公开(公告)号：US06351686B1

公开(公告)日：2002-02-26

申请号：US09610702

申请日：2000-07-05

申请人： Junji Iwasaki ,  Atsushi Fujisaki ,  Tomohiro Yamaguchi

发明人： Junji Iwasaki ,  Atsushi Fujisaki ,  Tomohiro Yamaguchi

IPC分类号： G06F700

CPC分类号： H01L21/67727 ,  F02M5/125 ,  F02M37/12 ,  H01L21/67276

摘要： A semiconductor device manufacturing apparatus and a control method thereof which can shorten the manufacturing term of semiconductor devices are achieved. The semiconductor device manufacturing apparatus includes a plurality of processing apparatuses for taking out and processing semiconductor wafers successively which constitute a process lot, and including a standby port where a lot to be processed following processing of the process lot is put on standby. The semiconductor device manufacturing apparatus further includes a stocker for storing a lot to be transported to the standby port. According to the control method of the semiconductor device manufacturing apparatus, it is predicted when there is no standby wafer left in the processing apparatus in a prediction step. The predicted time is used to set transfer starting time when transfer of the next-processed lot to the standby port is started in a time setting step. A lot to be processed next is selected in a lot selecting step. The next-processed lot is transported to the processing apparatus at or after the transfer starting time in a transfer step.

摘要翻译： 实现了可以缩短半导体器件的制造术语的半导体器件制造装置及其控制方法。 半导体器件制造装置包括多个用于连续地取出并处理构成处理批次的半导体晶片的处理装置，并且包括备用端口，待处理批处理之后待处理的批次待机。 半导体器件制造装置还包括用于存储待传送到备用端口的批量的储料器。 根据半导体器件制造装置的控制方法，预测在预测步骤中在处理装置中没有留下待机晶片的情况。 在时间设定步骤中，开始将下一处理批次传送到备用端口时，预测时间设定传送开始时间。 在大量选择步骤中选择要处理的大量物品。 下一处理批次在传送步骤中的传送开始时刻或之后被传送到处理装置。

公开(公告)号：US6129496A

公开(公告)日：2000-10-10

申请号：US35921

申请日：1998-03-06

申请人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

发明人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

IPC分类号： B65G1/00 ,  B65G1/137 ,  B65G49/07 ,  G05D1/02 ,  H01L21/00 ,  H01L21/677 ,  B65H1/00

CPC分类号： H01L21/67294 ,  H01L21/67276 ,  H01L21/67724 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y10S414/135 ,  Y10S414/14

摘要： A stocker used in a semiconductor wafer cassette transportation apparatus comprises a plurality of stockers for storing a plurality of semiconductor wafer cassettes. Each stocker comprises manual output and input ports for exit and entry of semiconductor wafer cassettes by an operator, in which each port has an ID card reader/writer arranged lower than the bottom surface of the cassette and facing a communication arrangement at the bottom surface of an ID card attached on the side surface of a cassette. An automatic carrier transports cassettes between stockers and a processing apparatus, and an inter-stocker transport device transports cassettes between stockers. The number of semiconductor wafer cassettes that can be mounted on the manual output port is determined according to the maximum number of semiconductor wafer cassettes requested to be loaded by the processing apparatus. An embodiment of the invention includes automatic carrier input and output ports. An outer shield door arrangement for various ports of the stocker prevents intrusion of foreign objects.

摘要翻译： 在半导体晶片盒输送装置中使用的储料器包括用于存储多个半导体晶片盒的多个储料器。 每个储料器包括手动输出和输入端口，用于由操作者离开和进入半导体晶片盒，其中每个端口具有布置成低于盒的底表面的ID读卡器/写入器，并且面向位于 安装在盒子侧表面上的身份证。 自动载架在储料器和处理装置之间输送盒，并且储存间运输装置在储料器之间输送盒。 可以根据要求由处理装置加载的半导体晶片盒的最大数量来确定可以安装在手动输出端口上的半导体晶片盒的数量。 本发明的实施例包括自动载波输入和输出端口。 用于储存器各个端口的外屏蔽门装置防止异物侵入。

公开(公告)号：US06169935A

公开(公告)日：2001-01-02

申请号：US09035920

申请日：1998-03-06

申请人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

发明人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

IPC分类号： G06F700

CPC分类号： H01L21/67294 ,  H01L21/67276 ,  H01L21/67724 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y10S414/135 ,  Y10S414/14

摘要： In a stocker entry task control method employed in a semiconductor wafer cassette transportation apparatus that has high transportation ability of a semiconductor wafer cassette, a host computer sends an interrogation to a stocker in which a semiconductor wafer cassette is to be stored whether there is an available storage site therein. The stocker ascertains the storage site if available. Then, the host computer sends a transportation task instruction to an inter-stocker transport device or an automatic carrier. Alternatively, an entry task instruction is sent to the stocker.

摘要翻译： 在具有高半导体晶片盒的运送能力的半导体晶片盒输送装置中采用的储料器进入任务控制方法中，主计算机向要存储半导体晶片盒的储料器发送询问是否存在可用 储存地点。 储存者确定存储地点（如果有的话）。 然后，主计算机向存储器间运输装置或自动载体发送运输任务指令。 或者，进入任务指令被发送给储料器。

公开(公告)号：US5470392A

公开(公告)日：1995-11-28

申请号：US340350

申请日：1994-11-14

申请人： Yoshiaki Yamada ,  Junji Iwasaki ,  Masashi Ohmori

发明人： Yoshiaki Yamada ,  Junji Iwasaki ,  Masashi Ohmori

IPC分类号： H01L21/02 ,  H01L21/00 ,  H01L21/304 ,  H01L21/677 ,  G03D5/04

CPC分类号： H01L21/67173 ,  H01L21/67207 ,  H01L21/67276 ,  H01L21/67294 ,  H01L21/67778 ,  Y10S134/902

摘要： A semiconductor processing method includes the steps of carrying a case containing semiconductor wafers and to which an ID card is attached into semiconductor processing equipment at a first side of the semiconductor processing equipment; removing the ID card from the case; taking the semiconductor wafers out of the case; carrying the semiconductor wafers taken out of the case into a processing means on a second side, opposite to the first side, of the semiconductor processing equipment; processing the semiconductor wafers in the processing means; attaching the ID card corresponding to the semiconductor wafers to the case; taking the processed semiconductor wafers out of the processing means at the first side of the semiconductor processing equipment; putting the processed semiconductor wafers into the case to which the ID card is attached; and carrying the case outside the semiconductor equipment at the first side of the semiconductor equipment.

摘要翻译： 半导体处理方法包括以下步骤：在半导体处理设备的第一侧承载包含半导体晶片的壳体并将ID卡附着到半导体处理设备中; 从案件中取出身份证; 将半导体晶片从外壳中取出; 将从壳体取出的半导体晶片携带到半导体处理设备的与第一侧相对的第二侧的处理装置中; 处理所述处理装置中的半导体晶片; 将对应于半导体晶片的ID卡附接到壳体; 在半导体处理设备的第一侧将处理后的半导体晶片从处理装置中取出; 将经处理的半导体晶片放入附有ID卡的壳体中; 并且在半导体设备的第一侧将半导体设备外的外壳携带。

公开(公告)号：US20130138908A1

公开(公告)日：2013-05-30

申请号：US13351902

申请日：2012-01-17

申请人： Junji Iwasaki

发明人： Junji Iwasaki

IPC分类号： G06F12/02

CPC分类号： G06F3/0644 ,  G06F3/0607 ,  G06F3/067

摘要： The present invention provides a storage system, which efficiently uses a storage system internal storage area related to an internal volume in a case where an internal volume and an external volume are allocated to a pool. The storage system comprises a controller which manages a pool to which an internal volume and an external volume are allocated, and upon receiving a write request, provides a virtual volume to which one or more real pages inside the pool are allocated. In a case where the storage capacity of the pool is to be reduced, the allocation to the pool of the external volume is preferentially canceled over the internal volume.

摘要翻译： 本发明提供了一种存储系统，其在将内部卷和外部卷分配给池的情况下，有效地使用与内部卷相关的存储系统内部存储区域。 存储系统包括管理分配有内部卷和外部卷的池的控制器，并且在接收到写入请求时，提供分配了池内的一个或多个真实页面的虚拟卷。 在要减少池的存储容量的情况下，对外部卷的池的分配优先于内部卷取消。

公开(公告)号：US06772032B2

公开(公告)日：2004-08-03

申请号：US10388632

申请日：2003-03-17

申请人： Junji Iwasaki ,  Kazuyuki Mori

发明人： Junji Iwasaki ,  Kazuyuki Mori

IPC分类号： G06F1900

CPC分类号： H01L21/67271

摘要： A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empty carrier by a built-in type wafer transport apparatus under the instruction of the host computer. The carrier in which the product wafer determined as being failed is accommodated is regarded as a rework lot by the host computer. Based on manufacturing standard information for rework held by the host computer, rework processing is performed through a wafer manufacturing operation. Therefore, such a semiconductor device manufacturing line results in that the carrier accommodating the product wafer is transferred and handled smoothly.

公开(公告)号：US6134482A

公开(公告)日：2000-10-17

申请号：US73429

申请日：1998-05-06

申请人： Junji Iwasaki

发明人： Junji Iwasaki

IPC分类号： B65G47/50 ,  B65G43/08 ,  B65G49/07 ,  G05B19/418 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  G06F19/00

CPC分类号： H01L21/67276 ,  G05B19/41865 ,  H01L21/67769 ,  G05B2219/32266 ,  G05B2219/32319 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/28

摘要： Semiconductor wafer fabrication equipment comprising a selecting device for selecting semiconductor wafers destined to a processor on the basis of a remaining process time applicable to that processor in the equipment, a transporting device for transporting the selected semiconductor wafers to the processor, another selecting device for selecting a processor or a storage device constituting a transport destination to which to transport processed semiconductor wafers, and another transporting device for transporting the semiconductor wafers to the destination processor or storage device in accordance with a transport control changeover code read from the processors and storage devices of the equipment.

摘要翻译： 半导体晶片制造设备包括：选择装置，用于基于可应用于设备中的该处理器的剩余处理时间选择发往处理器的半导体晶片;将所选择的半导体晶片传送到处理器的传送装置，用于选择的选择装置 构成传送处理的半导体晶片的传送目的地的处理器或存储装置，以及根据从处理器和存储装置读取的传送控制转换代码将半导体晶片传送到目的地处理器或存储装置的另一传送装置 设备。

公开(公告)号：US6151533A

公开(公告)日：2000-11-21

申请号：US36196

申请日：1998-03-06

申请人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

发明人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

IPC分类号： B65G1/00 ,  B65G1/137 ,  B65G49/07 ,  G05D1/02 ,  H01L21/00 ,  H01L21/677 ,  G06F7/00

CPC分类号： H01L21/67294 ,  H01L21/67276 ,  H01L21/67724 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y10S414/135 ,  Y10S414/14

摘要： According to a collation method of stocker storage in a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, a host computer responds to an instruction from an operator to interrogate a stocker controller about storage of a semiconductor wafer cassette in a stocker. The stocker controller receiving the interrogation reports storage of a semiconductor wafer cassette in a stocker to the host computer. When the storage information retained by the host computer differs from the storage information reported from the stocker controller, the host computer provides a display of the discrepancy in storage information on an operator's terminal.

摘要翻译： 根据具有高半导体晶片盒运输能力的半导体晶片盒运送装置中的储料器储存的核对方法，主计算机响应于来自操作者的指令来询问储料器控制器关于储存器中的半导体晶片盒的存储。 接收询问的储料器控制器将储存器中的半导体晶片盒的存储报告给主计算机。 当由主计算机保存的存储信息与存储器控制器报告的存储信息不同时，主计算机提供操作者终端上的存储信息中的差异的显示。

公开(公告)号：US6050768A

公开(公告)日：2000-04-18

申请号：US35818

申请日：1998-03-06

申请人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

发明人： Junji Iwasaki ,  Junichi Katsube ,  Yasushi Itami

IPC分类号： B65G1/00 ,  B65G1/137 ,  B65G49/07 ,  G05D1/02 ,  H01L21/00 ,  H01L21/677 ,  G06F19/00

CPC分类号： H01L21/67294 ,  H01L21/67276 ,  H01L21/67724 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y10S414/135 ,  Y10S414/14

摘要： According to an automatic carrier control method of a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, an automatic carrier carries a semiconductor wafer cassette to an automatic carrier related inlet port of a stocker under control of a host computer. The automatic carrier confirms whether a semiconductor wafer cassette is left on the inlet port. If there is no preceding semiconductor wafer cassette, a semiconductor wafer cassette is placed on the inlet port. If there is a preceding semiconductor wafer cassette, the automatic carrier waits for a predetermined time at inlet port for the preceding semiconductor wafer cassette to be removed. When the preceding semiconductor wafer cassette is not removed at an elapse of a predetermined time, an error is issued to the automatic carrier.

摘要翻译： 根据具有高半导体晶片盒输送能力的半导体晶片盒输送装置的自动载体控制方法，在主计算机的控制下，自动载体将半导体晶片盒携带到储料器的自动载体相关入口端口。 自动载体确认半导体晶片盒是否留在入口上。 如果没有先前的半导体晶片盒，则将半导体晶片盒放置在入口上。 如果存在先前的半导体晶片盒，则自动载体等待在先前的半导体晶片盒的入口处的预定时间被去除。 当前一半导体晶片盒在预定时间过去不被去除时，向自动载体发出错误。

公开(公告)号：US5383482A

公开(公告)日：1995-01-24

申请号：US970471

申请日：1992-11-02

申请人： Yoshiaki Yamada ,  Junji Iwasaki ,  Masashi Ohmori

发明人： Yoshiaki Yamada ,  Junji Iwasaki ,  Masashi Ohmori

IPC分类号： H01L21/02 ,  H01L21/00 ,  H01L21/304 ,  H01L21/677 ,  B08B3/02

CPC分类号： H01L21/67173 ,  H01L21/67207 ,  H01L21/67276 ,  H01L21/67294 ,  H01L21/67778 ,  Y10S134/902

摘要： Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the equipment. Thus, the present invention makes it possible to reduce equipment size and achieve highly efficient factory automation. Furthermore, in a semiconductor processing equipment module according to the present invention, each item of semiconductor processing equipment has its own ID-card stocking device. As a result, the number of case carriers can be reduced and a space reduction with increased factory automation can be easily realized.

摘要翻译： 半导体处理设备包括ID卡去除机器人，ID卡放养设备和ID卡附着机器人，以便在设备内执行身份证的管理。 因此，本发明可以减小设备尺寸并实现高效率的工厂自动化。 此外，在本发明的半导体处理装置模块中，各项目的半导体处理装置具有自己的ID卡存放装置。 结果，可以容易地实现箱体承载体的数量并且可以容易地实现具有增加的工厂自动化的空间减小。