公开(公告)号：US6097197A

公开(公告)日：2000-08-01

申请号：US907191

申请日：1997-08-06

申请人： Katsuhiro Matsuyama ,  Nobuaki Sakai ,  Seizo Morita ,  Yasuhiro Sugawara

发明人： Katsuhiro Matsuyama ,  Nobuaki Sakai ,  Seizo Morita ,  Yasuhiro Sugawara

IPC分类号： G01B21/30 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/30 ,  G01Q90/00 ,  G01R31/302 ,  G01R31/02 ,  G01R31/305 ,  G03N23/00

CPC分类号： G01Q60/30 ,  B82Y35/00 ,  Y10S977/852

摘要： A conductive cantilever having a conductive probe on its free end is supported by a piezoelectric element, which oscillates upon reception of an AC voltage from a first AC voltage supply unit. An AC voltage is applied between a conductive sample and the probe by a variable DC voltage supply unit and a second AC voltage supply unit. An AM demodulator demodulates a signal from a displacement meter at an angular frequency of the first AC voltage supply unit. A lowpass filter extracts a DC component from an output signal from the AM demodulator, and a synchronism detector extracts a component concerning to the angular frequency twice as high as that of the second AC voltage supply unit from the AM demodulator output signal. A Z controller controls a position of a tube scanner based on an output signal from the subtracter which subtracts an output signal of the synchronism detector from an output signal of the lowpass filter. A data processing unit maps configuration data from the Z controller and surface potential data from a voltage control circuit, referring to XY data from an XY scanning circuit, such that a configuration image and a potential distribution image of the sample are obtained.

摘要翻译： 在其自由端具有导电探针的导电悬臂由压电元件支撑，该压电元件在接收到来自第一AC电压供应单元的AC电压时振荡。 通过可变直流电压供应单元和第二交流电压供应单元在导电样品和探针之间施加交流电压。 AM解调器以位于第一AC电压供应单元的角频率处的来自位移计的信号解调。 低通滤波器从AM解调器的输出信号中提取DC分量，同步检测器从AM解调器输出信号中提取与第二AC电压供给单元的角频率相关的分量的两倍。 Z控制器基于来自减法器的输出信号控制管扫描器的位置，该输出信号从低通滤波器的输出信号中减去同步检测器的输出信号。 参考XY扫描电路的XY数据，数据处理单元将来自Z控制器的配置数据和来自电压控制电路的表面电位数据进行映射，从而获得样品的配置图像和电位分布图像。

公开(公告)号：US5289004A

公开(公告)日：1994-02-22

申请号：US866748

申请日：1992-04-10

申请人： Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

发明人： Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

IPC分类号： G01Q10/00 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/12 ,  G01Q60/14 ,  G01Q60/38 ,  H01J37/00

CPC分类号： G01Q60/12 ,  B82Y35/00 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/14 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/868

摘要： A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.

摘要翻译： 扫描探针显微镜包括具有位于样品附近的导电探针的悬臂，用于将样品移动到远离探针的致动器，用于在探针和样品之间施加偏置电压以在其间产生隧道电流的电路，电路 用于检测产生的隧道电流的电路，用于检测由探针和样品的原子间作用的原子间力产生的探针的位移量，从而产生信号的电路，用于响应于来自 保持探针和样品之间的距离恒定的电路，从而使致动器移动样本，从检测到的隧道电流形成STS图像数据的电路，用于从检测到的隧道电流形成STM图像数据的电路， 以及用于形成AFM图像数据的电路。 因此，STS，STP和AFM图像同时分别获得。

公开(公告)号：US4877957A

公开(公告)日：1989-10-31

申请号：US70775

申请日：1987-07-07

申请人： Takao Okada ,  Toshihito Kouchi ,  Shuzo Mishima ,  Haruo Ogawa ,  Seizo Morita ,  Nobuo Mikoshiba

发明人： Takao Okada ,  Toshihito Kouchi ,  Shuzo Mishima ,  Haruo Ogawa ,  Seizo Morita ,  Nobuo Mikoshiba

IPC分类号： G01Q10/00 ,  G01Q40/02 ,  G01Q30/08 ,  G01Q60/16 ,  H01J37/26

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  Y10S977/861 ,  Y10S977/872

摘要： A scanning type tunnel microscope comprises a sample holding member for supporting a sample and a scanning probe which is arranged to face the sample to be separated therefrom by a very small distance and a supported by a scanning probe holding member. A tunnel current is flowed between the sample and scanning probe upon application of a voltage thereacross. A first actuator is coupled to the sample holding member and a second actuator is coupled to the scanning probe holding member so that the first and second actuators relatively drive said sample and said scanning probe in an axial direction and in a planar direction through said sample holding member and said scanning probe holding member. A differential micrometer is connected to the first actuator to move the actuator in the axial direction, and the micrometer and the second actuator are fixed on a substrate.

摘要翻译： 扫描型隧道显微镜包括用于支撑样本的样本保持构件和扫描探针，扫描探针被布置成面对要被分离的样本非常小的距离并由扫描探针保持构件支撑。 在施加电压之间时，隧道电流在样品和扫描探针之间流动。 第一致动器联接到样品保持构件，第二致动器联接到扫描探针保持构件，使得第一和第二致动器沿轴向方向和平面方向相对地驱动所述样品和扫描探针通过所述样品保持 构件和扫描探针保持构件。 差动千分尺连接到第一致动器以使致动器沿轴向移动，千分尺和第二致动器固定在基板上。

公开(公告)号：US5025153A

公开(公告)日：1991-06-18

申请号：US549469

申请日：1990-07-06

申请人： Takao Okada ,  Akira Yagi ,  Seizo Morita ,  Nobuo Mikoshiba

发明人： Takao Okada ,  Akira Yagi ,  Seizo Morita ,  Nobuo Mikoshiba

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/00 ,  G01Q60/10 ,  G01Q60/12 ,  H01J37/00 ,  H01J37/244 ,  H01J37/28

CPC分类号： G01Q60/12 ,  B82Y35/00 ,  Y10S977/851 ,  Y10S977/861

摘要： A scanning tunnel spectroscope comprises a generator for applying a bias voltage (V.sub.T) of a sin wave between a sample and probe, an I-V converter for converting a tunnel current flowing when the probe is set close to the sample, to a tunnel current representing voltage singal (I.sub.T), a detector for detecting the absolute value of the voltage signal (I.sub.t), and a servo circuit for servo-controlling a distance between the sample and probe using the absolute value with the servo time constant set larger than five times the period of the bias voltage. The information concerning the unevenness of the sample is obtained based on an output of the servo control means. A unit is provided for effecting the analog operation to derive a differential conductance based on the tunnel current on the real time basis and measuring the unevenness data and differential conductance between the sample and probe kept constant.

公开(公告)号：US08037739B2

公开(公告)日：2011-10-18

申请号：US12197108

申请日：2008-08-22

申请人： Masahiro Ota ,  Noriaki Oyabu ,  Hiroaki Adachi ,  Masayuki Abe ,  Seizo Morita ,  Yusuke Mori ,  Takatomo Sasaki

发明人： Masahiro Ota ,  Noriaki Oyabu ,  Hiroaki Adachi ,  Masayuki Abe ,  Seizo Morita ,  Yusuke Mori ,  Takatomo Sasaki

IPC分类号： G01N11/00

CPC分类号： G01Q30/14 ,  G01N1/36 ,  G02B21/33 ,  G02B21/34

摘要： A method for analyzing a sample in a liquid is provided, which is suitable for easily and reliably preventing a liquid for analysis from being evaporated. When the sample in the liquid is observed by using a scanning probe microscope (SPM), a sealing liquid (17) immiscible with a liquid for analysis (16) is filled around the liquid for analysis (16), in which a sample (13) and a probe (15) are immersed, so as to form a sealing state, in which the liquid for analysis (16) is isolated from an external gas. The SPM enables the probe (15) disposed on a front end of a cantilever (14) to approach a surface of the sample (13) immersed in the liquid, scans the surface of the sample, and detects an interaction between the sample (13) and the probe (15), thereby generating an image.

摘要翻译： 提供一种用于分析液体中的样品的方法，其适于容易且可靠地防止用于分析的液体蒸发。 当使用扫描探针显微镜（SPM）观察液体中的样品时，将用于分析的液体（16）不混溶的密封液体（17）填充在用于分析的液体（16）周围，其中样品（13 ）和探针（15），以便形成用于分析用液体（16）与外部气体隔离的密封状态。 SPM使得布置在悬臂（14）的前端上的探针（15）接近浸入液体中的样品（13）的表面，扫描样品的表面，并检测样品（13）之间的相互作用 ）和探头（15），从而产生图像。

公开(公告)号：US07975316B2

公开(公告)日：2011-07-05

申请号：US12523661

申请日：2008-01-07

申请人： Masahiro Ota ,  Noriaki Oyabu ,  Masayuki Abe ,  Oscar Custance ,  Yoshiaki Sugimoto ,  Seizo Morita

发明人： Masahiro Ota ,  Noriaki Oyabu ,  Masayuki Abe ,  Oscar Custance ,  Yoshiaki Sugimoto ,  Seizo Morita

IPC分类号： G01B5/28

CPC分类号： G01Q60/32 ,  G01Q30/04 ,  Y10S977/863

摘要： A frequency shift Δf obtained by an FM-AFM can be expressed by a simple linear coupling of a ΔfLR derived from a long-range interaction force and a ΔfSR derived from a short-range interaction force. Given this factor, a Δf curve on an atomic defect and a Δf curve on a target atom on the sample surface are each measured for only a relatively short range scale (S1 and S2), and a difference Δf curve of those two curves is obtained (S3). Since the difference Δf curve is derived only from a short-range interaction force, a known conversion operation is applied to this curve obtain an F curve which illustrates the relationship between the force and the distance Z, and then the short-range interaction force on the target atom is obtained from the F curve (S4). Since the range scale in measuring the Δf curve can be narrowed, the measurement time can be shortened, and since the conversion from the Δf curve into F curve is required only once, the computational time can also be shortened. Consequently, in obtaining the short-range interaction force which acts between the atom on the sample surface and the probe, the time required for the Δf curve's measurement and the computational time are shortened, which leads to accuracy improvement and throughput enhancement.

摘要翻译： 通过FM-AFM获得的频移和Dgr f可以通过从远程相互作用力得到的＆Dgr; fLR和从短程相互作用力得到的＆Dgr; fSR的简单线性耦合来表示。 考虑到这个因素，样品表面上的原子缺陷和目标原子上的＆Dgr; f曲线每个都只测量相对较短的范围尺度（S1和S2），并且差分Dgr f曲线 得到这两条曲线（S3）。 由于差值Dgr f曲线仅来自短距离相互作用力，因此将已知的转换操作应用于该曲线，获得F曲线，该F曲线说明了力与距离Z之间的关系，然后是短距离相互作用 从F曲线获得目标原子上的力（S4）。 由于可以缩小＆Dgr。f曲线的测量范围，所以可以缩短测量时间，由于从＆Dgr。f曲线到F曲线的转换只需要一次，所以计算时间也可以缩短。 因此，在获得样品表面上的原子和探针之间作用的短程相互作用力时，缩短了＆Dgr。f曲线测量所需的时间和计算时间，从而提高了精度和提高了生产率。

公开(公告)号：US20070272005A1

公开(公告)日：2007-11-29

申请号：US11802624

申请日：2007-05-24

申请人： Masayuki Abe ,  Masahiro Ota ,  Yoshiaki Sugimoto ,  Kenichi Morita ,  Noriaki Oyabu ,  Seizo Morita ,  Oscar Custance

发明人： Masayuki Abe ,  Masahiro Ota ,  Yoshiaki Sugimoto ,  Kenichi Morita ,  Noriaki Oyabu ,  Seizo Morita ,  Oscar Custance

IPC分类号： G12B21/20 ,  G01N13/10

CPC分类号： G01Q30/06 ,  G01Q70/04

摘要： The present invention provides a technique for eliminating the effect of the thermal drift and other variances and to improve the observing or manipulating accuracy of a scanning probe microscope or atom manipulator by using the technique to correct the aforementioned change in the relative position of the probe and the sample due to heat or other factors during the observation or manipulation. To obtain an image of the sample surface at the atomic level or perform a certain manipulation on an atom on the sample surface, the present invention can be applied to a probe position control method for controlling the relative position of the probe and the sample while measuring an interaction between the objective atom on the sample surface and the tip of the probe. In the present method, the relative position of the probe and the sample are changed while the probe is oscillated relative to the sample in two directions parallel to the sample surface at frequencies of f1 and f2 (S1a). Meanwhile, a point (or characteristic point) where the frequencies f1 and f2 disappear from the measured value of the interaction working in the direction perpendicular to the sample surface is detected (S1b). Then, the relative movement of the probe and the sample is controlled so that the measurement value thereby detected is maintained (i.e. the characteristic point is tracked; S1c), and the speed of the aforementioned relative movement is determined (S1d). Subsequently, the relative position control is corrected using the detected speed (S2).

摘要翻译： 本发明提供了一种用于消除热漂移和其它方差的影响的技术，并且通过使用该技术来校正探针的相对位置的上述变化来提高扫描探针显微镜或原子操纵器的观察或操纵精度，以及 在观察或操纵期间由于热或其他因素导致的样品。 为了获得原子级别的样品表面的图像或对样品表面上的原子进行一定的操作，本发明可以应用于用于在测量时控制探针和样品的相对位置的探针位置控制方法 样品表面上的目标原子与探针尖端之间的相互作用。 在本方法中，探针和样品的相对位置在f 1和f 2的频率下相对于样品在平行于样品表面的两个方向上振荡的同时发生变化， 2（S 1a）。 同时，检测频率f 1和f 2 2的点（或特征点）从垂直于样品表面的方向上工作的相互作用的测量值消失 （S 1b）。 然后，控制探头和样品的相对移动，使得由此检测到的测量值被维持（即跟踪特征点; S1c），并且确定上述相对移动的速度（S1d） 。 随后，使用检测速度来校正相对位置控制（S 2）。

公开(公告)号：US5185572A

公开(公告)日：1993-02-09

申请号：US585880

申请日：1990-09-20

申请人： Akira Yagi ,  Takao Okada ,  Seizo Morita ,  Nobuo Mikoshiba

发明人： Akira Yagi ,  Takao Okada ,  Seizo Morita ,  Nobuo Mikoshiba

IPC分类号： G01Q60/12 ,  G01B7/34 ,  G01Q30/04 ,  G01Q60/14

CPC分类号： G01Q60/12 ,  B82Y35/00 ,  G01B7/34 ,  G01Q30/04 ,  G01Q60/14 ,  Y10S977/852

摘要： A bias voltage U.sub.B including a sine-wave voltage U.sub.T sin.omega. .sub.o t and an off-set voltage U.sub.REG is applied to an electrode on a sample. A potential U.sub.1 of the electrode is represented by: U.sub.1 =U.sub.REG +U.sub.T sin.omega. .sub.o t. A voltage including the bias voltage U.sub.B and a voltage .DELTA.U is applied to an electrode on the sample. A probe is approached to the sample by several nm, and a tunnel current I.sub.T flows therebetween. And the probe scans the surface of the sample. During the scan, the position of the probe is servo-controlled in the z-direction, to make constant the average absolute value of the tunnel current. The servo voltage is recorded thereby obtaining an STM image. Given that the potential difference between the electrode and a surface portion facing the probe is U.sub.S (x), the average of U.sub.1 +U.sub.S (x) becomes zero when the average of the tunnel current I.sub.T is zero. Accordingly, =0, that is, U.sub.S (x)=-U.sub.REG. Thus, by recording-U.sub.REG the potential distribution U.sub.S (x) on the sample surface is determined. Spectroscopic data is obtained by an analog operation unit, on the basis of a differential conductance .differential.I.sub.T /.differential.U.sub.T calculated from the tunnel current signal I.sub.T and the bias voltage U.sub.T.

公开(公告)号：US07703314B2

公开(公告)日：2010-04-27

申请号：US11802624

申请日：2007-05-24

申请人： Masayuki Abe ,  Masahiro Ota ,  Yoshiaki Sugimoto ,  Kenichi Morita ,  Noriaki Oyabu ,  Seizo Morita ,  Oscar Custance

发明人： Masayuki Abe ,  Masahiro Ota ,  Yoshiaki Sugimoto ,  Kenichi Morita ,  Noriaki Oyabu ,  Seizo Morita ,  Oscar Custance

IPC分类号： G01B5/28

CPC分类号： G01Q30/06 ,  G01Q70/04

摘要： The present invention provides a technique for eliminating the effect of the thermal drift and other variances and to improve the observing or manipulating accuracy of a scanning probe microscope or atom manipulator by using the technique to correct the aforementioned change in the relative position of the probe and the sample due to heat or other factors during the observation or manipulation. To obtain an image of the sample surface at the atomic level or perform a certain manipulation on an atom on the sample surface, the present invention can be applied to a probe position control method for controlling the relative position of the probe and the sample while measuring an interaction between the objective atom on the sample surface and the tip of the probe. In the present method, the relative position of the probe and the sample are changed while the probe is oscillated relative to the sample in two directions parallel to the sample surface at frequencies of f1 and f2 (S1a). Meanwhile, a point (or characteristic point) where the frequencies f1 and f2 disappear from the measured value of the interaction working in the direction perpendicular to the sample surface is detected (S1b). Then, the relative movement of the probe and the sample is controlled so that the measurement value thereby detected is maintained (i.e. the characteristic point is tracked; S1c), and the speed of the aforementioned relative movement is determined (S1d). Subsequently, the relative position control is corrected using the detected speed (S2).

摘要翻译： 本发明提供了一种用于消除热漂移和其它方差的影响的技术，并且通过使用该技术来校正探针的相对位置的上述变化来提高扫描探针显微镜或原子操纵器的观察或操纵精度，以及 在观察或操纵期间由于热或其他因素导致的样品。 为了获得原子级别的样品表面的图像或对样品表面上的原子进行一定的操作，本发明可以应用于用于在测量时控制探针和样品的相对位置的探针位置控制方法 样品表面上的目标原子与探针尖端之间的相互作用。 在本方法中，探针和样品的相对位置在f1和f2频率（S1a）处探针相对于样品在平行于样品表面的两个方向上振荡时改变。 同时，检测频率f1和f2从与样品表面垂直的方向上工作的相互作用的测量值消失的点（或特征点）（S1b）。 然后，控制探头和样本的相对运动，使得维持测量值（即跟踪特征点; S1c），并确定上述相对运动的速度（S1d）。 随后，使用检测的速度来校正相对位置控制（S2）。

公开(公告)号：US20100071099A1

公开(公告)日：2010-03-18

申请号：US12523661

申请日：2008-01-07

申请人： Masahiro Ota ,  Noriaki Oyabu ,  Masayuki Abe ,  Oscar Custance ,  Yoshiaki Sugimoto ,  Seizo Morita

发明人： Masahiro Ota ,  Noriaki Oyabu ,  Masayuki Abe ,  Oscar Custance ,  Yoshiaki Sugimoto ,  Seizo Morita

IPC分类号： G01Q60/24

CPC分类号： G01Q60/32 ,  G01Q30/04 ,  Y10S977/863

摘要： A frequency shift Δf obtained by an FM-AFM can be expressed by a simple linear coupling of a ΔfLR derived from a long-range interaction force and a ΔfSR derived from a short-range interaction force. Given this factor, a Δf curve on an atomic defect and a Δf curve on a target atom on the sample surface are each measured for only a relatively short range scale (S1 and S2), and a difference Δf curve of those two curves is obtained (S3). Since the difference Δf curve is derived only from a short-range interaction force, a known conversion operation is applied to this curve obtain an F curve which illustrates the relationship between the force and the distance Z, and then the short-range interaction force on the target atom is obtained from the F curve (S4). Since the range scale in measuring the Δf curve can be narrowed, the measurement time can be shortened, and since the conversion from the Δf curve into F curve is required only once, the computational time can also be shortened. Consequently, in obtaining the short-range interaction force which acts between the atom on the sample surface and the probe, the time required for the Δf curve's measurement and the computational time are shortened, which leads to accuracy improvement and throughput enhancement.

摘要翻译： 通过FM-AFM获得的频移和Dgr f可以通过从远程相互作用力得到的＆Dgr; fLR和从短程相互作用力得到的＆Dgr; fSR的简单线性耦合来表示。 考虑到这个因素，样品表面上的原子缺陷和目标原子上的＆Dgr; f曲线每个都只测量相对较短的范围尺度（S1和S2），并且差分Dgr f曲线 得到这两条曲线（S3）。 由于差值Dgr f曲线仅来自短距离相互作用力，因此将已知的转换操作应用于该曲线，获得F曲线，该F曲线说明了力与距离Z之间的关系，然后是短距离相互作用 从F曲线获得目标原子上的力（S4）。 由于可以缩小＆Dgr。f曲线的测量范围，所以可以缩短测量时间，由于从＆Dgr。f曲线到F曲线的转换只需要一次，所以计算时间也可以缩短。 因此，在获得样品表面上的原子和探针之间作用的短程相互作用力时，缩短了＆Dgr。f曲线测量所需的时间和计算时间，从而提高了精度和提高了生产率。