公开(公告)号：US11944998B2

公开(公告)日：2024-04-02

申请号：US16822018

申请日：2020-03-18

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Byung Chul Lee ,  Dong-Hyun Kang ,  Jin soo Park ,  Tae Song Kim

IPC: B06B1/02 ,  B81B3/00 ,  B81C1/00

CPC classification number: B06B1/0292 ,  B81B3/0086 ,  B81C1/00698 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2207/07 ,  B81C2201/0171 ,  B81C2201/0178 ,  B81C2201/0194

Abstract: A method of fabricating a capacitive micromachined ultrasonic transducer (CMUT) according to one aspect of the present invention may include forming, on a semiconductor substrate, a first region implanted with impurity ions at a first average concentration and a second region implanted with no impurity ions or implanted with the impurity ions at a second average concentration lower than the first average concentration, forming an insulating layer by oxidizing the semiconductor substrate wherein the insulating layer includes a first oxide layer having a first thickness on at least a part of the first region and a second oxide layer having a second thickness smaller than the first thickness on at least a part of the second region, and forming a membrane layer on the insulating layer such that a gap is defined between the second oxide layer and the membrane layer.

公开(公告)号：US12016726B2

公开(公告)日：2024-06-25

申请号：US17326335

申请日：2021-05-21

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Byung Chul Lee ,  Shinyong Shim ,  Dong-Hyun Kang ,  Hae Youn Kim ,  Hyung Min Kim ,  Ki Joo Pahk ,  Maesoon Im

IPC: A61B8/00 ,  A61N7/00 ,  B06B1/02 ,  G01S7/52 ,  G01S15/89

CPC classification number: A61B8/4494 ,  A61B8/4488 ,  A61N7/00 ,  B06B1/0292 ,  G01S7/52079 ,  G01S15/8915 ,  A61N2007/0052 ,  B06B2201/76

Abstract: A flexible ultrasound transducer according to an embodiment of the present disclosure includes a substrate having a central part and a plurality of extended parts extending from the central part; an ultrasound probe disposed at the central part of the substrate to acquire an ultrasound image of a region of interest; and a focused ultrasound output unit disposed at the extended parts of the substrate to output a focused ultrasound to the region of interest, wherein the focused ultrasound output unit disposed at the extended parts of the substrate has a flexible property and is deformable. According to the structure of an embodiment, it is possible to simultaneously achieve ultrasound imaging and ultrasonic therapy such as lesion stimulation or removal through focused ultrasound, and adjust the focal position of focused ultrasound or improve the focal sensitivity through flexible movement.

公开(公告)号：US11957514B2

公开(公告)日：2024-04-16

申请号：US17273308

申请日：2021-02-01

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Byung Chul Lee ,  Dong-Hyun Kang ,  Shinyong Shim

IPC: A61B8/00 ,  A61B8/08

CPC classification number: A61B8/4483 ,  A61B8/5207

Abstract: The present disclosure relates to a method for determining a relative position between arrays of a flexible array device. The flexible array device according to an embodiment includes a plurality of arrays arranged at a predetermined interval in a deformable substrate, and the method includes measuring the first capacitance between adjacent arrays, measuring the second capacitance between the adjacent arrays after deformation of the substrate, and determining a relative position between the adjacent arrays based on the first capacitance measurement value and the second capacitance measurement value. According to an embodiment, the relative position between the arrays may be determined by measuring the capacitance between the adjacent arrays of the plurality of arrays arranged in the deformable substrate and measuring a change in capacitance caused by the deformation (contraction, relaxation, bending) of the substrate.