprint layer and having the same cross section as the optical pattern, a contact portion penetrating the imprint layer and the reflective electrode to expose a portion of a drain electrode of the thin film transistor, and a pixel electrode connected to the reflective electrode and connected to the drain electrode via the contact portion.
摘要:
An imprinting apparatus and a method of the same which form a residual film including a uniform thickness all over a substrate. The imprinting apparatus includes a substrate support which supports a substrate which is coated with an imprint resin on an upper surface thereof, an imprint mold arranged on an upper side of the substrate support and which forms a predetermined pattern by molding the imprint resin coated on the substrate, a pressure roller which pressurizes the imprint mold to adhere closely to the substrate, a pressure roller control unit which controls the pressure roller to change a moving velocity and an applied pressure of the pressure roller according to a position of the imprint mold, and a resin curing unit which cures the imprint resin on the substrate.
摘要:
An imprinting apparatus and a method of the same which form a residual film including a uniform thickness all over a substrate. The imprinting apparatus includes a substrate support which supports a substrate which is coated with an imprint resin on an upper surface thereof, an imprint mold arranged on an upper side of the substrate support and which forms a predetermined pattern by molding the imprint resin coated on the substrate, a pressure roller which pressurizes the imprint mold to adhere closely to the substrate, a pressure roller control unit which controls the pressure roller to change a moving velocity and an applied pressure of the pressure roller according to a position of the imprint mold, and a resin curing unit which cures the imprint resin on the substrate.