SENSING DEVICE AND FABRICATING METHOD THEREOF
    3.
    发明申请
    SENSING DEVICE AND FABRICATING METHOD THEREOF 审中-公开
    感应装置及其制作方法

    公开(公告)号:US20130153418A1

    公开(公告)日:2013-06-20

    申请号:US13443902

    申请日:2012-04-11

    IPC分类号: G01N27/30 B32B37/14 B32B37/02

    摘要: A sensing device is provided. A suction port of a chamber is sealed by using a gas sealing layer with a gas sealing filter. The gas sealing filter has a plurality of one-way passes. The one-way passes have a width in a range of several nanometers to several hundred nanometers. A gas molecular exhausts to the outside of the chamber through the one-way passes. Owing to preventing the material of gas sealing layer from flowing into the chamber by the gas sealing filter, superior sealing performance is achieved as compared to those adopting solder or sealing material, thereby facilitating control of the condition in the chamber.

    摘要翻译: 提供感测装置。 通过使用具有气体密封过滤器的气体密封层来密封腔室的吸入口。 气体密封过滤器具有多个单程通道。 单向通道的宽度在几纳米到几百纳米的范围内。 气体分子通过单程通过排气到室外。 由于通过气体密封过滤器防止气体密封层的材料流入室,与使用焊料或密封材料的密封性相比,实现了优异的密封性能,从而有助于控制室内的状态。