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公开(公告)号:US12091636B2
公开(公告)日:2024-09-17
申请号:US17516668
申请日:2021-11-01
Applicant: KCTECH CO., LTD.
Inventor: Kyong Jin Jung , Ga Young Jung , Young Ho Yun , Kun Hee Park , Young Gon Kim , Yong Ho Jeong
IPC: C11D1/00 , C09G1/02 , C09K3/14 , C11D1/14 , H01L21/304
CPC classification number: C11D1/143 , C09G1/02 , C09K3/1409 , C11D1/004 , C11D2111/22 , H01L21/304
Abstract: A composition for dissolving abrasive particles, and a cleaning method using the composition are provided. The composition includes a sulfur-containing organic acid, a fluorine ion-containing compound, and a solvent, and a turbidity change rate (%) measured at 60° C. for 15 minutes may be in a range of −80 to −99.
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公开(公告)号:US11845912B2
公开(公告)日:2023-12-19
申请号:US17416420
申请日:2019-08-07
Applicant: KCTECH CO., LTD.
Inventor: Ga Young Jung , Yong Ho Jeong , Kun Hee Park , Young Gon Kim , Young Ho Yoon , Young Lok Yoon
CPC classification number: C11D3/2075 , C11D1/146 , C11D1/345 , C11D3/2093 , C11D3/3409 , C11D3/36 , C11D11/0047
Abstract: The present disclosure relates to a cleaning liquid composition and a cleaning method using the same. A polishing slurry composition according to an embodiment of the present disclosure includes: a chelating agent containing an organic salt; and an anionic surfactant.
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