公开(公告)号：US09116103B2

公开(公告)日：2015-08-25

申请号：US14043783

申请日：2013-10-01

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01J4/00 ,  G01N21/21 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US09506871B1

公开(公告)日：2016-11-29

申请号：US14578949

申请日：2014-12-22

Applicant: KLA-Tencor Corporation

Inventor： Klaus Flock

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  F21K99/00 ,  H05H1/46 ,  G02B27/09

CPC classification number: G01N21/8806 ,  F21K99/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/0697 ,  G02B27/09 ,  H05H1/46

Abstract: Methods and systems are described herein for producing high radiance illumination light suitable for semiconductor metrology. A cold gas is repeatedly ignited by a pulsed laser to periodically generate accessible, high brightness illumination light generated during each break-down event. The pulse duration and repetition period are set to ignite, but not sustain fully formed plasma. The central plasma core emits high color temperature light before a cooler plasma region forms around the central core. Thus, after ignition, the plasma is extinguished before the arrival of the next laser pulse. The repeated plasma ignition/extinction cycle generates illumination light at high color temperature that is accessible for illumination purposes in a metrology application. In one embodiment, a bulb filled with Xenon gas at 10 atmospheres is repeatedly ignited with a pulsed laser having pulse duration of 10 nanoseconds to generate illumination light with a color temperature of approximately 60,000 Kelvin.

Abstract translation: 本文描述了用于生产适用于半导体计量学的高辐射照明光的方法和系统。 冷气通过脉冲激光反复点燃，以周期性地产生在每个故障事件期间产生的可接近的高亮度照明光。 脉冲持续时间和重复周期设置为点燃，但不能维持完全形成的等离子体。 中央等离子体核发射高色温，然后在中心芯周围形成较冷的等离子体区域。 因此，在点火之后，等离子体在下一个激光脉冲到达之前熄灭。 重复的等离子体点火/消光循环产生在高色温下的照明光，其在计量应用中可用于照明目的。 在一个实施例中，用脉冲持续时间为10纳秒的脉冲激光反复点燃在10个大气压下填充有氙气体的灯泡，以产生色温约为60,000开尔文的照明光。

公开(公告)号：US09310290B2

公开(公告)日：2016-04-12

申请号：US14745047

申请日：2015-06-19

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/00 ,  G01N21/21 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

公开(公告)号：US20150285735A1

公开(公告)日：2015-10-08

申请号：US14745047

申请日：2015-06-19

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/21 ,  G01N21/95

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。

公开(公告)号：US20170052112A1

公开(公告)日：2017-02-23

申请号：US15344704

申请日：2016-11-07

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01N21/23 ,  G01N21/21 ,  G01N21/95 ,  G02B5/30

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US09217717B2

公开(公告)日：2015-12-22

申请号：US14103635

申请日：2013-12-11

Applicant: KLA-Tencor Corporation

Inventor： Klaus Flock

IPC: G01N21/95

CPC classification number: G01N21/9501

Abstract: Methods and systems for enhancing the throughput of a metrology system generating measurement signals based on at least two different optical properties of the illumination light are presented. A detector having a two dimensional photosensitive area is subdivided into multiple photosensitive stripes by multiple, independent linear arrays of shift register elements located within the photosensitive area. Charge transfer from pixels within each stripe is directed to a distinct linear array of shift register elements. Each photosensitive stripe is able to resolve an optical property dispersed across the length of each stripe with relatively high resolution. In addition, the detector is able to resolve another optical property dispersed across several photosensitive stripes in a direction orthogonal to each linear array of shift registers at a relatively low resolution.

Abstract translation: 提出了用于增强基于照明光的至少两种不同光学特性产生测量信号的度量系统的吞吐量的方法和系统。 具有二维感光区域的检测器通过位于感光区域内的移位寄存器元件的多个独立的线性阵列被细分为多个光敏条纹。 每个条带内的像素的电荷转移被引导到移位寄存器元件的不同线性阵列。 每个光敏条纹能够以相对较高的分辨率来分辨分散在每个条带的长度上的光学特性。 此外，检测器能够以相对低的分辨率解析在与移位寄存器的每个线性阵列正交的方向上分散在几个光敏条纹上的另一光学性质。

公开(公告)号：US09857292B2

公开(公告)日：2018-01-02

申请号：US15344704

申请日：2016-11-07

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01J4/00 ,  G01N21/23 ,  G02B5/30 ,  G01N21/21 ,  G02F1/13363 ,  G01N21/95

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

公开(公告)号：US09519093B2

公开(公告)日：2016-12-13

申请号：US14466369

申请日：2014-08-22

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G01J4/00 ,  G02B5/30 ,  G01N21/21 ,  G02F1/13363

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US20150055123A1

公开(公告)日：2015-02-26

申请号：US14466369

申请日：2014-08-22

Applicant: KLA-Tencor Corporation

Inventor： Lawrence Rotter ,  Klaus Flock ,  Muzammil Arain ,  David Y. Wang

IPC: G02B5/30 ,  G01N21/21 ,  G01J1/42

CPC classification number: G01N21/23 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/068 ,  G02B5/3083 ,  G02B5/3091 ,  G02F1/13363

Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.

Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。

公开(公告)号：US20140375981A1

公开(公告)日：2014-12-25

申请号：US14043783

申请日：2013-10-01

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Klaus Flock ,  Lawrence Rotter ,  Shankar Krishnan ,  Johannes D. de Veer ,  Catalin Filip ,  Gregory Brady ,  Muzammil Arain ,  Andrei Shchegrov

IPC: G01N21/88

CPC classification number: G01N21/211 ,  G01B2210/56 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/214 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。