Shape Detection Device and Shape Detection Method
    1.
    发明申请
    Shape Detection Device and Shape Detection Method 有权
    形状检测装置及形状检测方法

    公开(公告)号:US20080134739A1

    公开(公告)日:2008-06-12

    申请号:US11919489

    申请日:2006-03-10

    IPC分类号: B21B38/00 B21B23/00

    摘要: Provided is a shape detection device capable of detecting meandering of a strip with high accuracy and a method thereof. Accordingly, the present invention is formed so as to include a plurality of split rolls (23) provided in a width direction of a rolling material (S); a table (13) which guides the rolling material (S) and which is rotatably supported; a fixing member (25) supported by the table (13); torque detectors (29a, 29b) for separately detecting loads acting on both ends of the split rolls (23) when the rolling material (S) comes in contact with the split roll (23) as moments; supporting arms (24a, 24b) of which one end rotatably supports the split roll (23) and the other end is supported by the fixing member (25) through the torque detectors (29a, 29b); a meandering amount computing unit (41) for computing a meandering amount of the rolling material using the moments detected by the torque detectors (29a, 29b), and a plate shape computing unit (42) for computing a plate shape of the rolling material (S) using the moments and the meandering amount.

    摘要翻译: 提供一种能够高精度地检测条带的弯曲的形状检测装置及其方法。 因此,本发明形成为包括在轧制材料(S)的宽度方向上设置的多个分割辊(23)。 引导滚动材料(S)并被可旋转地支撑的工作台(13) 由所述台(13)支撑的固定构件(25); 扭转检测器(29a,29b),用于当轧制材料(S)以分裂辊(23)接触作为力时分别检测作用在分割辊(23)两端的负载; 支撑臂(24a,24b)的一端可旋转地支撑分割辊(23),另一端通过转矩检测器(29a,29b)由固定构件(25)支撑; 用于使用由扭矩检测器(29a,29b)检测到的力矩来计算滚动材料的曲折量的曲折量计算单元(41),以及用于计算滚动的板形的板形计算单元(42) 材料(S)使用时刻和蜿蜒数量。

    Shape detection device and shape detection method
    2.
    发明授权
    Shape detection device and shape detection method 有权
    形状检测装置和形状检测方法

    公开(公告)号:US08051692B2

    公开(公告)日:2011-11-08

    申请号:US11919489

    申请日:2006-03-10

    IPC分类号: B21B37/28 B21B38/00

    摘要: A shape detection device capable of detecting meandering of a strip with high accuracy and a method thereof. The device includes a plurality of split rolls provided in a width direction of a rolling material; a table which guides the rolling material and which is rotatably supported; a fixing member supported by the table; torque detectors for separately detecting loads acting on both ends of the split rolls when the rolling material comes in contact with the split roll as moments; supporting arms of which one end rotatably supports the split roll and the other end is supported by the fixing member through the torque detectors; a meandering amount computing unit for computing a meandering amount of the rolling material using the moments detected by the torque detectors, and a plate shape computing unit for computing a plate shape of the rolling material using the moments and the meandering amount.

    摘要翻译: 能够高精度地检测条纹的形状检测装置及其方法。 该装置包括沿轧制材料的宽度方向设置的多个分割辊; 引导滚动材料并被可旋转地支撑的工作台; 由桌子支撑的固定构件; 扭矩检测器,用于当轧制材料以分裂辊接触作为力矩时分别检测作用在分割辊两端的负载; 其一端可旋转地支撑分割辊的支撑臂,另一端由固定构件通过扭矩检测器支撑; 用于使用由扭矩检测器检测到的力矩计算滚动材料的曲折量的曲折量计算单元,以及用于使用力矩和曲折量计算轧制材料的板形的板形计算单元。

    WIND TURBINE
    3.
    发明申请
    WIND TURBINE 审中-公开
    风力涡轮机

    公开(公告)号:US20140119919A1

    公开(公告)日:2014-05-01

    申请号:US14113491

    申请日:2012-05-08

    IPC分类号: F03D11/00

    摘要: In lightning protection equipment of a wind turbine, it is required to ease the maintenance with maintaining high safety. The lightning current received by a receptor of a blade is conducted to an earth line in the blade. The earth line is conducted to the internal space of the rotor head via the internal side space of the bearing for changing the pitch angle of the blade. It is possible to conduct the lightning current to the rotor head side without using the bearing as the current route and without using a sliding or wearing member such as a brash or the like.

    摘要翻译: 在风力发电机的防雷设备中,要保持高安全性,便于维护。 由叶片的受体接收的雷电电流被传导到叶片中的接地线。 地线通过轴承的内侧空间传递到转子头的内部空间,用于改变叶片的俯仰角。 可以不使用轴承作为当前路线而将雷电电流导向转子头侧,并且不使用诸如刷子等的滑动或磨损构件。

    Room temperature bonding apparatus
    4.
    发明授权
    Room temperature bonding apparatus 有权
    室温接合装置

    公开(公告)号:US09005390B2

    公开(公告)日:2015-04-14

    申请号:US13530714

    申请日:2012-06-22

    摘要: A room temperature bonding apparatus includes angle adjustment means supporting a first sample stage holding a first substrate so as to be able to change a direction of the first sample stage; a first driving device driving the first stage in a first direction; a second driving device driving a second sample stage holding a second substrate in a second direction not parallel to the first direction; and a carriage support table supporting the second sample stage in the first direction when the second substrate and the first substrate are brought into contact. The apparatus can impose a load exceeding a withstand load of the second driving device on the first and second substrates. Further, the apparatus uses angle adjustment means to change direction of the first substrate to be parallel with the second substrate and uniformly impose the larger load on a bonding surface.

    摘要翻译: 室温接合装置包括角度调节装置,支撑保持第一基板的第一样品台,以便能够改变第一样品台的方向; 第一驱动装置,其沿第一方向驱动第一级; 第二驱动装置,驱动在不与第一方向平行的第二方向上保持第二基板的第二样品台; 以及当所述第二基板和所述第一基板接触时,在所述第一方向上支撑所述第二样品台的托架支撑台。 该装置可以施加超过第二驱动装置的耐受负载的负载在第一和第二基板上。 此外,该装置使用角度调节装置来改变与第二基板平行的第一基板的方向,并将较大的负载均匀地施加在接合表面上。

    FILM-THICKNESS MEASUREMENT METHOD AND APPARATUS THEREFOR, AND THIN-FILM DEVICE FABRICATION SYSTEM
    5.
    发明申请
    FILM-THICKNESS MEASUREMENT METHOD AND APPARATUS THEREFOR, AND THIN-FILM DEVICE FABRICATION SYSTEM 失效
    薄膜厚度测量方法及其设备及薄膜器件制造系统

    公开(公告)号:US20100177326A1

    公开(公告)日:2010-07-15

    申请号:US12517110

    申请日:2007-10-31

    IPC分类号: G01B11/06

    摘要: Objects are to reduce the burden on an operator and to improve fabrication efficiency. A transparent conductive film or a transparent optical film formed on a substrate W is irradiated with line illumination light by means of a line illumination device 3, line reflected light reflected at the transparent conductive film or the transparent optical film is detected with a camera, a color evaluation value of the detected reflected light is measured, and a film thickness corresponding to the measured color evaluation value is obtained using a film-thickness characteristic in which the color evaluation value is associated with the film thickness.

    摘要翻译: 对象是减轻操作员的负担并提高制造效率。 利用线照明装置3照射在基板W上形成的透明导电膜或透明光学膜,利用照相机检测在透明导电膜或透明光学膜反射的线反射光, 测定检测出的反射光的颜色评价值,使用色彩评价值与膜厚相关联的膜厚特性,求出与测定色彩评价值对应的膜厚。

    Rotating body
    6.
    发明授权
    Rotating body 有权
    旋转体

    公开(公告)号:US08794924B2

    公开(公告)日:2014-08-05

    申请号:US12832152

    申请日:2010-07-08

    IPC分类号: F01D5/32

    摘要: A rotating body includes a rotor disk 10 that has a moving blade fitting groove 11 that is annularly provided along the outer circumference and a moving blade lead-in hole 12 that is provided in the outer circumference and is in communication with the moving blade fitting groove 11; a plurality of moving blades 20 that are consecutively provided in the outer circumference and that each have a blade root 21 that is fitted in the moving blade fitting groove 11 and a wing body 23 that projects to the outer side of the rotor disk 10; two special moving blades 20A and 20B that each have a blade root 21 of which a portion is fitted in the moving blade fitting groove 11 and a wing body 23 that projects to the outer side of the rotor disk 10, and that by mutually adjoining block the moving blade lead-in hole 12; and a tensioning key 13 that is inserted between the moving blades 20, in which the tensioning key 13 is provided with an insertion portion whose thickness dimension in the circumferential direction gradually increases from one end on the inner side in the radial direction toward the other end on the outer side in the radial direction.

    摘要翻译: 旋转体包括转子盘10,转子盘10具有沿着外周环形地设置的动叶片嵌合槽11和设置在外周并与动叶片嵌合槽连通的活动叶片导入孔12 11; 多个移动叶片20,其连续地设置在外周,并且各自具有嵌合在动叶片嵌合槽11中的叶根21和向转子盘10的外侧突出的翼体23; 两个特殊的活动叶片20A和20B,其各自具有叶片根部21,其一部分装配在动叶片装配槽11中;翼体23突出到转子盘10的外侧,并且通过相互邻接的块 动叶片引入孔12; 以及插入在动叶片20之间的张紧键13,其中张紧键13设置有沿圆周方向的厚度尺寸从径向内侧的一端朝向另一端的一端逐渐增大的插入部 在径向的外侧。

    Room temperature bonding apparatus
    7.
    发明授权
    Room temperature bonding apparatus 有权
    室温接合装置

    公开(公告)号:US08857487B2

    公开(公告)日:2014-10-14

    申请号:US12919997

    申请日:2008-03-11

    摘要: A room temperature bonding apparatus includes: an angle adjustment mechanism that supports a first sample stage holding a first substrate to a first stage so as to be able to change a direction of the first sample stage; a first driving device that drives the first stage in a first direction; a second driving device that drives a second sample stage holding a second substrate in a second direction not parallel to the first direction; and a carriage support table that supports the second sample stage in the first direction when the second substrate and the first substrate are brought into press contact with each other. In this case, the room temperature bonding apparatus can impose a larger load exceeding a withstand load of the second driving device on the first substrate and the second substrate. Further, the room temperature bonding apparatus can use the angle adjustment mechanism to change a direction of the first substrate such that the first substrate and the second substrate come into parallel contact with each other, and uniformly impose the larger load on a bonding surface.

    摘要翻译: 室温接合装置包括:角度调节机构,其将保持第一基板的第一样品台支撑到第一阶段,以便能够改变第一样品台的方向; 第一驱动装置,其以第一方向驱动第一级; 第二驱动装置,其驱动在不与第一方向平行的第二方向上保持第二基板的第二样品台; 以及当第二基板和第一基板彼此压接时支撑第一方向上的第二样品台的托架支撑台。 在这种情况下,室温接合装置可以在第一基板和第二基板上施加超过第二驱动装置的承受负荷的较大载荷。 此外,室温接合装置可以使用角度调节机构来改变第一基板的方向,使得第一基板和第二基板彼此平行接触,并且在接合表面上均匀地施加较大的负载。

    Alignment unit control apparatus and alignment method
    8.
    发明授权
    Alignment unit control apparatus and alignment method 有权
    对齐单元控制装置及对准方法

    公开(公告)号:US08737719B2

    公开(公告)日:2014-05-27

    申请号:US13056566

    申请日:2009-10-28

    IPC分类号: G06K9/00

    摘要: An alignment unit control apparatus according to the present invention includes: an imaging section configured to control cameras to image a plurality of regions on a surface of a substrate to generate a plurality of images; a region detecting section configured to select a detection region from the plurality of regions based on the plurality of images; and an aligning section configured to align the substrate based on an alignment image obtained by imaging a mark of the substrate in the detection region by one of the plurality of cameras. For this reason, the alignment unit control apparatus does not need to have another mechanism for the purpose of positioning the mark for alignment in the field of vision of the camera, and can more easily be manufactured, and a region of an alignment mark can be detected more easily.

    摘要翻译: 根据本发明的对准单元控制装置包括:成像部,被配置为控制相机以对基板的表面上的多个区域进行成像以生成多个图像; 区域检测部,被配置为基于所述多个图像从所述多个区域中选择检测区域; 以及对准部,其被配置为基于通过所述多个照相机中的一个相机在所述检测区域中对所述基板的标记进行成像而获得的对准图像对准所述基板。 为此,对准单元控制装置不需要具有用于将照相机的视野中的对准标记定位的另一机构,并且可以更容易地制造,并且对准标记的区域可以是 检测更容易。

    Film-thickness measurement method and apparatus therefor, and thin-film device fabrication system
    9.
    发明授权
    Film-thickness measurement method and apparatus therefor, and thin-film device fabrication system 失效
    薄膜厚度测量方法及其设备以及薄膜器件制造系统

    公开(公告)号:US08184303B2

    公开(公告)日:2012-05-22

    申请号:US12517110

    申请日:2007-10-31

    IPC分类号: G01B11/28 G01B11/06

    摘要: Objects are to reduce the burden on an operator and to improve fabrication efficiency. A transparent conductive film or a transparent optical film formed on a substrate W is irradiated with line illumination light by means of a line illumination device 3, line reflected light reflected at the transparent conductive film or the transparent optical film is detected with a camera, a color evaluation value of the detected reflected light is measured, and a film thickness corresponding to the measured color evaluation value is obtained using a film-thickness characteristic in which the color evaluation value is associated with the film thickness.

    摘要翻译: 对象是减轻操作员的负担并提高制造效率。 利用线照明装置3照射在基板W上形成的透明导电膜或透明光学膜,利用照相机检测在透明导电膜或透明光学膜反射的线反射光, 测定检测出的反射光的颜色评价值,使用色彩评价值与膜厚相关联的膜厚特性,求出与测定色彩评价值对应的膜厚。

    ALIGNMENT UNIT CONTROL APPARATUS AND ALIGNMENT METHOD
    10.
    发明申请
    ALIGNMENT UNIT CONTROL APPARATUS AND ALIGNMENT METHOD 有权
    对准单元控制装置和对准方法

    公开(公告)号:US20110134235A1

    公开(公告)日:2011-06-09

    申请号:US13056566

    申请日:2009-10-28

    IPC分类号: H04N7/18

    摘要: An alignment unit control apparatus according to the present invention includes: an imaging section configured to control cameras to image a plurality of regions on a surface of a substrate to generate a plurality of images; a region detecting section configured to select a detection region from the plurality of regions based on the plurality of images; and an aligning section configured to align the substrate based on an alignment image obtained by imaging a mark of the substrate in the detection region by one of the plurality of cameras. For this reason, the alignment unit control apparatus does not need to have another mechanism for the purpose of positioning the mark for alignment in the field of vision of the camera, and can more easily be manufactured, and a region of an alignment mark can be detected more easily.

    摘要翻译: 根据本发明的对准单元控制装置包括:成像部,被配置为控制相机以对基板的表面上的多个区域进行成像以生成多个图像; 区域检测部,被配置为基于所述多个图像从所述多个区域中选择检测区域; 以及对准部,其被配置为基于通过所述多个照相机中的一个相机在所述检测区域中对所述基板的标记进行成像而获得的对准图像对准所述基板。 为此,对准单元控制装置不需要具有用于将照相机的视野中的对准标记定位的另一机构,并且可以更容易地制造,并且对准标记的区域可以是 检测更容易。