公开(公告)号：US06635495B2

公开(公告)日：2003-10-21

申请号：US09866881

申请日：2001-05-30

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： H01L2100

CPC分类号： H01L37/02 ,  G01J5/34 ,  H01L27/16

摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

公开(公告)号：US06674081B2

公开(公告)日：2004-01-06

申请号：US10251953

申请日：2002-09-23

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： G01J500

CPC分类号： H01L37/02 ,  G01J5/34 ,  H01L27/16

摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

摘要翻译： 由铁电体膜形成的红外线检测电容器，其电容器部分由第一和第二互连线支撑，以保持在位于沟槽两侧的Si衬底上。 下电极与第一互连线耦合，而上电极与第二互连线耦合。 电容器部分是平面图中的矩形，没有在对角线方向上彼此相对的小三角形部分。

公开(公告)号：US06576566B2

公开(公告)日：2003-06-10

申请号：US09866869

申请日：2001-05-30

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Tatsuro Usuki ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Tatsuro Usuki ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： H01L2131

CPC分类号： H01L21/02197 ,  C23C14/0021 ,  C23C14/048 ,  C23C14/088 ,  C23C14/28 ,  H01L21/02266 ,  H01L21/31691

摘要： A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.

公开(公告)号：US06262418B1

公开(公告)日：2001-07-17

申请号：US09177148

申请日：1998-10-22

申请人： Kazuhiko Hashimoto ,  Masanori Okuyama ,  Ryuichi Kubo ,  Tomonori Mukaigawa

发明人： Kazuhiko Hashimoto ,  Masanori Okuyama ,  Ryuichi Kubo ,  Tomonori Mukaigawa

IPC分类号： G01J510

CPC分类号： G01J5/34

摘要： A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.

摘要翻译： 一种热式红外传感器具有： 多个光接收电极，用于输出当经受红外辐射时在电介质中发生的与偏振有关的表面电荷的变化; 以及多个补偿电极，对应一个用于一个到多个光接收电极，用于补偿相应的光接收电极的输出，并且其中多个补偿电极形成在不同的衬底上，所述衬底上具有多个光 形成接收电极。