公开(公告)号：US06674081B2

公开(公告)日：2004-01-06

申请号：US10251953

申请日：2002-09-23

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： G01J500

CPC分类号： H01L37/02 ,  G01J5/34 ,  H01L27/16

摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

摘要翻译： 由铁电体膜形成的红外线检测电容器，其电容器部分由第一和第二互连线支撑，以保持在位于沟槽两侧的Si衬底上。 下电极与第一互连线耦合，而上电极与第二互连线耦合。 电容器部分是平面图中的矩形，没有在对角线方向上彼此相对的小三角形部分。

公开(公告)号：US06635495B2

公开(公告)日：2003-10-21

申请号：US09866881

申请日：2001-05-30

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： H01L2100

CPC分类号： H01L37/02 ,  G01J5/34 ,  H01L27/16

摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

公开(公告)号：US06576566B2

公开(公告)日：2003-06-10

申请号：US09866869

申请日：2001-05-30

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Tatsuro Usuki ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Tatsuro Usuki ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： H01L2131

CPC分类号： H01L21/02197 ,  C23C14/0021 ,  C23C14/048 ,  C23C14/088 ,  C23C14/28 ,  H01L21/02266 ,  H01L21/31691

摘要： A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.

公开(公告)号：US08871552B2

公开(公告)日：2014-10-28

申请号：US13808894

申请日：2011-02-09

申请人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L21/00 ,  H01L21/20 ,  H01L31/18 ,  H01L31/115 ,  H01L21/02 ,  H01L31/0296 ,  H01L27/146

CPC分类号： H01L21/02573 ,  H01L21/02562 ,  H01L21/0262 ,  H01L27/14659 ,  H01L27/14692 ,  H01L27/14696 ,  H01L31/02966 ,  H01L31/115 ,  H01L31/1832 ,  Y02E10/50

摘要： Although Cl (chlorine) is no longer supplied in the course of a first process in which a detecting layer formed by a polycrystalline film or a polycrystalline lamination film by vapor deposition or sublimation is formed, an additional source (e.g., HCl of Cl-containing gas) other than a source is supplied at the start or in the course of the first process. Thus, the detecting layer as the polycrystalline film or the polycrystalline lamination film of CdTe, ZnTe, or CdZnTe can be doped with Cl uniformly in a thickness direction from the start until the end of the first process in film formation. As a result, uniform crystal particles and uniform detection characteristics can be achieved.

摘要翻译： 尽管在通过气相沉积或升华形成由多晶膜或多晶层压膜形成的检测层的第一工艺过程中不再提供Cl（氯），但另外的源（例如，含Cl 气体）在第一个过程的开始或过程中被提供。 因此，作为多晶膜的检测层或CdTe，ZnTe或CdZnTe的多晶层叠膜可以从成膜的第一工序开始到结束的厚度方向均匀地掺杂Cl。 结果，可以实现均匀的结晶粒子和均匀的检测特性。

公开(公告)号：US20120140881A1

公开(公告)日：2012-06-07

申请号：US13270258

申请日：2011-10-11

申请人： Akina Yoshimatsu ,  Koichi Tanabe ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Akina Yoshimatsu ,  Koichi Tanabe ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： G01T1/24 ,  G01N23/04

CPC分类号： G01T1/247 ,  H04N5/32 ,  H04N5/347 ,  H04N5/378

摘要： A drive controller varies a bias voltage applied from a bias supply to a conversion layer based on the presence or absence of binning, that is, for a case of carrying out binning where switching elements are driven on the basis of a plurality of rows at a time by a gate drive circuit, and for a case of carrying out no binning where the switching elements are driven on a row-by-row basis by the gate drive circuit. Therefore, in the case of a fluoroscopic mode for acquiring images with binning, a lowering of a dynamic range can be suppressed. In the case of a radiographic mode with no binning, spatial resolution can be made high. That is, a high dynamic range and high spatial resolution can be optimized according to modes of operation.

摘要翻译： 驱动控制器基于是否存在分档来改变从偏置电源施加到转换层的偏置电压，即，对于在基于多个行的驱动开关元件的情况下执行合并的情况， 并且对于通过栅极驱动电路逐行驱动开关元件的情况下，不执行合并的情况。 因此，在采用分档获取图像的透视模式的情况下，可以抑制动态范围的降低。 在没有合并的射线照相模式的情况下，可以使空间分辨率高。 也就是说，可以根据操作模式优化高动态范围和高空间分辨率。

公开(公告)号：US20120093290A1

公开(公告)日：2012-04-19

申请号：US13262098

申请日：2009-04-03

申请人： Satoshi Tokuda ,  Tamotsu Okamoto ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshinori Yoshimuta ,  Koichi Tanabe

发明人： Satoshi Tokuda ,  Tamotsu Okamoto ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshinori Yoshimuta ,  Koichi Tanabe

IPC分类号： G01N23/04 ,  H01L31/18 ,  H01L31/0296

CPC分类号： G01T1/24 ,  H01L31/115

摘要： According to a radiation detector manufacturing method, a radiation detector and a radiographic apparatus of this invention, Cl-doped CdZnTe is employed for a conversion layer, with Cl concentration set to 1 ppm wt to 3 ppm wt inclusive, and Zn concentration set to 1 mol % to 5 mol % inclusive. This can form the conversion layer optimal for the radiation detector. Consequently, the radiation detector manufacturing method, the radiation detector and the radiographic apparatus can be provided which can protect the defect level of crystal grain boundaries by Cl doping in a proper concentration, and can further maintain integral sensitivity to radiation, while reducing leakage current, by Zn doping in a proper concentration.

摘要翻译： 根据辐射检测器的制造方法，本发明的放射线检测器和射线照相设备采用Cl掺杂的CdZnTe作为转化层，Cl浓度设定为1ppm〜3ppm（重量），Zn浓度设定为1 mol％至5mol％。 这可以形成辐射探测器最佳的转换层。 因此，可以提供放射线检测器制造方法，放射线检测器和射线照相设备，其可以通过适当浓度的Cl掺杂来保护晶粒边界的缺陷水平，并且可以进一步保持对辐射的积分灵敏度，同时减少漏电流， 通过适当浓度的Zn掺杂。

公开(公告)号：US20130115731A1

公开(公告)日：2013-05-09

申请号：US13808894

申请日：2011-02-09

申请人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L31/0368

CPC分类号： H01L21/02573 ,  H01L21/02562 ,  H01L21/0262 ,  H01L27/14659 ,  H01L27/14692 ,  H01L27/14696 ,  H01L31/02966 ,  H01L31/115 ,  H01L31/1832 ,  Y02E10/50

摘要： Although Cl (chlorine) is no longer supplied in the course of a first process in which a detecting layer formed by a polycrystalline film or a polycrystalline lamination film by vapor deposition or sublimation is formed, an additional source (e.g., HCl of Cl-containing gas) other than a source is supplied at the start or in the course of the first process. Thus, the detecting layer as the polycrystalline film or the polycrystalline lamination film of CdTe, ZnTe, or CdZnTe can be doped with Cl uniformly in a thickness direction from the start until the end of the first process in film formation. As a result, uniform crystal particles and uniform detection characteristics can be achieved.

摘要翻译： 尽管在通过气相沉积或升华形成由多晶膜或多晶层压膜形成的检测层的第一工艺过程中不再提供Cl（氯），但另外的源（例如，含Cl 气体）在第一个过程的开始或过程中被提供。 因此，作为多晶膜的检测层或CdTe，ZnTe或CdZnTe的多晶层叠膜可以从成膜的第一工序开始到结束的厚度方向均匀地掺杂Cl。 结果，可以实现均匀的结晶粒子和均匀的检测特性。

公开(公告)号：US20120033110A1

公开(公告)日：2012-02-09

申请号：US13265064

申请日：2009-04-24

申请人： Koichi Tanabe ,  Hiroyuki Kishihara

发明人： Koichi Tanabe ,  Hiroyuki Kishihara

IPC分类号： H04N9/64

CPC分类号： H04N5/361 ,  A61B6/585 ,  G01T1/17 ,  H04N5/32 ,  H04N5/3742 ,  H04N5/378

摘要： The radiation image pickup apparatus of this invention can obtain an accurate temperature characteristic of dark current noise, the dark current noise being caused by dark current flowing through an X-ray conversion layer, by obtaining dark image signals at varied times for accumulating in capacitors charge signals converted by an X-ray converting layer. Consequently, the noise due to the dark current can be removed with high accuracy by removing periodically acquired offset signals from X-ray detection signals acquired at a time of X-ray image pickup, and correcting variations of the dark current noise due to a difference in temperature between a time of offset signal acquisition and the time of X-ray image pickup, using the temperature characteristic of the dark current noise.

摘要翻译： 本发明的放射线摄像装置可以获得暗电流噪声的精确温度特性，暗电流噪声是由流过X射线转换层的暗电流引起的，通过获得在电容器电荷积累的变化时间的暗图像信号 由X射线转换层转换的信号。 因此，通过从X射线摄像时获取的X射线检测信号中去除周期性地获取的偏移信号，可以高精度地去除由于暗电流引起的噪声，并且校正由于差异引起的暗电流噪声的变化 使用暗电流噪声的温度特性，在偏移信号获取时间与X射线摄像时间之间的温度。

公开(公告)号：US20080217713A1

公开(公告)日：2008-09-11

申请号：US11775678

申请日：2007-07-10

申请人： Satoshi Tokuda ,  Hiroyuki Kishihara

发明人： Satoshi Tokuda ,  Hiroyuki Kishihara

IPC分类号： H01L31/18 ,  H01L31/00

CPC分类号： H01L29/7869 ,  H01L27/12 ,  H01L27/14658 ,  H01L27/14659 ,  H01L31/115

摘要： The present invention relates to an industrial or medical radiation detector and a radiation imaging device equipped with the same. More specifically, the present invention relates to a technology for improving the detection properties and production efficiency for radiation detectors. The invention in claim 1 includes: a conductive support substrate; a semiconductor sensitivity film stacked onto the support substrate and generating a carrier (electron, positive hole) in response to an item to be detected; and means for reading equipped with an element for accumulating and reading the carrier generated by the semiconductor sensitivity film.

摘要翻译： 本发明涉及一种工业或医疗放射线检测器及其配备的放射线成像装置。 更具体地说，本发明涉及用于提高放射线检测器的检测特性和生产效率的技术。 权利要求1中的发明包括：导电支撑基板; 半导体敏感膜层叠在所述支撑基板上，并且响应于要检测的物品产生载流子（电子，空穴）; 以及装备有用于累积和读取由半导体敏感膜产生的载体的元件的读取装置。

公开(公告)号：US07301155B2

公开(公告)日：2007-11-27

申请号：US10691637

申请日：2003-10-24

申请人： Satoshi Tokuda ,  Hiroyuki Kishihara

发明人： Satoshi Tokuda ,  Hiroyuki Kishihara

IPC分类号： G01T1/24

CPC分类号： G01T1/24 ,  H01L27/14676 ,  H01L27/14683

摘要： A radiation detector provided in a substrate with a detection layer which is sensitive to radiation, the detector being characterized in that said detection layer is formed by a polycrystal film comprising either one of CdTe (cadmium telluride), ZnTe (zinc telluride) and CdZnTe (cadmium zinc telluride) or a laminate film of polycrystal including at least one thereof, and is doped with Cl.

摘要翻译： 一种辐射检测器，在基板上设置有对辐射敏感的检测层，检测器的特征在于，所述检测层由包含CdTe（碲化镉），ZnTe（碲化锌）和CdZnTe（碲化镉）之一的多晶膜形成， 碲化锌镉）或其中至少一种的多晶体的层压膜，并掺杂有Cl。