公开(公告)号：US07336892B2

公开(公告)日：2008-02-26

申请号：US10391583

申请日：2003-03-20

申请人： Kazuhiko Shimanuki ,  Hiroyuki Honma ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Takanori Saito ,  Ken Nakao

发明人： Kazuhiko Shimanuki ,  Hiroyuki Honma ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Takanori Saito ,  Ken Nakao

IPC分类号： F21V7/00 ,  G02F1/1335

CPC分类号： H01L21/67115 ,  H01L21/68757

摘要： It is provided that a reflection plate of semiconductor heat treatment, which is resistant to cracks or deformations by controlling the adsorption of foreign materials and the production of reaction. Said reflection plate 1 for semiconductor heat treatment is composed of a disk-shaped or ring-shaped plate of optically transmissible material and a plate 2 of inorganic material hermetically enclosed in said disk-shaped or ring-shaped plate, in which said plate of inorganic material has at least one side in contact with said plate of optically transmissible material, said at least one side 2a having a surface roughness of Ra 0.1 to 10.0 μm, said at least one side 2a formed grooves 2c therein.

摘要翻译： 提供了半导体热处理反射板，其通过控制异物的吸附和反应的产生而耐裂纹或变形。 用于半导体热处理的所述反射板1由光学可透射材料的盘形或环形板和密封在所述盘形或环形板上的无机材料板2组成，其中所述无机 材料具有至少一侧与光学可透射材料的所述板接触，所述至少一个侧面2a具有Ra 0.1至10.0μm的表面粗糙度，所述至少一个侧面2a在其中形成沟槽2c。

公开(公告)号：US06584279B2

公开(公告)日：2003-06-24

申请号：US09864196

申请日：2001-05-25

申请人： Sunao Seko ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Masakazu Kobayashi ,  Takanori Saito ,  Ken Nakao

发明人： Sunao Seko ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Hideyuki Yokoyama ,  Masakazu Kobayashi ,  Takanori Saito ,  Ken Nakao

IPC分类号： F26B330

CPC分类号： H01L21/67103 ,  H01L2924/0002 ,  H05B3/145 ,  H01L2924/00

摘要： A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

摘要翻译： 用碳丝加热元件密封的加热器具有用石英玻璃构件密封的碳线加热元件，碳线通过将碳单纤维编织成编织物的编织线制成，每根导线具有层间距为d的晶体结构 （002）为0.343以下，微晶尺寸Lc（002）为4.0nm以上。

公开(公告)号：US20050133494A1

公开(公告)日：2005-06-23

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/34

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US07072578B2

公开(公告)日：2006-07-04

申请号：US11038283

申请日：2005-01-21

申请人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

发明人： Norihiko Saito ,  Hiroyuki Honma ,  Hiroshi Mori ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Sunao Seko ,  Akira Otsu ,  Takanori Saito ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi

IPC分类号： H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

摘要翻译： 提供碳丝加热元件密封加热器。 其中，使用碳纤维的碳丝加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 / cm 3 或更少。

公开(公告)号：US6043468A

公开(公告)日：2000-03-28

申请号：US126847

申请日：1998-07-31

申请人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： C30B15/14 ,  C30B35/00 ,  H05B3/44

CPC分类号： C30B35/00 ,  C30B15/14 ,  H05B2203/003

摘要： A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

摘要翻译： 一种碳加热器，包括加热器构件（11,111,121,161,212,222,315,325,354,411,515,612），其中多个碳纤维束具有多个碳纤维， 捆扎的直径为5〜15μm被编织成纵向细长形状，例如线状或带状，杂质含量在灰分中小于10ppm。

公开(公告)号：US06204488B1

公开(公告)日：2001-03-20

申请号：US09450755

申请日：1999-11-30

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B300

CPC分类号： F27D99/0073 ,  F27D2099/0008 ,  H01L21/67098

摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

摘要翻译： 密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。 石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。 导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。 一个插头设置在管的下端以封闭它。 防止火花发生，而结构简单，易于组装的低电阻密封端子。

公开(公告)号：US06885814B2

公开(公告)日：2005-04-26

申请号：US10395395

申请日：2003-03-25

申请人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

发明人： Takanori Saito ,  Hiroshi Mori ,  Akira Otsu ,  Norihiko Saito ,  Hiroyuki Honma ,  Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Ken Nakao ,  Kazutoshi Miura ,  Harunari Hasegawa ,  George Hoshi ,  Katsutoshi Ishi ,  Sunao Seko

IPC分类号： H01L23/34 ,  H05B3/14 ,  H05B3/00

CPC分类号： H05B3/145 ,  H01L2924/0002 ,  H01L2924/00

摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

公开(公告)号：US06407371B1

公开(公告)日：2002-06-18

申请号：US09451868

申请日：1999-12-01

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06515264B2

公开(公告)日：2003-02-04

申请号：US10170539

申请日：2002-06-14

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US20060021582A1

公开(公告)日：2006-02-02

申请号：US10528704

申请日：2003-08-29

申请人： Takanori Saito ,  Kenichi Yamaga ,  Ken Nakao

发明人： Takanori Saito ,  Kenichi Yamaga ,  Ken Nakao

IPC分类号： C23C16/00

CPC分类号： H01L21/67109

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a reaction tube consisting of a single tube contained in the heating-furnace body; a gas-discharging-unit connecting portion formed at an upper portion of the reaction tube, the gas-discharging-unit connecting portion having a narrow diameter; a substrate-to-be-processed supporting member for supporting a substrate to be processed, contained in the heating-furnace body; and a heating unit for heating the substrate to be processed supported by the substrate-to-be-processed supporting member. The heating unit has: a first heating portion arranged around the reaction tube, a second heating portion arranged around the gas-discharging-unit connecting portion, a third heating portion arranged around an upper portion of the reaction tube, a fourth heating portion arranged around a lower portion of the reaction tube, and a fifth heating portion arranged under the substrate-to-be-processed supporting member.

摘要翻译： 本发明是一种热处理单元，包括：上端具有开口的加热炉体; 由包含在加热炉体内的单个管构成的反应管; 气体排出单元连接部，形成在反应管的上部，气体排出单元连接部具有窄直径; 用于支撑加热炉体内所包含的待处理基板的待处理基板的支撑部件; 以及加热单元，用于加热由要处理的基板支撑构件支撑的待处理基板。 所述加热单元具有：设置在所述反应管周围的第一加热部，配置在所述排气单元连接部周围的第二加热部，配置在所述反应管的上部的第三加热部， 反应管的下部，以及配置在被处理基板的支撑部件的下方的第五加热部。