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公开(公告)号：US20170165715A1
公开(公告)日：2017-06-15
申请号：US15325492
申请日：2015-07-13
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： WOJTEK SUDOL , PETER DIRKSEN , VINCENT ADRIANUS HENNEKEN , RONALD DEKKER , MARCUS CORNELIS LOUWERSE
CPC classification number: B06B1/0292 , B81B2201/0292 , B81C1/00214 , G01N29/2406 , G01N29/262 , G01N2291/02475 , G01N2291/106 , H04R19/00
Abstract: A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to the CMUT cells at the edge of the tile. This enables the CMUT cells of continuous rows or columns to exhibit a constant pitch over multiple CMUT cell tiles. The tiles also contain interconnect electrodes along an edge for making electrical connections to the tiles with flex circuit.
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公开(公告)号：US20180333136A1
公开(公告)日：2018-11-22
申请号：US15774611
申请日：2016-11-10
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： PAWEL MICHALSKI , FRANCISCUS JOHANNES GERARDUS HAKKENS , EDWARD THEODORUS MARIA BERBEN , KEVIN GRAYSON WICKLINE , LUCAS JOHANNES ANNA MARIA BECKERS , PETER DIRKSEN
CPC classification number: A61B8/4483 , A61L31/048 , A61L31/049 , B06B1/0207 , B06B1/0292 , G01S7/52079 , G01S15/8938 , G10K11/002
Abstract: An acoustic window layer for an ultrasound array, which layer has an inner surface arranged to face the array and an outer surface arranged to face a patient, and comprising an outer layer comprising a thermoplastic polymer selected from a polyolefin family (TPO) and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer. In a preferred embodiment the blend comprises a copolymer of ethylene-octene and polymethylpentene. The thermoplastic polyolefin provides the blend with mechanical, chemical stability and low acoustic wave attenuation; whilst the polyolefin elastomer provides a possibility to tune the acoustic impedance of the blend and to further improve its acoustic wave propagation properties.
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Patent Agency Ranking
公开(公告)号：US20150162851A1
公开(公告)日：2015-06-11
申请号：US14623595
申请日：2015-02-17
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： JOHAN H. KLOOTWIJK , PETER DIRKSEN , MARCEL MULDER , ELISABETH M.L. MOONEN
CPC classification number: B60B1/0292 , B06B1/0292 , H02N1/006 , H02N1/08 , Y10T29/49005
Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application. Further, it is disclosed a method for manufacturing a transducer according to the patent application, wherein the transducer is manufactured with the help of a CMOS manufacturing process, wherein the transducer can be manufactured as a post-processing feature during a CMOS process.
Abstract translation: 该专利申请公开了一种电容式微机械超声换能器，其包括硅衬底; 一个空腔 布置在硅衬底和腔之间的第一电极; 其中所述第一电极布置在所述空腔下方; 膜，其中所述膜布置在所述腔的上方并与所述第一电极相对; 第二电极，其中所述第二电极布置在所述空腔上方并与所述第一电极相对; 其中所述第二电极布置在所述膜中或靠近所述膜，其中所述第一电极和所述第二电极适于由电压供应; 以及布置在所述第一电极和所述第二电极之间的第一隔离层，其中所述第一隔离层包括电介质。 还描述了用于产生或检测超声波的系统，其中该系统包括根据该专利申请的换能器。 此外，公开了根据专利申请的用于制造换能器的方法，其中借助于CMOS制造工艺制造所述换能器，其中所述换能器可以在CMOS工艺期间被制造为后处理特征。
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公开(公告)号：US20180374471A1
公开(公告)日：2018-12-27
申请号：US16062656
申请日：2016-12-16
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： PETER DIRKSEN , SERGEI SHULEPOV , FRANCISCUS JOHANNES GERARDUS HAKKENS , PETRUS HENRICUS MARIA TIMMERMANS , LUCAS JOHANNES ANNA MARIA BECKERS
Abstract: An acoustic lens suitable for a CMUT array (74) is provided. The acoustic lens comprising: a first layer (47) comprising a thermoset elastomer having a polymeric material selected from hydrocarbons, wherein the first layer has an inner surface (72) arranged to face the array and an outer convex shaped surface (40) arranged to oppose the inner surface; and a second layer (42) coupled to the outer surface of the first layer and comprising thermoplastic polymer polymethylpentene and an elastomer selected from the polyolefin family (POE) blended therein, wherein the outer layer located at the outer surface of the acoustic window layer, wherein the first layer has a first acoustic wave velocity (v1) and the second layer has a second acoustic wave velocity (v2), said second velocity is larger than the first acoustic wave velocity.
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公开(公告)号：US20180065148A1
公开(公告)日：2018-03-08
申请号：US15554454
申请日：2016-02-23
Applicant: KONINKLIJKE PHILIPS N.V.
CPC classification number: B06B1/0292 , G01S7/521 , G01S15/02
Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7′), which opposes the first electrode and the substrate with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface. The acoustic window layer comprises a first layer comprising molecules of antioxidant and a polymeric material (47) with insulating particles (41) embedded therein, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or below 0.95 g/cm3 and an acoustic impedance equal or above 1.45 MRayl. This acoustic window layer provides an improved acoustic performance, such as wide bandwidth and low attenuation, in application with the CMUT based array.
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公开(公告)号：US20180021813A1
公开(公告)日：2018-01-25
申请号：US15552585
申请日：2016-02-25
Applicant: KONINKLIJKE PHILIPS N.V.
CPC classification number: B06B1/06 , A61B8/4209 , B06B1/0292 , B06B1/067 , B32B7/12 , G10K11/02 , G10K11/30 , H01L41/083
Abstract: An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4) having a first electrode (7); a cell membrane (5) having a second electrode (7′), which opposes the first electrode with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface; the acoustic window layer is in a direct contact with the cell membrane and comprises a first layer comprising molecules of antioxidant and a polymeric material, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or 3 below 0.95 g/cm and an acoustic impedance equal or above 1.4 MRayl. The array may further comprise comprising at least one drive circuit coupled to the cell and adapted to (a) bring the membrane into a collapsed state in which the membrane is collapsed to the substrate in the central part, by applying a d.c. voltage over the first and the second electrodes of the at least one CMUT cell, and (b) activate the CMUT cell by applying an a.c. voltage having a CMUT operating frequency over the first and the second electrodes of the at least one said CMUT cell. This acoustic window layer provides an improved acoustic performance, such as wide bandwidth and low attenuation, in application with the CMUT based array, especially in the collapsed operation mode.
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7.发明申请公开(公告)号：US20150162852A1
公开(公告)日：2015-06-11
申请号：US14624945
申请日：2015-02-18
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： PETER DIRKSEN , RUEDIGER MAUCZOK , KORAY KARAKAYA , JOHAN HENDRIK KLOOTWIJK , BOUT MARCELIS , MARCEL MULDER
CPC classification number: H02N1/006 , B06B1/0292 , B81B3/00 , B81B2203/0127 , B81C1/00158 , B81C1/00373 , H02N1/08
Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
Abstract translation: 本发明涉及一种制造电容微加工的换能器（100），特别是CMUT的方法，该方法包括在衬底（1）上沉积第一电极层（10），沉积第一电介质膜（20） 在所述第一电极层（10）上，在所述第一介电膜（20）上沉积牺牲层（30），所述牺牲层（30）可去除以形成所述换能器的空腔（35），沉积第二电介质膜 40），并且在所述第二电介质膜（40）上沉积第二电极层（50），其中所述第一电介质膜（20）和/或所述第二电介质膜（40）包括第一层 包括氧化物，包含高k材料的第二层和包含氧化物的第三层，并且其中所述沉积步骤通过原子层沉积进行。 本发明还涉及通过这种方法制造的电容式微加工的换能器（100），特别是CMUT。
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