公开(公告)号：US4877957A

公开(公告)日：1989-10-31

申请号：US70775

申请日：1987-07-07

申请人： Takao Okada ,  Toshihito Kouchi ,  Shuzo Mishima ,  Haruo Ogawa ,  Seizo Morita ,  Nobuo Mikoshiba

发明人： Takao Okada ,  Toshihito Kouchi ,  Shuzo Mishima ,  Haruo Ogawa ,  Seizo Morita ,  Nobuo Mikoshiba

IPC分类号： G01Q10/00 ,  G01Q40/02 ,  G01Q30/08 ,  G01Q60/16 ,  H01J37/26

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  Y10S977/861 ,  Y10S977/872

摘要： A scanning type tunnel microscope comprises a sample holding member for supporting a sample and a scanning probe which is arranged to face the sample to be separated therefrom by a very small distance and a supported by a scanning probe holding member. A tunnel current is flowed between the sample and scanning probe upon application of a voltage thereacross. A first actuator is coupled to the sample holding member and a second actuator is coupled to the scanning probe holding member so that the first and second actuators relatively drive said sample and said scanning probe in an axial direction and in a planar direction through said sample holding member and said scanning probe holding member. A differential micrometer is connected to the first actuator to move the actuator in the axial direction, and the micrometer and the second actuator are fixed on a substrate.

摘要翻译： 扫描型隧道显微镜包括用于支撑样本的样本保持构件和扫描探针，扫描探针被布置成面对要被分离的样本非常小的距离并由扫描探针保持构件支撑。 在施加电压之间时，隧道电流在样品和扫描探针之间流动。 第一致动器联接到样品保持构件，第二致动器联接到扫描探针保持构件，使得第一和第二致动器沿轴向方向和平面方向相对地驱动所述样品和扫描探针通过所述样品保持 构件和扫描探针保持构件。 差动千分尺连接到第一致动器以使致动器沿轴向移动，千分尺和第二致动器固定在基板上。

公开(公告)号：US5083022A

公开(公告)日：1992-01-21

申请号：US589491

申请日：1990-09-27

申请人： Hirofumi Miyamoto ,  Tsugiko Takase ,  Takao Okada ,  Shuzo Mishima ,  Hiroko Ohta

发明人： Hirofumi Miyamoto ,  Tsugiko Takase ,  Takao Okada ,  Shuzo Mishima ,  Hiroko Ohta

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01Q10/02 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/28 ,  H01J37/00

CPC分类号： G01Q70/02 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q30/025 ,  G01Q60/16 ,  B82Y20/00 ,  Y10S977/869

摘要： A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.

公开(公告)号：USD335888S

公开(公告)日：1993-05-25

申请号：US621550

申请日：1990-12-03

申请人： Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hisanari Shimazu ,  Akira Yagi ,  Hiroko Ota ,  Hirofumi Miyamoto ,  Takaaki Takenobu

设计人： Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hisanari Shimazu ,  Akira Yagi ,  Hiroko Ota ,  Hirofumi Miyamoto ,  Takaaki Takenobu

公开(公告)号：US5059793A

公开(公告)日：1991-10-22

申请号：US591457

申请日：1990-10-01

申请人： Hirofumi Miyamoto ,  Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hiroko Ota

发明人： Hirofumi Miyamoto ,  Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hiroko Ota

IPC分类号： G01N27/00 ,  G01Q10/00 ,  G01Q30/06 ,  G01Q60/16

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  Y10S977/851

摘要： A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.

公开(公告)号：US5041783A

公开(公告)日：1991-08-20

申请号：US475169

申请日：1990-02-05

申请人： Hiroko Ohta ,  Tsugiko Takase ,  Shuzo Mishima ,  Hirofumi Miyamoto ,  Takao Okada

发明人： Hiroko Ohta ,  Tsugiko Takase ,  Shuzo Mishima ,  Hirofumi Miyamoto ,  Takao Okada

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/02 ,  G01Q30/08 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/38 ,  G01R31/00 ,  H01J37/00 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q70/02 ,  Y10S977/861

摘要： A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.

公开(公告)号：US5296704A

公开(公告)日：1994-03-22

申请号：US821123

申请日：1992-01-14

申请人： Shuzo Mishima ,  Takao Okada ,  Tsugiko Takase ,  Hiroko Ota ,  Hirofumi Miyamoto

发明人： Shuzo Mishima ,  Takao Okada ,  Tsugiko Takase ,  Hiroko Ota ,  Hirofumi Miyamoto

IPC分类号： G01Q20/02 ,  G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/04 ,  H01J37/00

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q30/08 ,  G01Q30/18 ,  Y10S977/869

摘要： A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.

摘要翻译： 扫描隧道显微镜具有包括用于扫描物体表面的探针的STM单元。 STM单元在其外周表面具有朝向物台延伸的圆柱形封闭构件。 当观察对象时，对象表被升高或者STM单元被降低，使得封闭构件被推到桌子上。 表和STM单元构成一体。 结果，可以防止物体和探针之间的相对运动，并且还可以防止由振动引起的影响。 此外，封闭构件将物体和探针与外部空间隔离，由此屏蔽电噪声，磁噪声，声音噪声和空气流。 因此，可以降低由外部振动引起的影响，提高稳定性。

公开(公告)号：US5260824A

公开(公告)日：1993-11-09

申请号：US511054

申请日：1990-04-19

申请人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

发明人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01L5/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/38 ,  G02B4/00 ,  G01B5/28 ,  G01N23/00

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

公开(公告)号：US5253515A

公开(公告)日：1993-10-19

申请号：US661485

申请日：1991-02-26

申请人： Akitoshi Toda ,  Shuzo Mishima

发明人： Akitoshi Toda ,  Shuzo Mishima

IPC分类号： G01B11/30 ,  G01B21/30 ,  G01N27/00 ,  G01Q60/38 ,  G01Q70/02 ,  H01J37/252 ,  H01J37/26

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q70/02 ,  Y10S977/873

摘要： An atomic probe microscope comprises a cantilever which includes a lever section provided with a probe, a lever attaching section for supporting the lever section, and a positioning striking section formed at the lever attaching section. A cantilever unit comprises a seat for supporting the cantilever and provided with a face against which the positioning striking section is received.

公开(公告)号：US06246054B1

公开(公告)日：2001-06-12

申请号：US09092285

申请日：1998-06-05

申请人： Akitoshi Toda ,  Shuzo Mishima

发明人： Akitoshi Toda ,  Shuzo Mishima

IPC分类号： H01J3726

CPC分类号： G01Q60/38 ,  Y10S977/86 ,  Y10S977/873 ,  Y10S977/878 ,  Y10S977/879

摘要： A probe chip suitable for observing the vertical walls of steps in a specimen includes a cantilever-like elastic member section extending from a support section, and a probe section at the free end of the elastic member section. The probe section is in the form of a triangular flat plate. Three ridges are terminated at two vertexes at the tip of the probe section. The direction normal to the plane of the probe section section is parallel to the ridge connecting the two points at the tip. These two terminal points at the tip of the probe section act as a virtual probe and interact with the surface of the specimen. The direction normal to the plane of the elastic member section is nonparallel to the direction normal to the plane of the probe section.

摘要翻译： 适于观察试样中的台阶的垂直壁的探针芯片包括从支撑部分延伸的悬臂状弹性构件部分和在弹性构件部分的自由端处的探针部分。 探头部分是三角形平板的形式。 三个脊在探针部分的尖端处的两个顶点处终止。 与探头部分的平面垂直的方向平行于连接尖端两点的脊。 探头部分尖端的这两个端点用作虚拟探针，并与试样的表面相互作用。 与弹性构件部分的平面垂直的方向与垂直于探针部分平面的方向不平行。

公开(公告)号：US06898004B2

公开(公告)日：2005-05-24

申请号：US10252434

申请日：2002-09-23

申请人： Keiji Shimizu ,  Shuzo Mishima ,  Yoshihiro Kawano

发明人： Keiji Shimizu ,  Shuzo Mishima ,  Yoshihiro Kawano

IPC分类号： G02B21/06 ,  G02B21/00 ,  G02B21/16

CPC分类号： G02B21/16

摘要： In a microscope system, illumination light rays are emitted from a light source. The illumination light rays are collimated and reflected from a mirror to the optical element array. The optical element array is located at a conjugate position of a specimen, and includes a plurality of micro mirrors arranged in a matrix form. The micro mirrors are individually controlled to selectively reflect the illumination light rays for illuminating the specimen. Thus, a predetermined pattern of the light rays is reflected from the optical element array to an objective lens. The illumination light rays are projected on the specimen from the objective lens and the specimen is illuminated by the predetermined illumination pattern.

摘要翻译： 在显微镜系统中，照明光线从光源发射。 照明光线被准直并从反射镜反射到光学元件阵列。 光学元件阵列位于样本的共轭位置，并且包括以矩阵形式布置的多个微反射镜。 微镜被单独控制以选择性地反射用于照射样本的照明光线。 因此，光线的预定图案从光学元件阵列反射到物镜。 照明光线从物镜投影在样本上，并且样本被预定的照明图案照射。